The Stanford Nanofabrication Facility (SNF) is a state-of-the-art, University-based, shared-equipment resource. It is the descendent the Integrated Circuit Fabrication Facility begun in the basement of the McCullough building in mid 60's. While the fabrication of integrated circuits and related devices has always been central to this facility, the design and fabrication of MEMS type devices has been important component since its beginning. Much of the early support come from the medical systems area which resulted in pioneering work in the areas of image sensors, image processing, bio probes, pressure sensors, accelerometers, implantable electronics, and high voltage drivers. In the mid 70's device and process modelling began a long association with the facility. This result was the development of an array of device and process simulators with a stream of innovative devices and process test structures which is still continuing. In the early 80's the facility was upgraded and took on the support of larger chips, such as the MIPS chip and the Geometry Engine. In 1986 the facility was upgraded again with its move into the CIS building. Over the years, the equipment set and staff expertise has expanded to accomodate the ever-changing research needs of its labmembers, with current applications extending over a wide range of disciplines, such as optics, MEMS, biology, chemistry, as well as traditional electronics device fabrication and process characterization.

SNF, in partnership with sister facilities across the country, form the National Nanotechnology Infrastructure Network (the NNIN). This is an NSF-funded initiative with the directive of providing state-of-the-art fabrication resources to industrial and government, as well as academic researchers, across the country. The Network provides a platform for sharing expertise as well as resources and thus broadens the scope of tools available to our labmembers.