The Stanford Nanofabrication
Facility (SNF), a state-of-the-art shared-equipment 10,000 sq.ft.
clean room facility is housed in the Paul Allen Center for Integrated
Systems (CIS) building, which was built in 1985.
SNF
descended from the Integrated Circuits Laboratory which did
pioneer work in silicon semiconductor device and processing
technology, as well as early medical systems research. Current
applications extend over a wide range of disciplines, such as
optics, micro-electro mechanical systems (MEMS), biology, and
chemistry, as well as traditional semiconductor and electronics
device fabrication and process characterization. While called
a nanofabrication facility, work in this facility covers the
range of dimensions from nanometers to micrometers to even millimeters
and centimeters.