EMail Archives by Functional Area

All messages posted to email distribution lists for SNF equipment are linked on this page. Messages can be sorted and can be searched by thread. To view messages posted for a particular piece of equipment, click on the "Discussion List" link next to that tool. To view messages regarding "problems, comments & shutdowns", click on the "Equip Archive" link.

Lab Communication

Daily Lab Status
SNF Labmembers List
Litho
Etch
Thin Films
Diffusion
Beam Tools

E-Beam, SEM & Maskmaking
Discussion List Equip Archive Mask Cleaner
Discussion List Equip Archive Raith EBeam Lithography System (raith)
Discussion List Equip Archive SEM Hitachi 4160 Field Emission SEM (sem4160)


Optical Photolithography
Resist Coat

Discussion List Equip Archive Headway Coater (headway2)
Discussion List Equip Archive Laurell Resist Coater (laurell-G)
Discussion List Equip Archive Laurell Resist Coater (laurell-R)
Discussion List Equip Archive SVG Resist Coat System (svgcoat)
Discussion List Equip Archive SVG Resist Coat System (svgcoat2)
Discussion List Equip Archive Karl Suss Resist Coater (kscoat)
Discussion List Equip Archive EVG Resist Spray Coater (evgspraycoat)
Exposure
Discussion List Equip Archive ASML 5500 Stepper (asml)
Discussion List Equip Archive Electronic Visions 620 Aligner (evalign)
Discussion List Equip Archive Electronic Visions 620 Aligner(evalign2)
Discussion List Equip Archive Electronic Visions Nano Imprinter (evg-imprint)
Discussion List Equip Archive Karl Suss MA-6 Contact Aligner (karlsuss)
Discussion List Equip Archive Karl Suss MA-6 Contact Aligner (karlsuss2)
Develop
Discussion List Equip Archive SVG Develop System (svgdev)
Discussion List Equip Archive SVG Develop System (svgdev2)
Ovens/Bake/Cure
Discussion List Equip Archive Programmable Blue M Oven (bluem)
Discussion List Equip Archive Programmable Fusion Resist Hardener (fusion)
Discussion List Equip Archive UV Cure (uvcure)
Discussion List Equip Archive White Bake Oven (white-oven)
Discussion List Equip Archive YES Prime Oven (yes)


Chemical Vapor Deposition
Atomic Layer Deposition

Discussion List Equip Archive Cambridge Nanotech Savannah (savannah)
Discussion List Equip Archive Cambridge Nanotech Fiji 202 (fiji1)
Discussion List Equip Archive Cambridge Nanotech Fiji 202 (fiji2)
Low Pressure CVD
Discussion List Equip Archive Tystar TEOS Oxide Deposition (teos2)
Discussion List Equip Archive Thermco 9900 Nitride Deposition (thermconitride1)
Discussion List Equip Archive Thermco 9900 Poly Deposition (thermcopoly1)
Discussion List Equip Archive Thermco 9900 Low Temperature Oxide Deposition (thermcolto)
Discussion List Equip Archive Thermco 9900 Poly Deposition (thermcopoly2)
Discussion List Equip Archive Tylan LTO (tylanbpsg)
Discussion List Equip Archive Tylan Nitride (tylannitride)
Discussion List Equip Archive Tylan Poly (tylanpoly)
Discussion List Equip Archive Tylan SiGe (tylansige)
Plasma Enhanced CVD
Discussion List Equip Archive Plasma Therm PECVD System (ccp-dep)
Discussion List Equip Archive Plasma Therm High-Density PECVD System (hdpcvd)
Discussion List Equip Archive STS PECVD System (sts)
Discussion List Equip Archive TEL PECVD System (tel)
Epi
Discussion List Equip Archive

AMAT Centura Single-Wafer Epi System (epi2)


Metallization & Sputtering

Evaporation
Discussion List Equip Archive Innotec ES26C Evaporator (innotec)
Discussion List Equip Archive Intlvac Nanochrome E-Beam Evaporation System (intlvac_evap)
Sputtering
Discussion List Equip Archive Intlvac Nanochrome Sputtering System (intlvac_sputter)
Discussion List Equip Archive Metalica Sputtering System (metalica)

Dry Etching
Discussion List Equip Archive AMT 8100 Hexagonal Etching System (amtetcher)
Discussion List Equip Archive Drytek 100 Plasma Etchers (drytek2)
Discussion List Equip Archive Drytek 100 Plasma Etchers (drytek4)
Discussion List Equip Archive Gasonics Aura 1100 Resist Stripper (gasonics)
Discussion List Equip Archive Lam Research TCP 9400 Plasma Etcher (lampoly)
Discussion List Equip Archive Matrix Plasma Resist Stripper (matrix)
Discussion List Equip Archive MRC Low Pressure Reactive Ion Etcher (mrc)
Discussion List Equip Archive Applied Materials P500 Etcher (p5000etch)
Discussion List Equip Archive PlasmaQuest ECR GaAs Etcher (pquest)
Discussion List Equip Archive STS Multiplex ICP Deep Reactive Ion Etcher (stsetch)
Discussion List Equip Archive STS High Density Deep Silicon Etcher (stsetch2)
Discussion List Equip Archive Xactix Xenon Difluoride Etcher (xactix)
Discussion List Equip Archive Oxford Instruments III-V Etcher (ox-35)
Discussion List Equip Archive Plasma Therm Oxide Etcher (pt-ox)
Discussion List Equip Archive Plasma Therm Metal Etcher (pt-mtl)
Discussion List Equip Archive Plasma Therm Deep Silicon Etcher (pt-dse)


Annealing, Oxidation & Doping
Furnaces

Discussion List Equip Archive Pacific Wstern Forming Gas Annealing Furnace (fga2)
Discussion List Equip Archive Thermco Oxidation Furnace (thermco1)
Discussion List Equip Archive Thermco Oxidation Furnace (thermco2)
Discussion List Equip Archive Thermco Oxidation Furnace (thermco3)
Discussion List Equip Archive Thermco Oxidation Furnace (thermco4)
Discussion List Equip Archive Tylan Oxidation (tylan1)
Discussion List Equip Archive Tylan Oxidation (tylan2)
Discussion List Equip Archive Tylan Oxidation (tylan3)
Discussion List Equip Archive Tylan Oxidation (tylan4)
Discussion List Equip Archive Tylan Forming Gas Anneal (tylanfga)
Rapid Thermal Annealing
Discussion List Equip Archive AllWin 610 RTA System (aw610_l)
Discussion List Equip Archive AllWin 610 RTA System (aw610_r)
Doping
Discussion List Equip Archive Tylan Boron Doping (tylan5)
Discussion List Equip Archive Tylan Phosphorous Doping (tylan6)

Wet Benches
Discussion List Equip Archive Toussimis Critical Point Dryer (cpd)
Discussion List Equip Archive Diffusion Wet Bench (wbdiff)
Discussion List Equip Archive Gallium Arsenide Wet Bench (wbgaas-hpl)
Discussion List Equip Archive Gallium Arsenide Wet Bench (wbgaas-hpr)
Discussion List Equip Archive General User Wet Bench (wbgen-ctb)
Discussion List Equip Archive General User Wet Bench (wbgen-hpr)
Discussion List Equip Archive General User Wet Bench 2(wbgen2-hp)
Discussion List Equip Archive General User Wet Bench (wbgen2-rfx)
Discussion List Equip Archive Metal Wet Bench (wbmetal)
Discussion List Equip Archive Miscellaneous Resist Wet Bench (wbmiscres)
Discussion List Equip Archive Nitride Wet Bench (wbnitride)
Discussion List Equip Archive Nonmetal Wet Bench (wbnonmetal)
Discussion List Equip Archive Silicide Wet Bench (wbsilicide)
Discussion List Equip Archive Solvent Wet Bench (wbsolvent)

Wafer Bonding & Sawing
Discussion List Equip Archive GnP Chemical Mechanical Polishing (cmp)
Discussion List Equip Archive Electronic Visions 501 Bonder (evbond)
Discussion List Equip Archive Karl Suss Wafer Bonder (ksbonder)
Discussion List Equip Archive K&S Wafer Saw (wafersaw)


In-Line Process Characterization

Discussion List Equip Archive Atomic Force Microscope (afm2)
Discussion List Equip Archive Rudolph Ellipsometer (ellipsomter)
Discussion List Equip Archive Nanospec Film Thickness Measuring System (nanospec)
Discussion List Equip Archive Nanospec Optical Spectrophotometer (nanospec2)
Discussion List Equip Archive Prometrix Resistivity Mapping System (prometrix)
Discussion List Equip Archive Stress Measurement SMSi 3800 (stresstest)
Discussion List Equip Archive Woollam Ellipsometer (woollam)
Discussion List Equip Archive Zygo Optical Profilometer (zygo)
Discussion List Equip Archive Micromanipulator 6000 Probe Station (micromanipulator6000)


Facilities

Discussion List Equip Archive SNF Laboratory Facilities

Contacts by Equipment Name

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Stanford Nanofabrication Facility
Last Modified 07/18/2006