EMail Archives by Functional Area

All messages posted to email distribution lists for SNF equipment are linked on this page. Messages can be sorted and can be searched by thread. To view messages posted for a particular piece of equipment, click on the "Discussion List" link next to that tool. To view messages regarding "problems, comments & shutdowns", click on the "Equip Archive" link.

Lab Communication

Daily Lab Status
SNF Labmembers List
Litho
Etch
Thin Films
Diffusion
Beam Tools

E-Beam, SEM & Maskmaking
Discussion List Equip Archive Hitachi HL-700F Electron Beam System (ebeam)
Discussion List Equip Archive Raith EBeam Lithography System (raith)
Discussion List Equip Archive SEM Hitachi Model S-800 (semhitachi)
Discussion List Equip Archive Hitachi Field Emission SEM (sem4160)
Discussion List Equip Archive Micronic Laser Writer (micronic)


Optical Photolithography
Resist Coat

Discussion List Equip Archive Headway Coater (headway2)
Discussion List Equip Archive Laurel Coater (laurel)
Discussion List Equip Archive SVG Resist Coat System (svgcoat)
Exposure
Discussion List Equip Archive Electronic Visions 620 Aligner (evalign)
Discussion List Equip Archive Karl Suss MA-6 Contact Aligner (karlsuss)
Discussion List Equip Archive Karl Suss MA-6 Contact Aligner (karlsuss2)
Discussion List Equip Archive Nikon 5:1 Stepper (nikon)
Discussion List Equip Archive Ultratech Model 1000 1:1 Stepper (ultratech)
Discussion List Equip Archive Ultratech Model 1000 1:1 Stepper (ultratech2)
Develop
Discussion List Equip Archive SVG Develop System (svgdev)
Discussion List Equip Archive SVG Develop System (svgdev2)
Ovens/Bake/Cure
Discussion List Equip Archive YES Prime Oven (yes)
Discussion List Equip Archive Programmable Blue M Oven (bluem)
Discussion List Equip Archive UV Cure (uvcure)


Chemical Vapor Deposition
Low Pressure CVD

Discussion List Equip Archive Tylan LTO (tylanbpsg)
Discussion List Equip Archive Tylan Nitride (tylannitride)
Discussion List Equip Archive Tylan Poly (tylanpoly)
Discussion List Equip Archive Tylan SiGe (tylansige)
Discussion List Equip Archive Tystar Doped Poly LPCVD (tystar)
Plasma Enhanced CVD
Discussion List Equip Archive STS PECVD System (sts)
Epi
Discussion List Equip Archive

ASM Epsilon II Single-Wafer Epi System (epi)


Metallization & Sputtering

Discussion List Equip Archive Gryphon Sputtering System (gryphon)
Discussion List Equip Archive Innotec ES26C Evaporator (innotec)
Discussion List Equip Archive Metalica Sputtering System (metalica)

Dry Etching
Discussion List Equip Archive AMT 8100 Hexagonal Etching System (amtetcher)
Discussion List Equip Archive Drytek 100 Plasma Etchers (drytek1)
Discussion List Equip Archive Drytek 100 Plasma Etchers (drytek2)
Discussion List Equip Archive Drytek 100 Plasma Etchers (drytek4)
Discussion List Equip Archive Lam Research TCP 9400 Plasma Etcher (lampoly)
Discussion List Equip Archive Matrix Plasma Resist Stripper (matrix)
Discussion List Equip Archive MRC Low Pressure Reactive Ion Etcher (mrc)
Discussion List Equip Archive Applied Materials P500 Etcher (p5000etch)
Discussion List Equip Archive PlasmaQuest ECR GaAs Etcher (pquest)
Discussion List Equip Archive STS Multiplex ICP Deep Reactive Ion Etcher (stsetch)


Annealing, Oxidation & Doping
Furnaces

Discussion List Equip Archive GaAs Annealing Furnace (gaas22)
Dision List Equip Archive GaAs Annealing Furnace (gaas23)
Discussion List Equip Archive Tylan Oxidation (tylan1)
Discussion List Equip Archive Tylan Oxidation (tylan2)
Discussion List Equip Archive Tylan Oxidation (tylan3)
Discussion List Equip Archive Tylan Oxidation (tylan4)
Discussion List Equip Archive Tylan Forming Gas Anneal (tylanfga)
Rapid Thermal Annealing
Discussion List Equip Archive AG 4108 RTA System (AG4108)
Discussion List Equip Archive Silicon RTA AG System (rtaag)
Discussion List Equip Archive GaAs RTA AG System (rtagaas)
Doping
Discussion List Equip Archive Varian 350-D Ion Implanter (implanter350)
Discussion List Equip Archive Tylan Boron Doping (tylan5)
Discussion List Equip Archive Tylan Phosphorous Doping (tylan6)

Wet Benches
Discussion List Equip Archive Diffusion Wet Bench (wbdiff)
Discussion List Equip Archive Solvent Wet Bench (wbsolvent)
Discussion List Equip Archive General User Wet Bench (wbgeneral)
Discussion List Equip Archive Metal Wet Bench (wbmetal)
Discussion List Equip Archive Nitride Wet Bench (wbnitride)
Discussion List Equip Archive Nonmetal Wet Bench (wbnonmetal)
Discussion List Equip Archive Silicide Wet Bench (wbsilicide)

Wafer Bonding & Sawing
Discussion List Equip Archive Electronic Visions 501 Bonder (evbond)
Discussion List Equip Archive K&S Wafer Saw (wafersaw)


In-Line Process Characterization

Discussion List Equip Archive Gaertner Ellipsometer (ellipsomter)
Discussion List Equip Archive Nanoline Linewidth Measuring System (nanoline)
Discussion List Equip Archive Nanospec Optical Spectrophotometer (nanospec)
Discussion List Equip Archive Prometrix Resistivity Mapping System (prometrix)
Discussion List Equip Archive Stress Measurement SMSi 3800 (stresstest)
Discussion List Equip Archive SonoGage Resistivity/Wfr Thk (r2t2)
Discussion List Equip Archive DekTak Surface Profilometer


Facilities

Equip Archive SNF Laboratory Facilities

Contacts by Equipment Name

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Stanford Nanofabrication Facility
Last Modified 07/18/2006