Equipment List and Contacts

E-Beam, SEM, & Maskmaking
Coral Name
Equipment
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
ebeam Hitachi H-700 F11 Electron Beam Lithography System
2X4 (a)
hummer Hummer V Gold Sputter Coater
/
2
raith Raith Electron Beam Lithography System
4X3 (a)
sem4160 Hitachi 4160 SEM
/
2
semhitachi Hitachi Model S-800 Scanning Electron Microscope
/
2
Optical Photolithography: Resist Coat
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
headway2 Headway Manual Resist Spinner
* /
0.5 (a)
laurell-R/ laurell3 Laurell Manual Resist Spinner
* /
0.5 (a)
svgcoat/ svgcoat2 SVG Resist Coat Tracks 1&2

/

* /
1.25 (a)
Optical Photolithography: Exposure
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
asml ASML PAS 5500/60 i-line Stepper
* /
* /
TBD
evalign EV Group Contact Aligner
* /
1.5 (a)
evg-imprint EV Group Nanoimprint System
* /
N/A
karlsuss/ karlsuss2 Karl Suss MA-6 Contact Aligner 1&2
* /
1.5 (a)
nikon Nikon NRS 5:1 Stepper
* /
3.5 (a)
Optical Photolithography: Develop
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
svgdev/ svgdev2 SVG Resist Develop tracks 1&2
/
* /
0.5 (a)
Ovens
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
bluem
 Blue M Programmable Oven
/
0.5
fusion Fusion UV Cure System
/
TBD
oven110 110°C Oven
/
oven90 90°C Oven
/
oven3 Mahnaz's Oven
/
0.5 (a)
ovensinge Singe Oven
/
uvcure Ultraviolet Photoresist Cure
/
TBD (a)
yes YES Prime Oven
/
* /
Chemical Vapor Deposition Low Pressure CVD
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
teos2 LPCVD TEOS
/
3 (b)
thermoconitride1 Thermo LPCVD Nitride
/
3 (b)
thermocopoly1 Thermco LPCVD Poly
/
3 (b)
tylanbpsg LPCVD BPSG

Clean/ Semiclean
/
/
3 (b)
tylannitride LPCVD Nitride
/
/
4 (or 2 w/tylanpoly) (b)
tylanpoly LPCVD Polysilicon
/
/
3 (or 2 w/ tylannitride) (b)
tylansige LPCVD silicon Germanium Poly
/
6 (b)
Chemical Vapor Dep Plasma Enhanced CVD
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
sts STS Plasma Enhanced CVD
/
2 X 1.25
tel TEL Trias SPA Plasma Processing System
N/A
Epi
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
ald Atomic Layer Deposition System
/
/
N/A
epi ASM Epsilon II Single-Wafer Epitaxial Reactor
/
3 X 2 (b)
epi2
Applied Materials Centurion Epitaxial System
/
/
N/A
Metallization & Sputtering
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
gryphon Gryphon Metal Sputter System
1
innotec Innotec ES26C E-Gun Evaporator
/
2 X 3
metalica Metallica Sputter System
2 X 3
sct SCT Sputter System
2
Dry Etching
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
amtetcher AMT Oxide Plasma Etcher
/
1
drytek1 Drytek 100 Plasma Etcher
/
1 (c)
drytek2 Drytek 100 Plasma Etcher

/
1 (c)
drytek4 Drytek 100 Plasma Etcher
/
1 (c)
gasonics Gasonics Aura Asher
/
0.25
lampoly Lam Research TCP 9400 Poly Etcher
/
0.5
matrix Matrix Plasma Resist Strip
/
0.5
mrc
 MRC Reactive Ion Etcher
/
1.5
p5000etch Applied Materials P5000 Etcher

Clean (Ch B/C) /
Semiclean (ChAD)

/
2.5
pquest Plasma Quest ECR Etcher
/
1
sts320 STS Model 320 Etcher
/
N/A
stsetch STS Deep RIE Etcher
/
2
stsetch2 STS HRM Deep RIE Etcher
/
/
2
xactix Xactix Xenon Difluoride Etcher
/
/
1
Annealing, Oxidation, & Doping
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
fga2 Forming Gas Anneal (formerly gaas23)
/
/
TBD
thermco1/2 Thermco Oxidation Furnace #1
/
/
1 (b)
tylan1/2
 Tylan #1 Oxidation Furnace
/
/
3 (b)
tylan3 Tylan #3 Oxidation Furnace
/
/
tylan4 Tylan #4 Oxidation Furnace
/
/
tylan5 Boron Predep Furnace (BBr3)
/
/
tylan6 Phos Predep Furnace (POCl3)
/
/
tylanfga H2 Anneal Furnace
/
/
Rapid Thermal Annealing
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
ag4100 AG4100 Rapid Thermal Annealer
/
2.5
ag4108
 AG4108 Rapid Thermal Annealer
/
2.5
rtagaas GaAs Rapid Thermal Annealer
/
TBD
rtaag Rapid Thermal Annealer 210
/
TBD
Wetbenches
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
cpd Critical Point Dryer Cont
/
/
2
lithosolv Lithography Solvent Bench All
/
  Mask Scrubber N/A
wbdiff Diffusion Wetbench Clean
/
/
2.25
wbebeam Ebeam Process Wetbench All
NA
wbgaas-hpl / wbgaas-hpr GaAs Acid Wetbench NonStd WB
/
/
2.25

wbgen-ctb / wbgen-hpr

 General Wetbench NonStd WB
/
/
2.25
wbgen2-hp / wbgen2-rfx General Wetbench 2 Clean (Ge)
/
2.25
wbmetal Metal Wetbench Semiclean
/
/
.75
wbmiscres Miscellaneous Photoresist Wetbench NonStd WB
/
wbnitride Nitride and Tweezer Cleaning Wetbench Clean
/
/
.75
wbnonmetal
 Non-Metal Wetbench Clean
/
/
covered in wbdiff
wbsilicide Silicide Wetbench Semiclean
/
/
covered in wbdiff
wbsolvent Solvent Wetbench NonStd WB
/
/
.5
Wafer Bonding Sawing
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
evbond Electronics Visions Wafer Bonder
/
4
ksbonder Karl Suss Wafer Bonder
/
4
wafersaw K&S Wafer Saw
/
/
1
Characterization and Testing
Coral Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
afm2
 Digital Instruments Nanoscope 3000 AFM

/

/
3
alphastep Alphastep Profilometer
/
/
.25
ellipsomter Rudolph Ellipsometer
/
.5
nanospec / nanospec2 Nanospec Film Thickness Measurement System
/
.25
prometrix Prometrix Resistivity Mapping System

All
/
.5
p2 Tencor P2 Profilometer
.5
stresstest Flexus 2320

.75
tencor Tencor 4500 Surfscan Particle Monitor
N/A
N/A
N/A