Current lab priorities:  lampoly, p5000etch, drytek4

E-Beam, SEM & Maskmaking

            ebeam – down – following power glitch Monday morning.

            raith - up

            sem4160 - up

            semhitachi - up

Optical Photolithography

            Resist Coat

                        headway2  - up

                        laurell-R - up

                        svgcoat/2 – up.  Intermittent spin and EBR problems reported. 

                        kscoat - down

            Exposure

                        asml – up.  3-D align stage upgrade, tentatively scheduled for mid- late- April and will be unavailable for about two weeks.  Stay tuned for updates.

                        evalign – up.  PM and WEC replacement tentatively scheduled for next week (March 3)

                        evg-imprint - up

                        karlsuss – up.  Resolution not optimal.  PM to be scheduled soon.

                        karlsuss2 – up.  Resolution not optimal.  PM to be scheduled soon.

                        nikon – up.  Not used yet in 2008.

                        ultratech – down.  For good.

            Develop

                        svgdev/2 – Possible develop issue on #2.

            Oven Bake & Cure

                        bluem – up. 

                        fusion– up.  Receiver index issues.  Run one wafer at a time.

                        uvcure – up.

                        yes – up.

Chemical Vapor Deposition

            Low Pressure CVD

                        teos2 - up

                        thermconitride1 – up. 

                        thermcopoly1– up. 

                        thermconitride2 – down.  Under process development.

                        thermcopoly2 – up.  Under process development.

                        tylanbpsg – up. 

                        tylannitride – up.  MFS alarm reported.

                        tylanpoly – up.

                        tylansige – up.

            PECVD

                        sts– up.

                        tel– up.

            ald - up

            epi – up.  Low p dopant out/on order.  Reflector needs replacement.

            epi2 – up.  Handling issues.  B-side OK.

Metallization and Sputtering

            gryphon – up.  Intermittent pumping problem reported.   To be address with a major, scheduled PM some time in coming weeks (ferrofluidic seal and target replacement).  Be aware that base pressure will be higher than usual for a couple of weeks following the PM.   

            innotec – up.  Roughing pump not working really well, but as long as it crosses over it should be OK.  Pump will be rebuilt or replaced.

            metalica – up. 

            sct - up

Dry Etching

            amtetcher – up.  Robin checked etch rates, which look good.

            drytek1 – up.

            drytek2 – up.

            drytek4 – down.  Matching network failed.  Needs repair.

            gasonics – up.

            lampoly – down.  Losing wafers and turbo errors.  Looking like the turbo backing pump has failed.  A spare is due back soon.  If all goes well, it should be back up this week.  If not, all bets are off.

            matrix

            mrc

            p5000etch – up, limping on two RF generators for three chambers.  Right now, ChC generator is on ChA.  Please coordinate with staff about scheduling RF generators.  (Equipment may be unavailable at times this week while maintenance installs and checks a spare generator.)

            pquest

            pquest2

            stsetch – up.  C4F8 flow problem reported.  Process recipe ran for 30 minutes without problem.  System remains in yellow for observation.

            stsetch2

            xactix – A leak is suspected.  Plans to reinstall gas cylinder.

Annealing, Oxidation, and Doping

            Furnaces

                        fga2 - up

                        thermco1- up

                        thermco2- up

                        thermco3- NA

                        thermco4- NA

                        tylan1- up

                        tylan2- up

                        tylan3- up

                        tylan4- up

                        tylanfga- up

            Rapid Thermal Processing

                        AG4100

                        AG4108

                        rtaag

                        rtagaas

            Doping

                        tylan5- up

                        tylan6- up

Wet Benches

            cpd- up

            lithosolv- up

            solvhood- up

            tubeclean- up

            wbdiff- up

            wbebres- up

            wbgaas- up

            wbgeneral- up

            wbgen2- up.  “Clean” station, for germanium cleans.  Users requiring wafer cassette processing of gold-contaminated materials, contact Mary & Uli.

            wbmetal- up

            wbmiscres- up

            wbnitride- up

            wbnonmetal- up

            wbsilicide- up

            wbsolvent- up

Wafer Bonding & Sawing

            cmp- up

            evbond- up

            ksbonder- up

            thermolyne- up

            wafersaw- up

Characterization & Testing

            alphastep- up

            afm2- up

            ellipsomter- up

            nanospec/2- up

            prometrix- up

            p2- up

            stresstest- up.  Intermittent stage home and Z-height problems.

            woollam- up

            zygo- up.  No network connection.

Facilities

- Power glitch Monday morning ~7:30.

- DI water OK.  Backup pump is being repaired.  Facilities is looking into having all pumps updated and replaced.