Description: The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. The uniformity of spun photoresists are typically +/- 100 Å.

Features:

• Two automated, single-wafer track systems.
• Dispenses any of four different positive photoresists.
• Selectable programs at the spinner and each of the bake ovens.
• "Manual" dispense program allows the user to dispense other approved photoresists, on track 1 only