SVG Developer: svgdev


Description: The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses and rinses away developer; and an oven station for post-bake.

Features:

  • Automated, single-wafer track system.
  • Dispenses either of two different developers, Shipley LDD-26W and MF-26A.
  • Selectable programs at the spinner and the bake oven.

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Stanford Nanofabrication Facility
Last Modified 03/25/2008