PROCESS ID: NH3_550 
DESCRIPTION: AMMONIA ANNEAL IN VARIABLE N2 DILUTION JMV/MAP    
BANK: 3 
TUBES: 12                                                
REUSE: YES

0001.0000    IDLE
0001.0005  STEP N2=2.5
0001.0010  STEP TEMPL=550
0001.0015  STEP TEMPC=550
0001.0020  STEP TEMPS=550
0001.0025  STEP UNLOAD=OFF
0001.0030  STEP LOAD=ON
0001.0035  STEP SPEED=10

0005.0000    BOAT OUT
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2=5.0
0005.0015  STEP LOAD=OFF
0005.0020  STEP UNLOAD=ON
0005.0025  STEP SPEED=25
0005.0030  STEP TCU LEARN=OFF
0005.0035  STEP IF ALMACK=ON GOTO 0010

0010.0000    BOAT IN AND 1ST STABILIZE TO +- 5 DEG
0010.0005  STEP TIME:00:00:00
0010.0010  STEP UNLOAD=OFF
0010.0015  STEP LOAD=ON
0010.0020  STEP SPEED=25
0010.0025  STEP IF DNTLK=ON GOTO 0015
0010.0030  STEP TCU CTLID=9
0010.0035  STEP TCU LEARN=OFF

0015.0000    PURGE W/N2
0015.0005  STEP TIME:00:20:00
0015.0010  STEP N2=5.0
0015.0015  STEP TCU CTLID=9
0015.0020  STEP TCU LEARN=OFF

0020.0000    NITRIDE GROWTH
0020.0005  STEP TIME:VARIABLE
0020.0010  STEP N2=VARIABLE
0020.0015  STEP NH3=250
0020.0020  STEP IF BRNOFF=OFF GOTO 0025
0020.0025  STEP TCU CTLID=9
0020.0030  STEP TCU LEARN=OFF

0025.0000    N2 PURGE
0025.0005  STEP TIME:00:20:00
0025.0010  STEP NH3=0
0025.0015  STEP NH3=OFF
0025.0020  STEP N2=5.0
0025.0025  STEP TCU LEARN=OFF

0030.0000    BOAT OUT 
0030.0005  STEP TIME:00:00:00
0030.0010  STEP LOAD=OFF
0030.0015  STEP UNLOAD=ON
0030.0020  STEP SPEED=25
0030.0025  STEP TCU LEARN=OFF
0030.0030  STEP IF ALMACK=ON GOTO 0035

0035.0000    END
0035.0005  STEP END PROCESS