PROCESS ID: LTO300 DESCRIPTION: LTO DEPOSITION AT 300 DEG ST BANK: 3 TUBES: 11 REUSE: YES 0001.0000 IDLE 0001.0005 STEP VACUUM=OFF 0001.0010 STEP N2PURG=1000 0001.0015 STEP TEMPL=300 0001.0020 STEP TEMPC=300 0001.0025 STEP TEMPS=300 0001.0030 STEP UNLOAD=OFF 0001.0035 STEP LOAD=ON 0001.0040 STEP SPEED=25 0005.0000 BOAT OUT 0005.0005 STEP TIME:00:00:00 0005.0010 STEP N2PURG=3000 0005.0015 STEP LOAD=OFF 0005.0020 STEP UNLOAD=ON 0005.0025 STEP SPEED=12 0005.0030 STEP IF ALMACK=ON GOTO 0010 0010.0000 BOAT IN 0010.0005 STEP TIME:00:00:00 0010.0010 STEP TEMPL=300 0010.0015 STEP TEMPC=300 0010.0020 STEP TEMPS=300 0010.0025 STEP UNLOAD=OFF 0010.0030 STEP LOAD=ON 0010.0035 STEP SPEED=10 0010.0040 STEP TCU CTLID=1 0010.0045 STEP TCU LEARN=OFF 0010.0050 STEP IF DNTLK=ON GOTO 0015 0015.0000 PRE PUMP STABILIZE TO +-5 DEG 0015.0005 STEP TIME:00:02:00 0015.0010 STEP N2PURG=3000 0015.0015 STEP TCU CTLID=1 0015.0020 STEP TCU LEARN=OFF 0020.0000 STABILIZE 0020.0005 STEP TIME:00:10:00 0020.0010 STEP N2PURG=100 0020.0015 STEP VACUUM=ON 0020.0020 STEP TCU LEARN=OFF 0025.0000 INITIAL PUMPDOWN 0025.0005 STEP TIME:00:04:00 0025.0010 STEP N2PURG=0 0025.0015 STEP N2PURG=OFF 0025.0020 STEP VACUUM=ON 0025.0025 STEP TCU CTLID=1 0025.0030 STEP TCU LEARN=OFF 0030.0000 PUMPDOWN AND GROSS LEAK CHECK 0030.0005 STEP TIME:00:03:00 0030.0010 STEP PRCPR TOLERANCE=1.0 0030.0015 STEP IF PRCPR>500 GOTO 0105 0030.0020 STEP TCU CTLID=1 0030.0025 STEP TCU LEARN=OFF 0035.0000 LEAK CHECK 0035.0005 STEP TIME:00:01:00 0035.0010 STEP VACUUM=OFF 0035.0015 STEP IF PRCPR>100 GOTO 0095 0035.0020 STEP TCU CTLID=1 0035.0025 STEP TCU LEARN=OFF 0040.0000 REPUMP 0040.0005 STEP TIME:00:02:00 0040.0010 STEP VACUUM=ON 0040.0015 STEP TCU CTLID=1 0040.0020 STEP TCU LEARN=OFF 0045.0000 FINAL STABILIZE TO +-1 DEG 0045.0005 STEP TIME:00:05:00 0045.0010 STEP N2PURG=100 0045.0015 STEP TCU CTLID=1 0045.0020 STEP TCU LEARN=OFF 0045.0025 STEP TEMPC TOLERANCE=1.0 0045.0030 STEP IF TEMPC<255 GOTO 0065 0050.0000 START O2 FLOW 0050.0005 STEP TIME:00:02:00 0050.0010 STEP N2PURG=OFF 0050.0015 STEP N2PURG=0 0050.0020 STEP O2=115 0050.0025 STEP TCU CTLID=1 0050.0030 STEP TCU LEARN=OFF 0050.0035 STEP IF PRCPR>1000 GOTO 0065 0055.0000 DEPOSITION 0055.0005 STEP TIME:VARIABLE 0055.0010 STEP SIH4=100 0055.0015 STEP TCU CTLID=1 0055.0020 STEP TCU LEARN=OFF 0055.0025 STEP IF PRCPR>1000 GOTO 0065 0060.0000 O2 PURGE 0060.0005 STEP TIME:00:02:00 0060.0010 STEP SIH4=OFF 0060.0015 STEP SIH4=0 0060.0020 STEP TEMPL=300 0060.0025 STEP TEMPC=300 0060.0030 STEP TEMPS=300 0060.0035 STEP TCU LEARN=OFF 0060.0040 STEP IF PRCPR>1000 GOTO 0065 0065.0000 1ST PUMPDOWN 0065.0005 STEP TIME:00:01:00 0065.0010 STEP O2=OFF 0065.0015 STEP O2=0 0065.0020 STEP N2PURG=OFF 0065.0025 STEP N2PURG=0 0065.0030 STEP SIH4=OFF 0065.0035 STEP SIH4=0 0065.0040 STEP PRCPR=OFF 0065.0045 STEP TCU LEARN=OFF 0070.0000 1ST PURGE 0070.0005 STEP TIME:00:01:00 0070.0010 STEP N2PURG=100 0070.0015 STEP TCU LEARN=OFF 0075.0000 2ND PUMPDOWN 0075.0005 STEP TIME:00:01:00 0075.0010 STEP N2PURG=OFF 0075.0015 STEP N2PURG=0 0075.0020 STEP TCU LEARN=OFF 0080.0000 2ND PURGE 0080.0005 STEP TIME:00:01:00 0080.0010 STEP N2PURG=100 0080.0015 STEP TCU LEARN=OFF 0085.0000 PUMP DOWN 0085.0005 STEP TIME:00:01:00 0085.0010 STEP N2PURG=OFF 0085.0015 STEP N2PURG=0 0085.0020 STEP TCU LEARN=OFF 0090.0000 PURGE 0090.0005 STEP TIME:00:01:00 0090.0010 STEP N2PURG=100 0090.0015 STEP TCU LEARN=OFF 0095.0000 FINAL PUMPDOWN 0095.0005 STEP TIME:00:01:00 0095.0010 STEP N2PURG=OFF 0095.0015 STEP N2PURG=0 0095.0020 STEP TCU LEARN=OFF 0100.0000 FINAL PURGE AND RAMPDOWN 0100.0005 STEP TIME:00:00:00 0100.0010 STEP N2PURG=200 0100.0015 STEP TEMPC TOLERANCE=1.0 0100.0020 STEP IF TEMPC<380 GOTO 0105 0100.0025 STEP TCU LEARN=OFF 0105.0000 SLOW BACKFILL AND ABORT STEP 0105.0005 STEP TIME:00:20:00 0105.0010 STEP VACUUM=OFF 0105.0015 STEP N2PURG=1200 0110.0000 BOAT OUT 0110.0005 STEP TIME:00:00:00 0110.0010 STEP N2PURG=3000 0110.0015 STEP LOAD=OFF 0110.0020 STEP UNLOAD=ON 0110.0025 STEP SPEED=10 0110.0030 STEP IF ALMACK=ON GOTO 0115 0115.0000 END 0115.0005 STEP END PROCESS