PROCESS ID: WLTO    
DESCRIPTION: LTO CAP OF TUNGSTEN AND DIELECTRIC ST             
BANK: 3 
TUBES: 11                                                
REUSE: YES

0001.0000    IDLE
0001.0005  STEP VACUUM=OFF
0001.0010  STEP N2PURG=3000
0001.0015  STEP TEMPL=275
0001.0020  STEP TEMPC=275
0001.0025  STEP TEMPS=275
0001.0030  STEP UNLOAD=OFF
0001.0035  STEP LOAD=ON
0001.0040  STEP SPEED=25

0005.0000    BOAT OUT
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2PURG=3000
0005.0015  STEP LOAD=OFF
0005.0020  STEP UNLOAD=ON
0005.0025  STEP SPEED=25
0005.0030  STEP IF ALMACK=ON GOTO 0010

0010.0000    BOAT IN
0010.0005  STEP TIME:00:00:00
0010.0010  STEP TEMPL=300
0010.0015  STEP TEMPC=300
0010.0020  STEP TEMPS=300
0010.0025  STEP UNLOAD=OFF
0010.0030  STEP LOAD=ON
0010.0035  STEP SPEED=25
0010.0040  STEP TCU CTLID=1
0010.0045  STEP TCU LEARN=OFF
0010.0050  STEP IF DNTLK=ON GOTO 0015

0015.0000    PRE PUMP STABILIZE TO +-5 DEG
0015.0005  STEP TIME:00:00:30   
0015.0010  STEP N2PURG=2000
0015.0015  STEP TCU CTLID=1
0015.0020  STEP TCU LEARN=OFF

0020.0000    RAMP UP 
0020.0005  STEP TIME:00:12:00
0020.0010  STEP N2PURG=150
0020.0015  STEP VACUUM=ON
0020.0020  STEP TEMPL=290
0020.0025  STEP TEMPC=290
0020.0030  STEP TEMPS=290
0020.0035  STEP TCU LEARN=OFF

0025.0000    INITIAL PUMPDOWN
0025.0005  STEP TIME:00:03:00
0025.0010  STEP N2PURG=0
0025.0015  STEP N2PURG=OFF
0025.0020  STEP VACUUM=ON
0025.0025  STEP TCU CTLID=1
0025.0030  STEP TCU LEARN=OFF

0030.0000    PUMPDOWN AND GROSS LEAK CHECK
0030.0005  STEP TIME:00:01:00
0030.0010  STEP PRCPR TOLERANCE=1.0
0030.0015  STEP IF PRCPR>500 GOTO 0120
0030.0020  STEP TCU CTLID=1
0030.0025  STEP TCU LEARN=OFF

0035.0000    LEAK CHECK
0035.0005  STEP TIME:00:01:00
0035.0010  STEP VACUUM=OFF
0035.0015  STEP IF PRCPR>150 GOTO 0105
0035.0020  STEP TCU CTLID=1
0035.0025  STEP TCU LEARN=OFF

0040.0000    REPUMP
0040.0005  STEP TIME:00:02:00
0040.0010  STEP VACUUM=ON
0040.0015  STEP TCU CTLID=1
0040.0020  STEP TCU LEARN=OFF
0040.0025  STEP TEMPC TOLERANCE=1.0
0040.0030  STEP IF TEMPC<255 GOTO 0080

0045.0000    START O2 FLOW
0045.0005  STEP TIME:00:01:00
0045.0010  STEP N2PURG=OFF
0045.0015  STEP N2PURG=0
0045.0020  STEP O2=115
0045.0025  STEP IF PRCPR>1000 GOTO 0080
0045.0030  STEP TCU CTLID=1
0045.0035  STEP TCU LEARN=OFF

0050.0000    *DEPOSITION*
0050.0005  STEP TIME:00:05:00
0050.0010  STEP SIH4=100
0050.0015  STEP IF PRCPR>1000 GOTO 0080
0050.0020  STEP TCU CTLID=1
0050.0025  STEP TCU LEARN=OFF

0055.0000    O2 PURGE
0055.0005  STEP TIME:00:02:30
0055.0010  STEP SIH4=OFF
0055.0015  STEP SIH4=0
0055.0020  STEP IF PRCPR>1000 GOTO 0080
0055.0025  STEP TEMPL=380
0055.0030  STEP TEMPC=380
0055.0035  STEP TEMPS=380
0055.0040  STEP TCU LEARN=OFF

0060.0000    RAMP UP
0060.0005  STEP TIME:00:40:00
0060.0010  STEP O2=0
0060.0015  STEP O2=OFF
0060.0020  STEP N2PURG=100
0060.0025  STEP TCU LEARN=OFF

0065.0000    O2 PURGE  
0065.0005  STEP TIME:00:02:30
0065.0010  STEP N2PURG=0
0065.0015  STEP N2PURG=OFF
0065.0020  STEP O2=115
0065.0025  STEP IF PRCPR>1000 GOTO 0080
0065.0030  STEP TCU LEARN=OFF

0070.0000    DEPOSITION
0070.0005  STEP TIME:VARIABLE
0070.0010  STEP SIH4=100
0070.0015  STEP IF PRCPR>1000 GOTO 0080
0070.0020  STEP TCU LEARN=OFF

0075.0000    O2 PURGE
0075.0005  STEP TIME:00:02:30
0075.0010  STEP SIH4=0
0075.0015  STEP SIH4=OFF
0075.0020  STEP TCU LEARN=OFF

0080.0000    1ST PUMPDOWN
0080.0005  STEP TIME:00:03:00
0080.0010  STEP O2=OFF
0080.0015  STEP O2=0
0080.0020  STEP SIH4=0
0080.0025  STEP SIH4=OFF
0080.0030  STEP TEMPL=350
0080.0035  STEP TEMPC=350
0080.0040  STEP TEMPS=350
0080.0045  STEP TCU LEARN=OFF

0085.0000    1ST PURGE
0085.0005  STEP TIME:00:01:00
0085.0010  STEP N2PURG=100
0085.0015  STEP TCU LEARN=OFF

0090.0000    2ND PUMPDOWN
0090.0005  STEP TIME:00:01:00
0090.0010  STEP N2PURG=OFF
0090.0015  STEP N2PURG=0
0090.0020  STEP TCU LEARN=OFF

0095.0000    2ND PURGE
0095.0005  STEP TIME:00:01:00
0095.0010  STEP N2PURG=100
0095.0015  STEP TCU LEARN=OFF

0100.0000    PUMP DOWN
0100.0005  STEP TIME:00:01:00
0100.0010  STEP N2PURG=OFF
0100.0015  STEP N2PURG=0
0100.0020  STEP TCU LEARN=OFF

0105.0000    PURGE
0105.0005  STEP TIME:00:01:00
0105.0010  STEP N2PURG=100
0105.0015  STEP TCU LEARN=OFF

0110.0000    FINAL PUMPDOWN
0110.0005  STEP TIME:00:01:00
0110.0010  STEP N2PURG=OFF
0110.0015  STEP N2PURG=0
0110.0020  STEP TCU LEARN=OFF

0115.0000    FINAL PURGE AND RAMPDOWN
0115.0005  STEP TIME:00:00:00
0115.0010  STEP N2PURG=200
0115.0015  STEP TEMPC TOLERANCE=1.0
0115.0020  STEP IF TEMPC<380 GOTO 0120
0115.0025  STEP TCU LEARN=OFF

0120.0000    SLOW BACKFILL AND ABORT STEP
0120.0005  STEP TIME:00:08:00
0120.0010  STEP VACUUM=OFF
0120.0015  STEP N2PURG=2500
0120.0020  STEP TCU LEARN=OFF

0125.0000    BOAT OUT
0125.0005  STEP TIME:00:00:00
0125.0010  STEP N2PURG=3000
0125.0015  STEP LOAD=OFF
0125.0020  STEP UNLOAD=ON
0125.0025  STEP SPEED=25
0125.0030  STEP IF ALMACK=ON GOTO 0130

0130.0000    END
0130.0005  STEP END PROCESS