PROCESS ID: NITRIDE3
DESCRIPTION: LOW STRESS NITRIDE AT 805 DEG ST                  
BANK: 3 
TUBES: 10                                                
REUSE: YES

0001.0000    IDLE
0001.0005  STEP N2PURG=1500
0001.0010  STEP TEMPL=800
0001.0015  STEP TEMPC=805
0001.0020  STEP TEMPS=810
0001.0025  STEP UNLOAD=OFF
0001.0030  STEP LOAD=ON
0001.0035  STEP SPEED=25

0005.0000    BOAT OUT
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2PURG=2800
0005.0015  STEP LOAD=OFF
0005.0020  STEP UNLOAD=ON
0005.0025  STEP SPEED=25
0005.0030  STEP IF ALMACK=ON GOTO 0010

0010.0000    BOAT IN
0010.0005  STEP TIME:00:00:00
0010.0010  STEP UNLOAD=OFF
0010.0015  STEP LOAD=ON
0010.0020  STEP SPEED=25
0010.0025  STEP TCU CTLID=1
0010.0030  STEP IF DNTLK=ON GOTO 0015
0010.0035  STEP TCU LEARN=OFF

0015.0000    PRE PUMP STABILIZE TO +-5 DEG
0015.0005  STEP TIME:00:00:30
0015.0010  STEP N2PURG=2800
0015.0015  STEP TCU LEARN=OFF

0020.0000    INITIAL PUMPDOWN
0020.0005  STEP TIME:00:04:00
0020.0010  STEP N2PURG=0
0020.0015  STEP N2PURG=OFF
0020.0020  STEP VACUUM=ON
0020.0025  STEP TEMPL=799
0020.0030  STEP TEMPC=805
0020.0035  STEP TEMPS=811
0020.0040  STEP TCU CTLID=3
0020.0045  STEP TCU LEARN=OFF

0025.0000    STABILIZE
0025.0005  STEP TIME:00:02:00
0025.0010  STEP N2PURG=100
0025.0015  STEP TCU CTLID=3
0025.0020  STEP TCU LEARN=OFF
0025.0025  STEP IF TEMPC<700 GOTO 0045

0030.0000    START AMMONIA FLOW
0030.0005  STEP TIME:00:01:00
0030.0010  STEP N2PURG=OFF
0030.0015  STEP N2PURG=0
0030.0020  STEP NH3=25
0030.0025  STEP TCU CTLID=3
0030.0030  STEP TCU LEARN=OFF
0030.0035  STEP IF PRCPR>1200 GOTO 0045

0035.0000    *DEPOSITION*
0035.0005  STEP TIME:VARIABLE
0035.0010  STEP DCS=150 
0035.0015  STEP TCU CTLID=3
0035.0020  STEP TCU LEARN=OFF
0035.0025  STEP IF PRCPR>1200 GOTO 0045

0040.0000    AMMONIA PURGE
0040.0005  STEP TIME:00:03:00
0040.0010  STEP DCS=OFF
0040.0015  STEP DCS=0
0040.0020  STEP TEMPL=500
0040.0025  STEP TEMPC=500
0040.0030  STEP TEMPS=500
0040.0035  STEP TCU LEARN=OFF
0040.0040  STEP IF PRCPR>1200 GOTO 0045

0045.0000    1ST PUMPDOWN
0045.0005  STEP TIME:00:03:00
0045.0010  STEP NH3=OFF
0045.0015  STEP NH3=0
0045.0020  STEP N2PURG=0
0045.0025  STEP N2PURG=OFF
0045.0030  STEP TEMPL=500
0045.0035  STEP TEMPC=500
0045.0040  STEP TEMPS=500

0050.0000    1ST PURGE
0050.0005  STEP TIME:00:02:00
0050.0010  STEP N2PURG=250
0050.0015  STEP TCU LEARN=OFF

0055.0000    2ND PUMPDOWN
0055.0005  STEP TIME:00:01:00
0055.0010  STEP N2PURG=OFF
0055.0015  STEP N2PURG=0

0060.0000    2ND PURGE
0060.0005  STEP TIME:00:02:00
0060.0010  STEP N2PURG=250
0060.0015  STEP TCU LEARN=OFF

0065.0000    FINAL PUMPDOWN
0065.0005  STEP TIME:00:01:00
0065.0010  STEP N2PURG=OFF
0065.0015  STEP N2PURG=0

0070.0000    FINAL PURGE AND RAMPDOWN
0070.0005  STEP TIME:00:00:00
0070.0010  STEP N2PURG=450
0070.0015  STEP N2BKFL=200
0070.0020  STEP TEMPC TOLERANCE=1.0
0070.0025  STEP IF TEMPC<590 GOTO 0075
0070.0030  STEP TCU LEARN=OFF

0075.0000    SLOW BACKFILL AND ABORT STEP
0075.0005  STEP TIME:00:10:00
0075.0010  STEP VACUUM=OFF
0075.0015  STEP TEMPL=500
0075.0020  STEP TEMPC=500
0075.0025  STEP TEMPS=500
0075.0030  STEP N2PURG=2500
0075.0035  STEP N2BKFL=750
0075.0040  STEP TCU LEARN=OFF

0080.0000    BOAT OUT
0080.0005  STEP TIME:00:00:00
0080.0010  STEP N2BKFL=OFF
0080.0015  STEP N2BKFL=0
0080.0020  STEP N2PURG=2500
0080.0025  STEP TEMPL=500
0080.0030  STEP TEMPC=525
0080.0035  STEP TEMPS=550
0080.0040  STEP LOAD=OFF
0080.0045  STEP UNLOAD=ON
0080.0050  STEP SPEED=10
0080.0055  STEP IF ALMACK=ON GOTO 0085

0085.0000    END
0085.0005  STEP END PROCESS