PROCESS ID: SINPURGE
DESCRIPTION: PRE PURGE OF NITRIDE TUBE ST                      
BANK: 3 
TUBES: 10                                                
REUSE: YES

0001.0000    IDLE
0001.0005  STEP N2PURG=2500
0001.0010  STEP TEMPL=590
0001.0015  STEP TEMPC=595
0001.0020  STEP TEMPS=595
0001.0025  STEP UNLOAD=OFF
0001.0030  STEP LOAD=ON
0001.0035  STEP SPEED=25

0005.0000    INITIAL PUMPDOWN
0005.0005  STEP TIME:00:02:00
0005.0010  STEP N2PURG=100 
0005.0015  STEP VACUUM=ON
0005.0020  STEP TEMPL=779
0005.0025  STEP TEMPC=785
0005.0030  STEP TEMPS=791
0005.0035  STEP TCU CTLID=2
0005.0040  STEP TCU LEARN=OFF

0010.0000    STABILIZE
0010.0005  STEP TIME:00:10:00
0010.0010  STEP N2PURG=100
0010.0015  STEP TCU CTLID=2
0010.0020  STEP TCU LEARN=OFF

0015.0000    PUMP DOWN
0015.0005  STEP TIME:00:03:00
0015.0010  STEP N2PURG=OFF 
0015.0015  STEP N2PURG=0
0015.0020  STEP TCU CTLID=2
0015.0025  STEP TCU LEARN=OFF

0020.0000    PUMPDOWN AND GROSS LEAK CHECK
0020.0005  STEP TIME:00:03:00
0020.0010  STEP TCU CTLID=2
0020.0015  STEP PRCPR TOLERANCE=1.0
0020.0020  STEP IF PRCPR>500 GOTO 0095
0020.0025  STEP TCU LEARN=OFF

0025.0000    LEAK CHECK
0025.0005  STEP TIME:00:01:00
0025.0010  STEP TCU CTLID=2
0025.0015  STEP VACUUM=OFF
0025.0020  STEP IF PRCPR>60 GOTO 0095
0025.0025  STEP TCU LEARN=OFF

0030.0000    REPUMP
0030.0005  STEP TIME:00:02:00
0030.0010  STEP VACUUM=ON
0030.0015  STEP TCU CTLID=2
0030.0020  STEP TCU LEARN=OFF
0030.0025  STEP IF TEMPC<700 GOTO 0065

0035.0000    START PURGE
0035.0005  STEP TIME:00:02:00 
0035.0010  STEP N2PURG=100
0035.0015  STEP TCU CTLID=2
0035.0020  STEP TCU LEARN=OFF

0040.0000    FINAL STABILIZE TO +-1 DEG
0040.0005  STEP TIME:00:05:00
0040.0010  STEP N2PURG=125
0040.0015  STEP TCU CTLID=2
0040.0020  STEP TCU LEARN=OFF
0040.0025  STEP IF PRCPR>1200 GOTO 0065

0045.0000    PUMP DOWN
0045.0005  STEP TIME:00:00:10
0045.0010  STEP TCU CTLID=2
0045.0015  STEP TCU LEARN=OFF

0050.0000    START AMMONIA FLOW
0050.0005  STEP TIME:00:00:30
0050.0010  STEP N2PURG=OFF
0050.0015  STEP N2PURG=0
0050.0020  STEP NH3=32
0050.0025  STEP TCU CTLID=2
0050.0030  STEP TCU LEARN=OFF
0050.0035  STEP IF PRCPR>1200 GOTO 0065

0055.0000    *DEPOSITION*
0055.0005  STEP TIME:00:10:00
0055.0010  STEP DCS=165
0055.0015  STEP TCU CTLID=2
0055.0020  STEP TCU LEARN=OFF
0055.0025  STEP IF PRCPR>1200 GOTO 0065

0060.0000    AMMONIA PURGE
0060.0005  STEP TIME:00:01:00
0060.0010  STEP DCS=OFF
0060.0015  STEP DCS=0
0060.0020  STEP TCU LEARN=OFF
0060.0025  STEP IF PRCPR>1200 GOTO 0065

0065.0000    1ST PUMPDOWN
0065.0005  STEP TIME:00:02:00
0065.0010  STEP NH3=OFF
0065.0015  STEP NH3=0
0065.0020  STEP TCU LEARN=OFF

0070.0000    1ST PURGE
0070.0005  STEP TIME:00:01:00
0070.0010  STEP N2PURG=450
0070.0015  STEP TEMPL=560
0070.0020  STEP TEMPC=560
0070.0025  STEP TEMPS=560
0070.0030  STEP TCU LEARN=OFF

0075.0000    2ND PUMP DOWN
0075.0005  STEP TIME:00:01:00
0075.0010  STEP N2PURG=100

0080.0000    2ND PURGE
0080.0005  STEP TIME:00:01:00
0080.0010  STEP N2PURG=450

0085.0000    FINAL PUMP DOWN
0085.0005  STEP TIME:00:01:00
0085.0010  STEP N2PURG=100

0090.0000    FINAL PURGE AND RAMPDOWN
0090.0005  STEP TIME:00:00:00
0090.0010  STEP N2PURG=650
0090.0015  STEP N2BKFL=45
0090.0020  STEP TCU LEARN=OFF

0095.0000    SLOW BACKFILL AND ABORT STEP
0095.0005  STEP TIME:00:08:00
0095.0010  STEP VACUUM=OFF
0095.0015  STEP TEMPL=550
0095.0020  STEP TEMPC=550
0095.0025  STEP TEMPS=550
0095.0030  STEP N2PURG=2500
0095.0035  STEP N2BKFL=750
0095.0040  STEP TCU LEARN=OFF

0100.0000    BOAT OUT
0100.0005  STEP TIME:00:00:00
0100.0010  STEP N2BKFL=OFF
0100.0015  STEP N2BKFL=0
0100.0020  STEP N2PURG=2500
0100.0025  STEP TEMPL=500
0100.0030  STEP TEMPC=525
0100.0035  STEP TEMPS=550
0100.0040  STEP LOAD=OFF
0100.0045  STEP UNLOAD=ON
0100.0050  STEP SPEED=25
0100.0055  STEP IF ALMACK=ON GOTO 0105

0105.0000    END
0105.0005  STEP END PROCESS