PROCESS ID: UWM     
DESCRIPTION: 2.0 MICRON RUN OF 100 MPa SiN ST                  
BANK: 3 
TUBES: 10                                                
REUSE: YES

0001.0000    IDLE
0001.0005  STEP N2PURG=2500
0001.0010  STEP TEMPL=590
0001.0015  STEP TEMPC=595
0001.0020  STEP TEMPS=595
0001.0025  STEP UNLOAD=OFF
0001.0030  STEP LOAD=ON
0001.0035  STEP SPEED=25

0005.0000    BOAT OUT
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2PURG=2000
0005.0015  STEP N2BKFL=100
0005.0020  STEP TEMPL=585
0005.0025  STEP TEMPC=600
0005.0030  STEP TEMPS=595
0005.0035  STEP LOAD=OFF
0005.0040  STEP UNLOAD=ON
0005.0045  STEP SPEED=25
0005.0050  STEP IF ALMACK=ON GOTO 0010

0010.0000    BOAT IN
0010.0005  STEP TIME:00:00:00
0010.0010  STEP TEMPL=700
0010.0015  STEP TEMPC=700
0010.0020  STEP TEMPS=700
0010.0025  STEP UNLOAD=OFF
0010.0030  STEP LOAD=ON
0010.0035  STEP SPEED=25
0010.0040  STEP TCU CTLID=1
0010.0045  STEP IF DNTLK=ON GOTO 0015
0010.0050  STEP TCU LEARN=OFF
0010.0055  STEP N2PURG=650
0010.0060  STEP N2BKFL=45

0015.0000    PRE PUMP STABILIZE TO +-5 DEG
0015.0005  STEP TIME:00:00:05
0015.0010  STEP N2PURG=1500
0015.0015  STEP N2BKFL=OFF
0015.0020  STEP N2BKFL=0
0015.0025  STEP TCU LEARN=OFF

0020.0000    INITIAL PUMPDOWN
0020.0005  STEP TIME:00:04:00
0020.0010  STEP N2PURG=130
0020.0015  STEP VACUUM=ON
0020.0020  STEP TEMPL=500
0020.0025  STEP TEMPC=500
0020.0030  STEP TEMPS=500
0020.0035  STEP TCU CTLID=2
0020.0040  STEP TCU LEARN=OFF

0025.0000    STABILIZE
0025.0005  STEP TIME:04:30:00
0025.0010  STEP N2PURG=140
0025.0015  STEP TCU LEARN=OFF

0030.0000    STABILIZE
0030.0005  STEP TIME:02:00:00
0030.0010  STEP N2PURG=145
0030.0015  STEP TEMPL=600
0030.0020  STEP TEMPC=600
0030.0025  STEP TEMPS=600
0030.0030  STEP TCU CTLID=2
0030.0035  STEP TCU LEARN=OFF

0035.0000    PUMP DOWN
0035.0005  STEP TIME:00:03:00
0035.0010  STEP N2PURG=OFF 
0035.0015  STEP N2PURG=0
0035.0020  STEP TCU CTLID=2
0035.0025  STEP TCU LEARN=OFF

0040.0000    PUMPDOWN AND GROSS LEAK CHECK
0040.0005  STEP TIME:00:03:00
0040.0010  STEP TCU CTLID=2
0040.0015  STEP PRCPR TOLERANCE=1.0
0040.0020  STEP IF PRCPR>500 GOTO 0120
0040.0025  STEP TCU LEARN=OFF

0045.0000    LEAK CHECK
0045.0005  STEP TIME:00:01:00
0045.0010  STEP TCU CTLID=2
0045.0015  STEP VACUUM=OFF
0045.0020  STEP IF PRCPR>60 GOTO 0120
0045.0025  STEP TCU LEARN=OFF

0050.0000    REPUMP
0050.0005  STEP TIME:00:02:00
0050.0010  STEP VACUUM=ON
0050.0015  STEP TCU CTLID=2
0050.0020  STEP TCU LEARN=OFF

0055.0000    START PURGE
0055.0005  STEP TIME:00:02:00 
0055.0010  STEP N2PURG=120
0055.0015  STEP TCU CTLID=2
0055.0020  STEP TCU LEARN=OFF

0060.0000    FINAL STABILIZE TO +-1 DEG
0060.0005  STEP TIME:04:30:00
0060.0010  STEP N2PURG=147
0060.0015  STEP TEMPL=779
0060.0020  STEP TEMPC=785
0060.0025  STEP TEMPS=791
0060.0030  STEP TCU CTLID=2
0060.0035  STEP TCU LEARN=OFF
0060.0040  STEP IF PRCPR>1200 GOTO 0090

0065.0000    TEMP CHECK
0065.0005  STEP TIME:00:02:00
0065.0010  STEP IF TEMPC<700 GOTO 0090

0070.0000    PUMP DOWN
0070.0005  STEP TIME:00:00:15
0070.0010  STEP TCU CTLID=2
0070.0015  STEP TCU LEARN=OFF

0075.0000    START AMMONIA FLOW
0075.0005  STEP TIME:00:01:00
0075.0010  STEP N2PURG=OFF
0075.0015  STEP N2PURG=0
0075.0020  STEP NH3=32
0075.0025  STEP TCU CTLID=2
0075.0030  STEP TCU LEARN=OFF
0075.0035  STEP IF PRCPR>1200 GOTO 0090

0080.0000    *DEPOSITION*
0080.0005  STEP TIME:10:22:00
0080.0010  STEP DCS=165
0080.0015  STEP TCU CTLID=2
0080.0020  STEP TCU LEARN=OFF
0080.0025  STEP IF PRCPR>1200 GOTO 0090

0085.0000    AMMONIA PURGE
0085.0005  STEP TIME:00:01:00
0085.0010  STEP DCS=OFF
0085.0015  STEP DCS=0
0085.0020  STEP TCU LEARN=OFF
0085.0025  STEP IF PRCPR>1200 GOTO 0090

0090.0000    1ST PUMPDOWN
0090.0005  STEP TIME:00:02:00
0090.0010  STEP NH3=OFF
0090.0015  STEP NH3=0
0090.0020  STEP TCU LEARN=OFF

0095.0000    1ST PURGE
0095.0005  STEP TIME:00:01:00
0095.0010  STEP N2PURG=300
0095.0015  STEP TEMPL=400
0095.0020  STEP TEMPC=400
0095.0025  STEP TEMPS=400
0095.0030  STEP TCU LEARN=OFF

0100.0000    2ND PUMP DOWN
0100.0005  STEP TIME:00:01:00
0100.0010  STEP N2PURG=100

0105.0000    2ND PURGE
0105.0005  STEP TIME:00:01:00
0105.0010  STEP N2PURG=300

0110.0000    FINAL PUMP DOWN
0110.0005  STEP TIME:00:01:00
0110.0010  STEP N2PURG=100

0115.0000    FINAL PURGE AND RAMPDOWN
0115.0005  STEP TIME:00:00:00
0115.0010  STEP N2PURG=250
0115.0015  STEP N2BKFL=45
0115.0020  STEP TCU LEARN=OFF

0120.0000    SLOW BACKFILL AND ABORT STEP
0120.0005  STEP TIME:00:08:00
0120.0010  STEP VACUUM=OFF
0120.0015  STEP TEMPL=550
0120.0020  STEP TEMPC=550
0120.0025  STEP TEMPS=550
0120.0030  STEP N2PURG=2500
0120.0035  STEP N2BKFL=750
0120.0040  STEP TCU LEARN=OFF

0125.0000    BOAT OUT
0125.0005  STEP TIME:00:00:00
0125.0010  STEP N2BKFL=OFF
0125.0015  STEP N2BKFL=0
0125.0020  STEP N2PURG=2500
0125.0025  STEP TEMPL=500
0125.0030  STEP TEMPC=525
0125.0035  STEP TEMPS=550
0125.0040  STEP LOAD=OFF
0125.0045  STEP UNLOAD=ON
0125.0050  STEP SPEED=25
0125.0055  STEP IF ALMACK=ON GOTO 0130

0130.0000    END
0130.0005  STEP END PROCESS