PROCESS ID: POLYEMIT
DESCRIPTION: POLY EMITTER DEP AT 400mT USING H2 ST             
BANK: 3 
TUBES: 9                                                 
REUSE: YES

0001.0000    IDLE
0001.0005  STEP VACUUM=OFF
0001.0010  STEP N2PURG=2000
0001.0015  STEP TEMPL=590
0001.0020  STEP TEMPC=590
0001.0025  STEP TEMPS=590
0001.0030  STEP UNLOAD=OFF
0001.0035  STEP LOAD=ON
0001.0040  STEP SPEED=25
0001.0045  STEP TCU LEARN=OFF

0005.0000    BOAT OUT
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2PURG=3500
0005.0015  STEP TEMPL=580
0005.0020  STEP TEMPC=585
0005.0025  STEP TEMPS=590
0005.0030  STEP LOAD=OFF
0005.0035  STEP UNLOAD=ON
0005.0040  STEP SPEED=25
0005.0045  STEP IF ALMACK=ON GOTO 0010
0005.0050  STEP TCU LEARN=OFF

0010.0000    BOAT IN
0010.0005  STEP TIME:00:00:00
0010.0010  STEP TEMPL=600
0010.0015  STEP TEMPC=600
0010.0020  STEP TEMPS=600
0010.0025  STEP UNLOAD=OFF
0010.0030  STEP LOAD=ON
0010.0035  STEP SPEED=25
0010.0040  STEP TCU CTLID=1
0010.0045  STEP TCU LEARN=OFF
0010.0050  STEP IF DNTLK=ON GOTO 0015

0015.0000    INITIAL PUMPDOWN
0015.0005  STEP TIME:00:03:00
0015.0010  STEP N2PURG=300
0015.0015  STEP VACUUM=ON
0015.0020  STEP TEMPL=617.0
0015.0025  STEP TEMPC=620.0
0015.0030  STEP TEMPS=623.0
0015.0035  STEP TCU CTLID=2 
0015.0040  STEP TCU LEARN=OFF

0020.0000    START PURGE
0020.0005  STEP TIME:00:01:00
0020.0010  STEP N2PURG=150
0020.0015  STEP H2=60
0020.0020  STEP TCU CTLID=2
0020.0025  STEP TCU LEARN=OFF

0025.0000    STABILZE
0025.0005  STEP TIME:00:05:00
0025.0010  STEP TCU CTLID=2
0025.0015  STEP TCU LEARN=OFF
0025.0020  STEP IF PRCPR>1200 GOTO 0075

0030.0000    PUMP DOWN
0030.0005  STEP TIME:00:02:00
0030.0010  STEP N2PURG=OFF
0030.0015  STEP N2PURG=0
0030.0020  STEP H2=0
0030.0025  STEP H2=OFF
0030.0030  STEP TCU CTLID=2
0030.0035  STEP TCU LEARN=OFF
0030.0040  STEP IF TEMPC<580 GOTO 0075

0035.0000    PUMPDOWN AND GROSS LEAK CHECK
0035.0005  STEP TIME:00:01:00
0035.0010  STEP TCU CTLID=2
0035.0015  STEP PRCPR TOLERANCE=1.0
0035.0020  STEP IF PRCPR>500 GOTO 0115

0040.0000    LEAK CHECK
0040.0005  STEP TIME:00:01:00
0040.0010  STEP TCU CTLID=2
0040.0015  STEP VACUUM=OFF
0040.0020  STEP TCU LEARN=OFF
0040.0025  STEP IF PRCPR>60 GOTO 0115

0045.0000    REPUMP
0045.0005  STEP TIME:00:02:00
0045.0010  STEP VACUUM=ON
0045.0015  STEP N2PURG=200
0045.0020  STEP TCU CTLID=2
0045.0025  STEP TCU LEARN=OFF

0050.0000    START FLOW
0050.0005  STEP TIME:00:02:00
0050.0010  STEP N2PURG=135
0050.0015  STEP H2=80
0050.0020  STEP TCU CTLID=2
0050.0025  STEP TCU LEARN=OFF

0055.0000    PRCPR STABLIZE
0055.0005  STEP TIME:00:02:00
0055.0010  STEP PRCPR=400
0055.0015  STEP TCU CTLID=2
0055.0020  STEP TCU LEARN=OFF

0060.0000    FINAL STABILIZE TO +-1 DEG
0060.0005  STEP TIME:00:45:00
0060.0010  STEP H2=110
0060.0015  STEP TCU CTLID=2
0060.0020  STEP TCU LEARN=OFF
0060.0025  STEP IF PRCPR>1200 GOTO 0075

0065.0000    *DEPOSITION*
0065.0005  STEP TIME:VARIABLE
0065.0010  STEP N2PURG=OFF
0065.0015  STEP N2PURG=0
0065.0020  STEP SIH4=136
0065.0025  STEP H2=110
0065.0030  STEP TCU CTLID=2
0065.0035  STEP TCU LEARN=OFF
0065.0040  STEP IF PRCPR>1200 GOTO 0075

0070.0000    H2 PURGE
0070.0005  STEP TIME:00:00:30
0070.0010  STEP SIH4=0
0070.0015  STEP SIH4=OFF
0070.0020  STEP TCU CTLID=3
0070.0025  STEP TCU LEARN=OFF
0070.0030  STEP IF PRCPR>1200 GOTO 0075

0075.0000    1ST PUMP DOWN
0075.0005  STEP TIME:00:03:00
0075.0010  STEP SIH4=OFF
0075.0015  STEP SIH4=0
0075.0020  STEP H2=OFF
0075.0025  STEP H2=0
0075.0030  STEP PRCPR=OFF
0075.0035  STEP PRCPR=0
0075.0040  STEP TEMPL=500
0075.0045  STEP TEMPC=500
0075.0050  STEP TEMPS=500
0075.0055  STEP TCU LEARN=OFF

0080.0000    1ST PURGE
0080.0005  STEP TIME:00:01:00
0080.0010  STEP N2PURG=300
0080.0015  STEP TCU LEARN=OFF

0085.0000    2ND PUMPDOWN
0085.0005  STEP TIME:00:01:00
0085.0010  STEP N2PURG=OFF
0085.0015  STEP N2PURG=0
0085.0020  STEP TCU LEARN=OFF

0090.0000    2ND PURGE
0090.0005  STEP TIME:00:01:00
0090.0010  STEP N2PURG=350
0090.0015  STEP TCU LEARN=OFF

0095.0000    PUMP DOWN
0095.0005  STEP TIME:00:01:00
0095.0010  STEP N2PURG=OFF
0095.0015  STEP N2PURG=0
0095.0020  STEP TCU LEARN=OFF

0100.0000    3RD PURGE 
0100.0005  STEP TIME:00:01:00
0100.0010  STEP N2PURG=350
0100.0015  STEP TCU LEARN=OFF

0105.0000    FINAL PUMP DOWN
0105.0005  STEP TIME:00:01:00
0105.0010  STEP N2PURG=OFF
0105.0015  STEP N2PURG=0
0105.0020  STEP TCU LEARN=OFF

0110.0000    FINAL PURGE AND RAMPDOWN
0110.0005  STEP TIME:00:00:00
0110.0010  STEP N2PURG=400
0110.0015  STEP TEMPL TOLERANCE=1.0
0110.0020  STEP IF TEMPL<600 GOTO 0115
0110.0025  STEP TCU LEARN=OFF

0115.0000    SLOW BACKFILL AND ABORT STEP
0115.0005  STEP TIME:00:08:00
0115.0010  STEP VACUUM=OFF
0115.0015  STEP TEMPL=550
0115.0020  STEP TEMPC=550
0115.0025  STEP TEMPS=550
0115.0030  STEP N2PURG=2250
0115.0035  STEP N2BKFL=750
0115.0040  STEP TCU LEARN=OFF

0120.0000    BOAT OUT
0120.0005  STEP TIME:00:00:00
0120.0010  STEP N2BKFL=OFF
0120.0015  STEP N2BKFL=0
0120.0020  STEP N2PURG=3500
0120.0025  STEP TEMPL=500
0120.0030  STEP TEMPC=525
0120.0035  STEP TEMPS=550
0120.0040  STEP LOAD=OFF
0120.0045  STEP UNLOAD=ON
0120.0050  STEP SPEED=25
0120.0055  STEP IF ALMACK=ON GOTO 0125
0120.0060  STEP TCU LEARN=OFF

0125.0000    END
0125.0005  STEP END PROCESS