PROCESS ID: POLYPUMP
DESCRIPTION: SAFE STANDBY UNDER VAC. SMT                       
BANK: 3 
TUBES: 9                                                 
REUSE: YES

0001.0000    IDLE
0001.0005  STEP UNLOAD=OFF
0001.0010  STEP LOAD=ON
0001.0015  STEP SPEED=15
0001.0020  STEP VACUUM=OFF
0001.0025  STEP N2PURG=1500
0001.0030  STEP TEMPL=500
0001.0035  STEP TEMPC=500
0001.0040  STEP TEMPS=500
0001.0045  STEP TCU LEARN=OFF 

0005.0000    DOOR CHECK
0005.0005  STEP TIME:00:00:00
0005.0010  STEP IF DNTLK=ON GOTO 0010
0005.0015  STEP TCU LEARN=OFF

0010.0000    PUMPDOWN
0010.0005  STEP TIME:00:05:00
0010.0010  STEP N2PURG=OFF
0010.0015  STEP N2PURG=0
0010.0020  STEP VACUUM=ON
0010.0025  STEP TCU LEARN=OFF

0015.0000    GROSS LEAK CHECK
0015.0005  STEP TIME:00:00:10
0015.0010  STEP PRCPR TOLERANCE=1.0
0015.0015  STEP IF PRCPR>500 GOTO 0045
0015.0020  STEP TCU LEARN=OFF

0020.0000    START PURGE FLOW
0020.0005  STEP TIME:00:05:00
0020.0010  STEP N2PURG=105
0020.0015  STEP PRCPR=400 
0020.0020  STEP TCU LEARN=OFF

0025.0000    LOW TEMP CYCLE
0025.0005  STEP TIME:10:00:00
0025.0010  STEP TEMPL=400
0025.0015  STEP TEMPC=400
0025.0020  STEP TEMPS=400
0025.0025  STEP H2=100
0025.0030  STEP TCU LEARN=OFF

0030.0000    HIGH TEMP CYCLE
0030.0005  STEP TIME:10:00:00
0030.0010  STEP TEMPL=617
0030.0015  STEP TEMPC=620
0030.0020  STEP TEMPS=623
0030.0025  STEP TCU LEARN=OFF

0035.0000    RETURN TO LOW TEMP
0035.0005  STEP TIME:00:00:00
0035.0010  STEP IF DNTLK=ON GOTO 0025
0035.0015  STEP TCU LEARN=OFF

0040.0000    BACKFILL
0040.0005  STEP TIME:00:00:00
0040.0010  STEP N2PURG=1000
0040.0015  STEP IF ALMACK=ON GOTO 0045 
0040.0020  STEP TCU LEARN=OFF

0045.0000    END
0045.0005  STEP END PROCESS