PROCESS ID: COAT8   
DESCRIPTION: POLY COAT OF SiGe TUBE ST                         
BANK: 2 
TUBES: 8                                                 
REUSE: YES

0001.0000    IDLE
0001.0005  STEP VACUUM=OFF
0001.0010  STEP N2/AR=3000
0001.0015  STEP TEMPL=590
0001.0020  STEP TEMPC=590
0001.0025  STEP TEMPS=590
0001.0030  STEP UNLOAD=OFF
0001.0035  STEP LOAD=ON
0001.0040  STEP SPEED=25
0001.0045  STEP TCU LEARN=OFF

0005.0000    INITIAL PUMPDOWN
0005.0005  STEP TIME:00:03:00
0005.0010  STEP N2/AR=300
0005.0015  STEP VACUUM=ON
0005.0020  STEP TEMPL=625
0005.0025  STEP TEMPC=625
0005.0030  STEP TEMPS=625
0005.0035  STEP TCU CTLID=7
0005.0040  STEP TCU LEARN=OFF

0010.0000    START PURGE
0010.0005  STEP TIME:00:01:00
0010.0010  STEP H2=60
0010.0015  STEP TCU CTLID=7
0010.0020  STEP TCU LEARN=OFF

0015.0000    STABILZE
0015.0005  STEP TIME:00:05:00
0015.0010  STEP TCU CTLID=7
0015.0015  STEP TCU LEARN=OFF
0015.0020  STEP IF PRCPR>1200 GOTO 0065

0020.0000    PUMP DOWN
0020.0005  STEP TIME:00:02:00
0020.0010  STEP N2/AR=OFF
0020.0015  STEP N2/AR=0
0020.0020  STEP H2=0
0020.0025  STEP H2=OFF
0020.0030  STEP TCU CTLID=7
0020.0035  STEP TCU LEARN=OFF

0025.0000    PUMPDOWN AND GROSS LEAK CHECK
0025.0005  STEP TIME:00:01:00
0025.0010  STEP TCU CTLID=7
0025.0015  STEP PRCPR TOLERANCE=1.0
0025.0020  STEP IF PRCPR>500 GOTO 0105

0030.0000    LEAK CHECK
0030.0005  STEP TIME:00:01:00
0030.0010  STEP TCU CTLID=7
0030.0015  STEP VACUUM=OFF
0030.0020  STEP TCU LEARN=OFF
0030.0025  STEP IF PRCPR>60 GOTO 0105

0035.0000    REPUMP
0035.0005  STEP TIME:00:02:00
0035.0010  STEP VACUUM=ON
0035.0015  STEP N2/AR=300
0035.0020  STEP TCU CTLID=7
0035.0025  STEP TCU LEARN=OFF

0040.0000    START FLOW
0040.0005  STEP TIME:00:02:00
0040.0010  STEP H2=80
0040.0015  STEP TCU CTLID=7
0040.0020  STEP TCU LEARN=OFF

0045.0000    PRCPR STABLIZE
0045.0005  STEP TIME:00:02:00
0045.0010  STEP PRCPR=200
0045.0015  STEP TCU CTLID=7
0045.0020  STEP TCU LEARN=OFF

0050.0000    FINAL STABILIZE TO +-1 DEG
0050.0005  STEP TIME:00:15:00
0050.0010  STEP H2=110
0050.0015  STEP TCU CTLID=7
0050.0020  STEP TCU LEARN=OFF
0050.0025  STEP IF PRCPR>1200 GOTO 0065

0055.0000    *DEPOSITION*
0055.0005  STEP TIME:00:10:00
0055.0010  STEP N2/AR=OFF
0055.0015  STEP N2/AR=0
0055.0020  STEP SIH4=25
0055.0025  STEP H2=20
0055.0030  STEP TCU CTLID=7
0055.0035  STEP TCU LEARN=OFF
0055.0040  STEP IF PRCPR>1200 GOTO 0065

0060.0000    H2 PURGE
0060.0005  STEP TIME:00:00:30
0060.0010  STEP SIH4=0
0060.0015  STEP SIH4=OFF
0060.0020  STEP TCU LEARN=OFF
0060.0025  STEP IF PRCPR>1200 GOTO 0065

0065.0000    1ST PUMP DOWN
0065.0005  STEP TIME:00:03:00
0065.0010  STEP SIH4=OFF
0065.0015  STEP SIH4=0
0065.0020  STEP H2=OFF
0065.0025  STEP H2=0
0065.0030  STEP PRCPR=OFF
0065.0035  STEP PRCPR=0
0065.0040  STEP TEMPL=500
0065.0045  STEP TEMPC=500
0065.0050  STEP TEMPS=500
0065.0055  STEP TCU LEARN=OFF

0070.0000    1ST PURGE
0070.0005  STEP TIME:00:01:00
0070.0010  STEP N2/AR=300
0070.0015  STEP TCU LEARN=OFF

0075.0000    2ND PUMPDOWN
0075.0005  STEP TIME:00:01:00
0075.0010  STEP N2/AR=OFF
0075.0015  STEP N2/AR=0
0075.0020  STEP TCU LEARN=OFF

0080.0000    2ND PURGE
0080.0005  STEP TIME:00:01:00
0080.0010  STEP N2/AR=300
0080.0015  STEP TCU LEARN=OFF

0085.0000    PUMP DOWN
0085.0005  STEP TIME:00:01:00
0085.0010  STEP N2/AR=OFF
0085.0015  STEP N2/AR=0
0085.0020  STEP TCU LEARN=OFF

0090.0000    3RD PURGE 
0090.0005  STEP TIME:00:01:00
0090.0010  STEP N2/AR=350
0090.0015  STEP TCU LEARN=OFF

0095.0000    FINAL PUMP DOWN
0095.0005  STEP TIME:00:01:00
0095.0010  STEP N2/AR=OFF
0095.0015  STEP N2/AR=0
0095.0020  STEP TCU LEARN=OFF

0100.0000    FINAL PURGE AND RAMPDOWN
0100.0005  STEP TIME:00:00:00
0100.0010  STEP N2/AR=400
0100.0015  STEP IF ALMACK=ON GOTO 0105
0100.0020  STEP TCU LEARN=OFF

0105.0000    END
0105.0005  STEP END PROCESS