PROCESS ID: MULTVAR2 DESCRIPTION: FLEX HIGH PRESS SIGE DEP FOR AMOL AS 1/15/99 BANK: 2 TUBES: 8 REUSE: YES 0001.0000 IDLE 0001.0005 STEP VACUUM=OFF 0001.0010 STEP N2/AR=3000 0001.0015 STEP TEMPL=450 0001.0020 STEP TEMPC=450 0001.0025 STEP TEMPS=450 0001.0030 STEP UNLOAD=OFF 0001.0035 STEP LOAD=ON 0001.0040 STEP SPEED=25 0001.0045 STEP TCU LEARN=OFF 0005.0000 BOAT OUT 0005.0005 STEP TIME:00:00:00 0005.0010 STEP TEMPL=440 0005.0015 STEP TEMPC=445 0005.0020 STEP TEMPS=450 0005.0025 STEP LOAD=OFF 0005.0030 STEP UNLOAD=ON 0005.0035 STEP SPEED=25 0005.0040 STEP IF ALMACK=ON GOTO 0010 0005.0045 STEP TCU LEARN=OFF 0010.0000 BOAT IN 0010.0005 STEP TIME:00:00:00 0010.0010 STEP TEMPL=465 0010.0015 STEP TEMPC=465 0010.0020 STEP TEMPS=465 0010.0025 STEP UNLOAD=OFF 0010.0030 STEP LOAD=ON 0010.0035 STEP SPEED=25 0010.0040 STEP TCU CTLID=4 0010.0045 STEP TCU LEARN=OFF 0010.0050 STEP IF DNTLK=ON GOTO 0015 0015.0000 INITIAL PUMPDOWN 0015.0005 STEP TIME:00:03:00 0015.0010 STEP N2/AR=300 0015.0015 STEP VACUUM=ON 0015.0020 STEP TEMPL=VARIABLE 0015.0025 STEP TEMPC=VARIABLE 0015.0030 STEP TEMPS=VARIABLE 0015.0035 STEP TCU LEARN=OFF 0020.0000 START PURGE 0020.0005 STEP TIME:00:01:00 0020.0010 STEP H2=60 0020.0015 STEP TCU LEARN=OFF 0025.0000 STABILZE 0025.0005 STEP TIME:00:05:00 0025.0010 STEP TCU LEARN=OFF 0025.0015 STEP IF PRCPR>1200 GOTO 0105 0030.0000 PUMP DOWN 0030.0005 STEP TIME:00:02:00 0030.0010 STEP N2/AR=0 0030.0015 STEP H2=0 0030.0020 STEP H2=OFF 0030.0025 STEP TCU LEARN=OFF 0035.0000 1ST PURGE 0035.0005 STEP TIME:00:02:00 0035.0010 STEP N2/AR=300 0035.0015 STEP TCU LEARN=OFF 0040.0000 1ST PUMPDOWN 0040.0005 STEP TIME:00:01:00 0040.0010 STEP N2/AR=OFF 0040.0015 STEP N2/AR=0 0040.0020 STEP TCU LEARN=OFF 0045.0000 2ND PURGE 0045.0005 STEP TIME:00:02:00 0045.0010 STEP N2/AR=300 0045.0015 STEP TCU LEARN=OFF 0050.0000 2ND PUMPDOWN 0050.0005 STEP TIME:00:01:00 0050.0010 STEP N2/AR=OFF 0050.0015 STEP N2/AR=0 0050.0020 STEP TCU LEARN=OFF 0055.0000 PUMPDOWN AND GROSS LEAK CHECK 0055.0005 STEP TIME:00:01:00 0055.0010 STEP PRCPR TOLERANCE=1.0 0055.0015 STEP IF PRCPR>500 GOTO 0145 0060.0000 LEAK CHECK 0060.0005 STEP TIME:00:01:00 0060.0010 STEP VACUUM=OFF 0060.0015 STEP TCU LEARN=OFF 0060.0020 STEP IF PRCPR>60 GOTO 0145 0065.0000 REPUMP 0065.0005 STEP TIME:00:02:00 0065.0010 STEP VACUUM=ON 0065.0015 STEP N2/AR=300 0065.0020 STEP TCU LEARN=OFF 0070.0000 START FLOW 0070.0005 STEP TIME:00:02:00 0070.0010 STEP H2=80 0070.0015 STEP TCU LEARN=OFF 0075.0000 PRCPR STABLIZE 0075.0005 STEP TIME:00:02:00 0075.0010 STEP PRCPR=VARIABLE 0075.0015 STEP TCU LEARN=OFF 0080.0000 FINAL STABILIZE TO +-1 DEG 0080.0005 STEP TIME:00:00:00 0080.0010 STEP H2=110 0080.0015 STEP TCU LEARN=OFF 0080.0020 STEP IF PRCPR>1200 GOTO 0105 0080.0025 STEP IF ALMACK=ON GOTO 0085 0085.0000 PRE-SILANE 0085.0005 STEP TIME:VARIABLE 0085.0010 STEP N2/AR=OFF 0085.0015 STEP N2/AR=0 0085.0020 STEP SIH4=VARIABLE 0085.0025 STEP H2=VARIABLE 0085.0030 STEP TCU LEARN=OFF 0085.0035 STEP IF PRCPR>1200 GOTO 0105 0090.0000 COOL DOWN 0090.0005 STEP TIME:00:00:00 0090.0010 STEP TEMPL=VARIABLE 0090.0015 STEP TEMPC=VARIABLE 0090.0020 STEP TEMPS=VARIABLE 0090.0025 STEP SIH4=OFF 0090.0030 STEP PRCPR=VARIABLE 0090.0035 STEP PROCES=ON 0090.0040 STEP SIH4=0 0090.0045 STEP N2/AR=200 0090.0050 STEP IF ALMACK=ON GOTO 0095 0090.0055 STEP TCU LEARN=OFF 0095.0000 *DEPOSITION* 0095.0005 STEP TIME:VARIABLE 0095.0010 STEP N2/AR=OFF 0095.0015 STEP N2/AR=0 0095.0020 STEP SIH4=VARIABLE 0095.0025 STEP H2=VARIABLE 0095.0030 STEP GEH4=VARIABLE 0095.0035 STEP TCU LEARN=OFF 0095.0040 STEP IF PRCPR>1800 GOTO 0100 0100.0000 H2 PURGE 0100.0005 STEP TIME:00:00:30 0100.0010 STEP SIH4=0 0100.0015 STEP SIH4=OFF 0100.0020 STEP GEH4=0 0100.0025 STEP GEH4=OFF 0100.0030 STEP PRCPR=OFF 0100.0035 STEP PRCPR=0 0100.0040 STEP PROCES=OFF 0100.0045 STEP TCU LEARN=OFF 0100.0050 STEP IF PRCPR>1500 GOTO 0105 0105.0000 1ST PUMP DOWN 0105.0005 STEP TIME:00:03:00 0105.0010 STEP SIH4=OFF 0105.0015 STEP SIH4=0 0105.0020 STEP GEH4=OFF 0105.0025 STEP GEH4=0 0105.0030 STEP H2=OFF 0105.0035 STEP H2=0 0105.0040 STEP PRCPR=OFF 0105.0045 STEP PRCPR=0 0105.0050 STEP TEMPL=470 0105.0055 STEP TEMPC=470 0105.0060 STEP TEMPS=470 0105.0065 STEP TCU LEARN=OFF 0110.0000 1ST PURGE 0110.0005 STEP TIME:00:01:00 0110.0010 STEP N2/AR=300 0110.0015 STEP TCU LEARN=OFF 0115.0000 2ND PUMPDOWN 0115.0005 STEP TIME:00:01:00 0115.0010 STEP N2/AR=OFF 0115.0015 STEP N2/AR=0 0115.0020 STEP TCU LEARN=OFF 0120.0000 2ND PURGE 0120.0005 STEP TIME:00:01:00 0120.0010 STEP N2/AR=300 0120.0015 STEP TCU LEARN=OFF 0125.0000 PUMP DOWN 0125.0005 STEP TIME:00:01:00 0125.0010 STEP N2/AR=OFF 0125.0015 STEP N2/AR=0 0125.0020 STEP TCU LEARN=OFF 0130.0000 3RD PURGE 0130.0005 STEP TIME:00:01:00 0130.0010 STEP N2/AR=350 0130.0015 STEP TCU LEARN=OFF 0135.0000 FINAL PUMP DOWN 0135.0005 STEP TIME:00:01:00 0135.0010 STEP N2/AR=OFF 0135.0015 STEP N2/AR=0 0135.0020 STEP TCU LEARN=OFF 0140.0000 FINAL PURGE AND RAMPDOWN 0140.0005 STEP TIME:00:00:00 0140.0010 STEP N2/AR=400 0140.0015 STEP TEMPL TOLERANCE=1.0 0140.0020 STEP IF TEMPL<600 GOTO 0145 0140.0025 STEP TCU LEARN=OFF 0145.0000 SLOW BACKFILL AND ABORT STEP 0145.0005 STEP TIME:00:08:00 0145.0010 STEP VACUUM=OFF 0145.0015 STEP TEMPL=465 0145.0020 STEP TEMPC=465 0145.0025 STEP TEMPS=465 0145.0030 STEP N2/AR=2500 0145.0035 STEP N2BKFL=750 0145.0040 STEP TCU LEARN=OFF 0150.0000 BOAT OUT 0150.0005 STEP TIME:00:00:00 0150.0010 STEP N2BKFL=OFF 0150.0015 STEP N2BKFL=0 0150.0020 STEP TEMPL=455 0150.0025 STEP TEMPC=460 0150.0030 STEP TEMPS=465 0150.0035 STEP LOAD=OFF 0150.0040 STEP UNLOAD=ON 0150.0045 STEP SPEED=25 0150.0050 STEP IF ALMACK=ON GOTO 0155 0150.0055 STEP TCU LEARN=OFF 0155.0000 END 0155.0005 STEP END PROCESS