PROCESS ID: SIGEPUMP DESCRIPTION: STAND-BY FOR TUBE #8 SMT SR BANK: 2 TUBES: 8 REUSE: YES 0001.0000 IDLE 0001.0005 STEP UNLOAD=OFF 0001.0010 STEP LOAD=ON 0001.0015 STEP SPEED=15 0001.0020 STEP VACUUM=OFF 0001.0025 STEP N2/AR=2500 0001.0030 STEP TEMPL=550 0001.0035 STEP TEMPC=560 0001.0040 STEP TEMPS=570 0001.0045 STEP TCU LEARN=OFF 0005.0000 DOOR CHECK 0005.0005 STEP TIME:00:00:00 0005.0010 STEP IF DNTLK=ON GOTO 0010 0005.0015 STEP TCU LEARN=OFF 0010.0000 PUMPDOWN 0010.0005 STEP TIME:00:05:00 0010.0010 STEP N2/AR=250 0010.0015 STEP VACUUM=ON 0010.0020 STEP TCU LEARN=OFF 0015.0000 GROSS LEAK CHECK 0015.0005 STEP TIME:00:00:10 0015.0010 STEP PRCPR TOLERANCE=1.0 0015.0015 STEP IF PRCPR>500 GOTO 0035 0015.0020 STEP TCU LEARN=OFF 0020.0000 START PURGE FLOW 0020.0005 STEP TIME:00:01:00 0020.0010 STEP N2/AR=300 0020.0015 STEP TCU LEARN=OFF 0025.0000 STANDBY 0025.0005 STEP TIME:00:00:00 0025.0010 STEP TEMPL=570 0025.0015 STEP TEMPC=575 0025.0020 STEP TEMPS=580 0025.0025 STEP IF PRCPR>500 GOTO 0035 0025.0030 STEP IF ALMACK=ON GOTO 0035 0025.0035 STEP TCU LEARN=OFF 0030.0000 BACKFILL 0030.0005 STEP TIME:00:00:00 0030.0010 STEP N2/AR=2500 0030.0015 STEP IF ALMACK=ON GOTO 0035 0030.0020 STEP TCU LEARN=OFF 0035.0000 END 0035.0005 STEP END PROCESS