PROCESS ID: TW1000  
DESCRIPTION: PYROGENIC STEAM AT 1000 DEG FOR THIN WAFERS ST    
BANK: 1 
TUBES: 1,2,3,4,7                                         
REUSE: YES

0001.0000    IDLE
0001.0005  STEP N2=2.5
0001.0010  STEP O2HI=OFF
0001.0015  STEP O2HI=0
0001.0020  STEP TEMPL=700
0001.0025  STEP TEMPC=700
0001.0030  STEP TEMPS=700
0001.0035  STEP UNLOAD=OFF
0001.0040  STEP LOAD=ON
0001.0045  STEP SPEED=10
0001.0050  STEP TCU LEARN=OFF

0005.0000    BOAT PULL
0005.0005  STEP TIME:00:00:00
0005.0010  STEP N2=5.0
0005.0015  STEP TEMPL=600
0005.0020  STEP TEMPC=650
0005.0025  STEP TEMPS=650
0005.0030  STEP LOAD=OFF
0005.0035  STEP UNLOAD=ON
0005.0040  STEP SPEED=8
0005.0045  STEP IF ALMACK=ON GOTO 0010
0005.0050  STEP TCU LEARN=OFF

0010.0000    BOAT IN
0010.0005  STEP TIME:00:20:00
0010.0010  STEP TEMPL=650
0010.0015  STEP TEMPC=650
0010.0020  STEP TEMPS=650
0010.0025  STEP UNLOAD=OFF
0010.0030  STEP LOAD=ON
0010.0035  STEP SPEED=5
0010.0040  STEP TCU CTLID=1
0010.0045  STEP TCU LEARN=OFF

0015.0000    RAMP UP
0015.0005  STEP TIME:00:15:00
0015.0010  STEP TEMPL=725
0015.0015  STEP TEMPC=725
0015.0020  STEP TEMPS=725
0015.0025  STEP N2=3.5
0015.0030  STEP TCU LEARN=OFF

0020.0000    START RAMP UP
0020.0005  STEP TIME:00:15:00
0020.0010  STEP TEMPL=800
0020.0015  STEP TEMPC=800
0020.0020  STEP TEMPS=800
0020.0025  STEP N2=2.5
0020.0030  STEP TCU LEARN=OFF

0025.0000    RAMP UP
0025.0005  STEP TIME:00:10:00
0025.0010  STEP TEMPL=850
0025.0015  STEP TEMPC=850
0025.0020  STEP TEMPS=850
0025.0025  STEP TCU LEARN=OFF

0030.0000    RAMP UP
0030.0005  STEP TIME:00:15:00
0030.0010  STEP TEMPL=900
0030.0015  STEP TEMPC=900
0030.0020  STEP TEMPS=900
0030.0025  STEP TCU LEARN=OFF

0035.0000    RAMP UP
0035.0005  STEP TIME:00:10:00
0035.0010  STEP TEMPL=950
0035.0015  STEP TEMPC=950
0035.0020  STEP TEMPS=950
0035.0025  STEP TCU LEARN=OFF

0040.0000    RAMP UP TO 1000 DEG +- .5
0040.0005  STEP TIME:00:15:00
0040.0010  STEP TEMPL=1000
0040.0015  STEP TEMPC=1000
0040.0020  STEP TEMPS=1000
0040.0025  STEP O2LO=100
0040.0030  STEP TCU CTLID=5
0040.0035  STEP TCU LEARN=OFF

0045.0000    DRY OX
0045.0005  STEP TIME:00:10:00
0045.0010  STEP N2=OFF
0045.0015  STEP N2=0
0045.0020  STEP O2LO=OFF
0045.0025  STEP O2LO=0
0045.0030  STEP O2HI=2500
0045.0035  STEP TCU CTLID=5
0045.0040  STEP TCU LEARN=OFF

0050.0000    STEAM
0050.0005  STEP TIME:VARIABLE
0050.0010  STEP H2/O2=150
0050.0015  STEP O2HI=1000
0050.0020  STEP TCU CTLID=24
0050.0025  STEP TCU LEARN=OFF

0055.0000    DRY OX
0055.0005  STEP TIME:00:10:00
0055.0010  STEP H2/O2=OFF
0055.0015  STEP H2/O2=0
0055.0020  STEP O2HI=2500
0055.0025  STEP TCU CTLID=5
0055.0030  STEP TCU LEARN=OFF

0060.0000    RAMP DOWN
0060.0005  STEP TIME:00:15:00
0060.0010  STEP O2HI=OFF
0060.0015  STEP O2HI=0
0060.0020  STEP N2=2.5
0060.0025  STEP TEMPL=950
0060.0030  STEP TEMPC=950
0060.0035  STEP TEMPS=950
0060.0040  STEP TCU LEARN=OFF

0065.0000    RAMPDOWN
0065.0005  STEP TIME:00:15:00
0065.0010  STEP TEMPL=900
0065.0015  STEP TEMPC=900
0065.0020  STEP TEMPS=900
0065.0025  STEP N2=3.5
0065.0030  STEP TCU LEARN=OFF

0070.0000    RAMP DOWN
0070.0005  STEP TIME:00:15:00
0070.0010  STEP TEMPL=850
0070.0015  STEP TEMPC=850
0070.0020  STEP TEMPS=850
0070.0025  STEP TCU LEARN=OFF

0075.0000    RAMP DOWN
0075.0005  STEP TIME:00:15:00
0075.0010  STEP TEMPL=800
0075.0015  STEP TEMPC=800
0075.0020  STEP TEMPS=800
0075.0025  STEP TCU LEARN=OFF

0080.0000    RAMPDOWN
0080.0005  STEP TIME:00:10:00
0080.0010  STEP TEMPL=750
0080.0015  STEP TEMPC=750
0080.0020  STEP TEMPS=750
0080.0025  STEP TCU LEARN=OFF

0085.0000    FINAL RAMP DOWN
0085.0005  STEP TIME:00:15:00
0085.0010  STEP TEMPL=650
0085.0015  STEP TEMPC=650
0085.0020  STEP TEMPS=650
0085.0025  STEP N2=5.0
0085.0030  STEP TCU LEARN=OFF

0090.0000    BOAT OUT
0090.0005  STEP TIME:00:00:00
0090.0010  STEP TEMPL=600
0090.0015  STEP TEMPC=625
0090.0020  STEP TEMPS=650
0090.0025  STEP TCU LEARN=OFF
0090.0030  STEP LOAD=OFF
0090.0035  STEP UNLOAD=ON
0090.0040  STEP SPEED=5
0090.0045  STEP IF ALMACK=ON GOTO 0095

0095.0000    END
0095.0005  STEP END PROCESS