This document describes the procedures for entering and exiting the cleanroom, including the gowning protocol. These procedures are designed to minimize the potential for transferring and generating particulate matter, which could adversely affect the lab.
All SNF labmembers must demonstrate or describe the following:
Before entering the gowning room
On entering the gowning room
In the cleanroom
Before working with wafers, put on vinyl gloves over the latex (or vinyl) gloves. Change vinyl gloves frequently: 1. whenever getting ready to handle, transfer, or inspect wafers; 2. whenever any contamination is suspected. Vinyl gloves are available in the gowning room and throughout the lab.
Described here is a general list of criteria of cleanroom- and non-cleanroom-compatible materials. These guidelines are subordinate to the "Acceptable Materials" policy.
The following materials are generally acceptable to bring into the cleanroom:
The following materials are not considered cleanroom-compatible:
Bunnysuits should be changed on a biweekly or as-needed basis.
|
_______________________________________________________________
Stanford Nanofabrication Facility Last Modified 08/29/2003 |