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If you would like
to bring in a new chemical or material into the lab, you must submit a
request to the SpecMat Committee. Approval
will be based on considerations for safety and contamination and the capability
of our equipment.
Correspondence should be in the form of an email sent to SpecMat@snf.stanford.edu.
You should include
the chemical name in subject line and provide supporting documentation
as attachments.
Please be prepared
with the following information:
- Your contact
information:
Name, Coral login, phone number, email address and who you work for
(your PI or company.)
- The chemical
or material. Please
provide all common names, trade names, and CAS numbers where appropriate.
Include an MSDS, if available; or provide the reason, if not. Make
sure to include information for any new secondary chemicals (such
as a developer for a new resist). Read
the MSDSs as well as the Stanford Chemical
Storage Groups and the Stanford
Chemical Safety Data Base sections on this website to determine
the Storage Group Identifier and Main
Hazard Class of your chemical/material.
- Vendor/manufacturer
info:
address and phone number, website URL.
- Reason
for request: Please give serious thought to this. If
you have any process information (application notes from the vendor,
protocol from another lab, experimental methods section of an article),
please include it, preferably as attachments. Ask yourself these questions:
Is this the latest procedure? Are there newer/safer alternatives that
will also work for my project? Will any of the current SNF approved
chemicals and materials work for me?
- Process
Flow:
Please provide a detailed process flow description on how and where
you proposed to use this chemical. This should include all Lab
equipment to
be used for processing your wafers once your new chemical or material
has been used (even if your new material is a film that is removed,
it may still pose potential contamination concerns.) Make sure to include
wet benches. Please
note that f the chemical/material is to be used in any the "clean"
equipment, purity specifications will be needed. This is most important
for chemicals/material that are not normally used for VLSI device fabrication.
To be allowed into a "clean"
tool, the material should MOS grade or better.
- Amount and form.
How much will you bring in? Is
it solid, powder or liquid? (Note: as a general
rule, powders are not permitted in the cleanroom.)
Do you need to mix it to use it?
- Storage:
Will you
be storing your chemical/material at SNF? If so, please note any potential
reactivities (this should be on the MSDS). Storage
groups A,B,D and L are stored in the yellow solvent cabinet in the
furnace support area, while storage groups
C, E, F and G are stored on top of one of the Pass-through Carts. Ensure
your chemical container or material is properly
labeled. If there is no available room, it must be stored by in
the bulk storage area. You will then need to obtain it from receiving
area personnel each time you want to use it and return it to them when
you are finished using it (or each time you leave the lab). Note that
there is no storage of chemicals/materials in the processing lab or
at any wet bench.
- DIsposal:
How will you dispose of any waste or excess chemical or material? In
your discussions with experts and vendors, try to determine the best
way to dispose of your spent chemicals and by-products. Please refer
to the SNF Labmembers Safety
Manual for the different methods of waste disposal that are available
in the lab.
Please provide as much information as you can about
your chemical or material. It may very well be the first time anyone on
the SpecMat committee has heard of this chemical/material, so it will
be your responsibility to educate us. We also have a large archive of
chemicals and materials that have been approved, so we may also be able
to help you in selecting a chemical or process.
Helpful links:
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