Lithography Process Links
Overview of Photolithography Processes
List of Available Photoresists
AZ3612 Photoresist
SPR220 Photoresist
Polyimide Photoresist
Lift-off Processing
Photoresist for Implant Processing
Wafer Backside Protection w/Photoresist
Edge Bead Removal Mask Processing
Photoresist Exposure Time Table
Manual Coating Procedure
Manual Developing Procedure
Image Reversal Processing
Processing Clear (Glass, Quartz, Sapphire) Substrates
Maskmaking
Contact Mask Alignment Marks
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Stanford Nanofabrication Facility
webmaestro@snf.stanford.edu
Last Modified
08/28/2003
