SVGCOAT BACKPROTECT

If wafers are patterned on the frontside use MANUAL MODE and only load them on the coat station -- NO HMDS and NO HOT PLATE BAKE. Do the bake at 110C for 30 minutes in the oven.

SVGCOAT PROGRAM 7 :

Hmds Prime: Program1

Coat: Program 7 (30 seconds @5000 rpm = 1um)

Bake: Program 1 (60 seconds @ 90C)

Note: If the litho has to be redone, strip the resist , clean them without 50:1 HF, singe them, and spin them again.