If wafers are patterned on the frontside use MANUAL MODE
and only load them on the coat station -- NO HMDS and NO HOT PLATE BAKE. Do
the bake at 110C for 30 minutes in the oven.
SVGCOAT PROGRAM 7 :
Hmds Prime: Program1
Coat: Program 7 (30 seconds @5000 rpm = 1um)
Bake: Program 1 (60 seconds @ 90C)
Note: If the litho has to be redone, strip the resist
, clean them without 50:1 HF, singe them, and spin them again.
Stanford Nanofabrication Facility
Last Modified 08/29/2003