Process Qualification

Area Equipment/Process
Qualification Procedure
Data Trends
Furnaces tylan1
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  tylan2
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  tylan3
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  tylan4
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<go>
  tylanbpsg
<go>
<go>
  tylannitride
<go>
<go>
  tylanpoly
<go>
<go>
Etch amtetcher
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  drytek2
<go>
<go>
  stsetch
<go>
<go>
Litho

Contact Aligners
evalign
karlsuss1/2

<go>
<go>
  Ultratech
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<go>

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_______________________________________________________________
Stanford Nanofabrication Facility
webmaestro@snf.stanford.edu
Last Modified 07/06/2007