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Wafer Grinding Axus Technology SiliconQuest Disco GDSI Aptek Industries Heussner Optics G.M. Associates Onyx Optics Ultrasil Umicore Semiconductor Processing
Quartz and other substrate polishing (from James Conway) G.M. Associates Valley Design West Valley Design Onyx Optics
CMP (recommendations from Eric Sanjuan): There seems to be very little in the way of "real" CMP, local or global planarization of device wafers containing metals and dielectrics. But this is what I dug up. Dr. John H. Givens has worked for many years as CMP engineer/manager at TI's Advanced Technology Group. He is currently working to revive a business in Arizona that will be providing CMP services. While this may take another month or two from today (03-21-02) please contact him directly so that he can keep you in the loop about when this endeavor will be opening its doors. Dr. Givens contact info is jjgivens@texas.net Clarkson University in New York also is willing to provide CMP services in low volumes. Dr Yuzhuo Li is the Professor in charge of that group and he can be reached by email at yuzhuoli@clarkson.edu
CMP recommendation from Don Disney: Polishing Solutions International
A contribution from a vendor: THAT Corporation |
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Stanford Nanofabrication Facility webmaestro@snf.stanford.edu Last Modified 04/13/2009 |