Places that can do silicon etching of gold-contaminated substrates (thanks to Uma Krishnamoorthy):

__________________________________________
1. UCSB in Santa Barbara - Plasmatherm (Unaxis) DRIE. Contact: Jack Whaley 805-893-8174 whaley@ece.ucsb.edu Nanofabrication Facility Manager
________________________________________
2. You may try contacting Mike Bruner or Jim Hunter of Silicon Light Machines.They have a STS etcher and may be able to help you. You can find the contact information in their web site: www.siliconlight.com
****They do not have an STS etcher but do have a XeF2 etcher for isotropic Silicon etching******** _____________________________________________
4. Company: IMT Location: Goleta, CA Tel: 805 681 2837 Contact: John Forestor ______________________________________________
5. There is an etcher at JPL in Pasadena. They take gold-contaminated samples. If you're interested in JPL, contact Yoshi Hishinuma (Yoshikazu.Hishinuma@jpl.nasa.gov). _________________________________________________