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Metrology Symposium 2019
Hosted by:
nano@stanford
November 6 – 7, 2019
Paul G. Allen Building Auditorium, Stanford

Featuring technical experts from Asylum Research/Oxford Instruments, Horiba Scientific,
and Filmetrics – a KLA Company, who will be describing and demonstrating the use of their latest,
state-of-the-art instrumentation, specifically in context of metrology and quality control as it applies
to device and material fabrication.

Wednesday, November 6th

8:30am

Continental Breakfast

9:00am

Opening Remarks Marcin Walkiewicz, SPM Lab Manager

9:15am

Overview of Stanford Facilities Mary Tang, Managing Director, SNF

9:30am

Use of remote Inductively Coupled Plasma for Atomic Layer Etch and Deposition techniques on a highly flexible platform Felicia McGuire, Oxford Instruments

10:30am

Raman Spectroscopy: Solid State Applications David Tuschel, Horiba Scientific

11:30am

Applications of AFM for Semiconductor and 2D materials research Mayur Savla, Asylum Research

12:30am

Lunch - sponsored by Asylum Research

1:00pm

Raman Imaging David Tuschel, Horiba Scientific

2:00pm-5:00pm

Hand-on Demonstration Sessions
Asylum and Filmetrics – SNF Lobby at Allen Annex Building
Horiba Scientific – Spilker 007

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Thursday, November 7th

8:30am

Continental Breakfast

9:00am

Basic Principles of Optical Microscopy Jon Mulholland, Director, CSIF

10:00am

Nanoscale resolution x-ray maps using a windowless SEM-EDS detector Michael Hjelmstad, Oxford Instruments

11:00am

Thin Film Thickness Metrology and 3D Optical Profiler Introduction Michelle Shi, Filmetrics

12:30am

Lunch – Sponsored by Filmetrics

1:00pm-5:00pm

Hand-on Demonstration Sessions
Asylum and Filmetrics – SNF Lobby at Allen Annex Building

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nano@stanford is part of NSF's NNCI, making advanced fabrication and characterization capabilities available to all researchers, everywhere.

Register here: https://bit.ly/2OuVevo
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Travel/transit information