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Messages 0xx
01:
Computer Replacement
(
Anthony Flannery
)
02:
2% Silane cylinder change
(
Bob Wheeler
)
03:
2% silane gas change
(
Bob Wheeler
)
04:
free slots
(
Ping Zhang
)
05:
Computer Replacement
(
Anthony Flannery
)
06:
Silane gas cylinder change
(
Bob Wheeler
)
07:
STS up and running!
(
Nancy Latta
)
08:
Carbide Scheduling
(
Anthony Flannery
)
09:
Postponement of Carbide
(
Anthony Flannery
)
10:
Purge Valve
(
Anthony Flannery
)
11:
Cancel reservation
(
Elaheh Sigari
)
12:
Etcher is down
(
Anthony Flannery
)
13:
STS is down
(
Len Booth
)
14:
STS res. removal
(
Linan Jiang
)
15:
Carbide switchover
(
Anthony Flannery
)
16:
STS dep system down
(
Len Booth
)
17:
STS Status and Carbide Switchover
(
Anthony Flannery
)
18:
Back to normal
(
Anthony Flannery
)
19:
afternoon res open
(
Tom
)
20:
disregard previous message
(
Tom
)
21:
surface roughness
(
Matt Hopcroft
)
22:
cancelled res Thursday 3/22 5-10am
(
Daniel James Laser
)
23:
May PEUG Mtg -- MEMS Related Plasma Etching
(
Jim McVittie
)
24:
Carbide this Weekend
(
Anthony Flannery
)
25:
silane bottle change
(
Ray Seymour
)
26:
system status
(
Ray Seymour
)
27:
shutdown
(
Ray Seymour
)
28:
burnbox is up
(
Ray Seymour
)
29:
sts free 11am-12:30, Sunday 7-8-01
(
Michael S. Bartsch
)
30:
STS dep Ammonia
(
Jim Haydon
)
31:
Ammonia change
(
Ray Seymour
)
32:
STS available now til 10:30pm, July 23.
(
Kris Vossough
)
33:
Toxic gas shutdown Aug. 6
(
Dick Crane
)
34:
Etch rate
(
Nancy Latta
)
35:
silane bal N2 bottle change
(
Ray Seymour
)
36:
Toxic gas tests complete
(
Dick Crane
)
37:
Recent Nitride stress measurements?
(
Nancy Latta
)
38:
Silane change
(
Ray Seymour
)
39:
Need Help with STS Dep Video Tape
(
Jim McVittie
)
40:
shut down for pump servicing
(
Jim Haydon
)
41:
STSdep scheduled downtime
(
Len Booth
)
42:
welding finished
(
Jim Haydon
)
43:
SiNx Deposition
(
Dinh Ton
)
44:
STS PECVD : Nitride Runs
(
Dinh Ton
)
45:
Carbide NExt weekend
(
Anthony Flannery
)
46:
2% silane with nitrogen shut down
(
Jim Haydon
)
47:
Doing ETCHBAK3
(
Dinh Ton
)
48:
PECVD Maintenance and Operator responsibilities
(
Anthony Flannery
)
49:
STS Available
(
Jeannie Perez
)
50:
Cleaning chamber
(
Dinh Ton
)
51:
Silane/N2 cylinder change.
(
Ray Seymour
)
52:
Optical Properities of STS Oxide
(
Jim McVittie
)
53:
silane cylinder change
(
Ray Seymour
)
54:
Equipment Signs
(
Jeannie Perez
)
55:
stress of SiN film
(
Yu-Ju Lin
)
56:
Re: stress of SiN film
(
Anthony Flannery
)
57:
Down until Friday
(
Jim Haydon
)
58:
STS done early free until 8:30pm
(
Kyle Evan Hammerick
)
59:
Next STS PECVD user
(
Jeannie Perez
)
60:
Uniformity of SiN deposition with STS
(
Yu-Ju Lin
)
61:
STS PECVD
(
Jeannie Perez
)
62:
Implementing zip lock bags!
(
Jeannie Perez
)
63:
STS FREE
(
David Chang
)
64:
STS RED VELCRO ARM BANDS
(
Jeannie Perez
)
65:
Etching SiN with gold underneath
(
Yu-Ju Lin
)
66:
Surface quality of 4um SiN
(
Yu-Ju Lin
)
67:
STS PECVD
(
Jeannie Perez
)
68:
test
(
Cesar Baxter
)
69:
STS PECVD Status Temporary!
(
Jeannie Perez
)
70:
STS PECVD
(
Jeannie Perez
)
71:
Purging old recipies from STS PECVD
(
Eric Perozziello
)
72:
Silane/N2 bottle change.
(
Ray Seymour
)
73:
DO NOT Run Nitride processes on STS PECVD
(
Jeannie Perez
)
74:
STS Issues
(
Jeannie Perez
)
75:
reservation today cancelled
(
Luigi Scaccabarozzi
)
76:
STS Free Today
(
david chang
)
77:
Re: STS Free Today
(
DaveHong.aol.com
)
78:
Bottle change
(
Mike Dickey
)
79:
test
(
Mike Dickey
)
80:
sts free from 1200am-300am 10/13
(
Tariq Haniff
)
81:
Re: sts time
(
Tariq Haniff
)
82:
Silane Nitrogen
(
Jim Haydon
)
83:
Bottle change
(
Mike Dickey
)
84:
bottle change
(
Jim Haydon
)
85:
down
(
Jim Haydon
)
86:
thin insulating SiN films
(
Yves Acremann
)
87:
I started etchback3 clean
(
Todd Sulchek
)
88:
Re: thin insulating SiN films
(
Anthony Flannery
)
89:
STS available 4-5 pm
(
Juan Ferrera
)
90:
bottle change
(
Jim Haydon
)
91:
STS Gas bottle change completed
(
Jeannie Perez
)
92:
sts available 1230pm-730 pm 12/15
(
Tariq Haniff
)
93:
sts available 800pm-600AM
(
Tariq Haniff
)
94:
STS is free from PM 4:30 to 7:00 today (01/18)
(
Chih-Chang Chen
)
95:
STS will be free from 8:00 pm to 9:30 pm today!
(
Chih-Chang Chen
)
96:
recipe: "sidesmoo" etching rate for STS
(
Chih-Chang Chen
)
97:
sts time available from 9-11am on monday
(
Jasmine Hasi
)
98:
my wafer are not ready-canceled reservation
(
rainer fasching
)
99:
STS PECVD Temporary Nitride Recipe with good RI
(
Jeannie Perez
)
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