Subject: Just a reminder on New Recipes at STS PECVD to Use with High Frequency
From: Jeannie Perez <nperez@stanford.edu>
Date: Thu, 29 Nov 2012 13:35:47 -0800

On 11/29/2012 8:07 AM, jperez@snf.stanford.edu wrote:
Here are the recipes to use or copy from.
hifrqcln= etch back
hfoxcoat= 1 micron coat
hfnicoat= 2500 coat
std_hfox
std_hfni
DO NOT USE LOW FREQUENCY!