Messages 0xx

---

01: Shutdown sts: ((none))
02: Shutdown Clear sts: Sensor in vault was in alarm. ((none))
03: Problem sts: NH3 flow ~ 0 sccm ((none))
04: Shutdown sts: Shutdown to change 2% silane cylinder ((none))
05: Problem Clear sts: NH3 checked, All okay ((none))
06: Shutdown Clear sts: Cylinder changed ((none))
07: Problem sts: computer monitor dead (miller.snf.stanford.edu)
08: Problem Clear sts: Replaced Monitor (gaul.snf.stanford.edu)
09: Shutdown sts: Shutdown to change gas cylinder (wheeler.snf.stanford.edu)
10: Shutdown Clear sts: 2% Silane & Ammonia gas cylinder change (wheeler.snf.stanford.edu)
11: Problem sts: motorgaurd filter on rough pump is not working (mramsey.snf.stanford.edu)
12: Shutdown sts: Silane gas cylinder change (wheeler.snf.stanford.edu)
13: Shutdown Clear sts: Silane cylinder changed successfully (wheeler.snf.stanford.edu)
14: Problem Clear sts: replace Motorgaurd system (mramsey.snf.stanford.edu)
15: Problem sts: hoist solenoid broken (king.snf.stanford.edu)
16: Shutdown sts: silane bottle empty change 9/26 am (seymour.snf.stanford.edu)
17: Shutdown Clear sts: bottle change completed (gaul.snf.stanford.edu)
18: Shutdown sts: (sigari.snf.stanford.edu)
19: Shutdown Clear sts: (sigari.snf.stanford.edu)
20: Problem Clear sts: hoist problem is gone (king.snf.stanford.edu)
21: Shutdown sts: Pump seal is leaking badly. (booth.snf.stanford.edu)
22: Shutdown Clear sts: installed rebuilt vane pump. (booth.snf.stanford.edu)
23: Shutdown sts: Swap Oil Out (flannery.snf.stanford.edu)
24: Shutdown sts: Swap Oil OutDate: Nov 17, 2000 12:43:35 PM (booth.snf.stanford.edu)
25: Problem sts: (seymour.snf.stanford.edu)
26: Shutdown sts 2000-12-19 15:48:21: Pump Oil Problem (flannery.snf.stanford.edu)
27: Shutdown sts 2000-12-19 15:48:53: Computer Problem (flannery.snf.stanford.edu)
28: Re: Shutdown sts 2000-12-19 15:48:21: Pump Oil Problem (cbaxter.snf.stanford.edu)
29: Re: Shutdown sts 2000-12-19 15:48:53: Computer Problem (seymour.snf.stanford.edu)
30: Shutdown sts 2001-02-05 08:04:44: burnbox down (seymour.snf.stanford.edu)
31: Re: Shutdown sts 2001-02-05 08:04:44: burnbox is up (seymour.snf.stanford.edu)
32: Re: Problem sts 2000-12-04 16:00:41: (seymour.snf.stanford.edu)
33: Shutdown sts 2001-02-22 09:50:26: pump and rebooting (king.snf.stanford.edu)
34: Re: Shutdown sts 2001-02-22 09:50:26: pump and rebooting (king.snf.stanford.edu)
35: Shutdown sts 2001-03-06 16:02:52: pump problem, sts pecvd (king.snf.stanford.edu)
36: Re: Shutdown sts 2001-03-06 16:02:52: new pump installed (seymour.snf.stanford.edu)
37: Shutdown sts 2001-05-17 07:09:33: Silane bottle change (seymour.snf.stanford.edu)
38: Re: Shutdown sts 2001-05-17 07:09:33: Silane bottle change (seymour.snf.stanford.edu)
39: Shutdown sts 2001-06-04 09:31:22: working on burnbox (seymour.snf.stanford.edu)
40: Re: Shutdown sts 2001-06-04 09:31:22: working on burnbox (seymour.snf.stanford.edu)
41: Shutdown sts 2001-06-14 13:38:56: shut down for valve replacement (jhaydon.snf.stanford.edu)
42: Re: Shutdown sts 2001-06-14 13:38:56: shut down for valve replacement (jhaydon.snf.stanford.edu)
43: Shutdown sts 2001-07-02 14:22:34: shut down to replace blower (jhaydon.snf.stanford.edu)
44: Re: Shutdown sts 2001-07-02 14:22:34: shut down to replace blower (jhaydon.snf.stanford.edu)
45: Problem sts 2001-07-03 17:40:29: (anolley.snf.stanford.edu)
46: Re: Problem sts 2001-07-03 17:40:29: (seymour.snf.stanford.edu)
47: Shutdown sts 2001-08-03 09:12:18: silane bal N2 bottle change (seymour.snf.stanford.edu)
48: Re: Shutdown sts 2001-08-03 09:12:18: silane bal N2 bottle change (seymour.snf.stanford.edu)
49: Problem sts 2001-08-15 20:56:20: System Error : Purge gas flow fault (dton.snf.stanford.edu)
50: Re: Problem sts 2001-08-15 20:56:20: System Error : Purge gas flow fault (seymour.snf.stanford.edu)
51: Problem sts 2001-08-21 12:19:19: Communications fault (ukris.snf.stanford.edu)
52: Problem sts 2001-08-21 12:52:36: Clear Comm Error (dton.snf.stanford.edu)
53: Shutdown sts 2001-08-25 06:29:04: shut down for work on air handeling system (jhaydon.snf.stanford.edu)
54: Re: Shutdown sts 2001-08-25 06:29:04: shut down for work on air handeling system (seymour.snf.stanford.edu)
55: Problem sts 2001-08-26 17:45:23: Pressure tolerance error (dton.snf.stanford.edu)
56: Re: Problem sts 2001-08-21 12:19:19: Communications fault (seymour.snf.stanford.edu)
57: Re: Problem sts 2001-08-21 12:52:36: Clear Comm Error (seymour.snf.stanford.edu)
58: Re: Problem sts 2001-08-26 17:45:23: Pressure tolerance error (seymour.snf.stanford.edu)
59: Problem sts 2001-08-31 14:16:31: Error : Purge Gas Flow Fault (dton.snf.stanford.edu)
60: Shutdown sts 2001-09-04 17:51:28: Ammonia isn't flowing, gas bottle full in tox vault (storment.snf.stanford.edu)
61: Shutdown sts 2001-09-17 15:14:39: shut down for pump servicing (jhaydon.snf.stanford.edu)
62: Re: Problem sts 2001-08-31 14:16:31: Error : Purge Gas Flow Fault (rcrane.snf.stanford.edu)
63: Re: Shutdown sts 2001-09-04 17:51:28: Ammonia isn't flowing, gas bottle full in tox vault (rcrane.snf.stanford.edu)
64: Re: Shutdown sts 2001-09-17 15:14:39: shut down for pump servicing (rcrane.snf.stanford.edu)
65: Shutdown sts 2001-09-25 07:44:54: gas line welding (possibly thru Fri.) (booth.snf.stanford.edu)
66: Re: Shutdown sts 2001-09-25 07:44:54: gas line welding (possibly thru Fri.) (jhaydon.snf.stanford.edu)
67: Shutdown sts 2001-10-08 08:40:19: empty silane bottle (jhaydon.snf.stanford.edu)
68: Re: Shutdown sts 2001-10-08 08:40:19: empty silane bottle (seymour.snf.stanford.edu)
69: Problem sts 2001-10-17 17:48:07: Broken piece of wafer (dton.snf.stanford.edu)
70: Shutdown sts 2001-10-17 17:51:12: (dton.snf.stanford.edu)
71: Re: Shutdown sts 2001-10-17 17:51:12: (cbaxter.snf.stanford.edu)
72: Re: Problem sts 2001-10-17 17:48:07: Broken piece of wafer (cbaxter.snf.stanford.edu)
73: Problem sts 2001-10-19 18:59:08: Leak? (dton.snf.stanford.edu)
74: Re: Problem sts 2001-10-19 18:59:08: Leak? I've done et (jperez.snf.stanford.edu)
75: Comment sts 2001-10-26 13:12:28: ad oil to pump (jhaydon.snf.stanford.edu)
76: Re: Shutdown sts 2001-11-16 14:41:28: changing silane bal nitrogen cylinder (seymour.snf.stanford.edu)
77: Problem sts 2002-01-02 09:57:56: System down to maintenance (jperez.snf.stanford.edu)
78: Shutdown sts 2002-01-02 16:40:44: Drypump not getting to base pressure. (booth.snf.stanford.edu)
79: Re: Shutdown sts 2002-01-02 16:40:44: Drypump not getting to base pressure. (booth.snf.stanford.edu)
80: Re: Problem sts 2002-01-02 09:57:56: System down to maintenance (booth.snf.stanford.edu)
81: Shutdown sts 2002-01-22 07:13:18: changing SiH4/N2 cylinder (seymour.snf.stanford.edu)
82: Re: Shutdown sts 2002-01-22 07:13:18: changing SiH4/N2 cylinder (seymour.snf.stanford.edu)
83: Shutdown sts 2002-01-23 08:16:55: needs testing after cylinder change (seymour.snf.stanford.edu)
84: Re: Shutdown sts 2002-01-23 08:16:55: needs testing after cylinder change (jhaydon.snf.stanford.edu)
85: Re: Shutdown sts 2002-01-23 08:16:55: needs testing after cylinder change (jhaydon.snf.stanford.edu)
86: Problem sts 2002-02-13 08:05:26: NO2 flow not stable (davehong.snf.stanford.edu)
87: Comment sts 2002-02-15 16:20:47: NO2 valve was closed (jperez.snf.stanford.edu)
88: Problem sts 2002-02-17 00:07:48: silane flow problem (kyang.snf.stanford.edu)
89: Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today (booth.snf.stanford.edu)
90: Comment sts 2002-02-20 09:10:27: Noted on PECVD, wrong machine, should be etcher (sguan.snf.stanford.edu)
91: Re: Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today (jperez.snf.stanford.edu)
92: Problem sts 2002-03-11 18:20:19: STS ammonia flow (wistey.snf.stanford.edu)
93: Comment sts 2002-03-11 22:15:24: NH3 mfc is bad. can't control setpoint (cbaxter.snf.stanford.edu)
94: Problem sts 2002-03-12 13:08:40: Ammonia flow error (raldaz.snf.stanford.edu)
95: Shutdown sts 2002-03-14 06:56:25: checking ammonia system (seymour.snf.stanford.edu)
96: Re: Shutdown sts 2002-03-14 06:56:25: checking ammonia system (seymour.snf.stanford.edu)
97: Re: Problem sts 2002-03-12 13:08:40: Ammonia flow error (seymour.snf.stanford.edu)
98: Re: Problem sts 2002-03-11 18:20:19: STS ammonia flow (seymour.snf.stanford.edu)
99: Shutdown sts 2002-03-21 07:33:05: Changing Silane/bal N2 cylinger (seymour.snf.stanford.edu)

---