Threads for March 2000

March 2000

• [1] Problem stsetch: elaheh
• [1] Shutdown stsetch: C4F8 flow appears restricted. Keith checked and there is gas. Tried to swich to secondary C4F8 mfc, but did not help. Chamber pressure varies from5mT to 80. C4F8 flow goes from10 to 100sccm and all
• [1] Shutdown stsetch: See above. This message is to try to turn the little light red.
• [1] Shutdown stsetch: C4F8 gas line drained. Tested programs. Seem to be ok.
• [1] Shutdown stsetch: see above comments
• [1] Problem stsetch: test of problem reporting
• [1] Problem stsetch: cleared - test# 99.
• [1] Shutdown stsetch: Waiting for SF6
• [1] Shutdown stsetch: See above
• [1] Shutdown stsetch: SF6 replaced
• [1] Shutdown stsetch: SF6 here
• [1] Shutdown stsetch: Shutdown - cannot vent LoadLock.
• [1] Shutdown stsetch: cleared Shutdown - restarted LLC.
• [1] Problem stsetch: wafer stuck in chamber, lock chamber pump again???
• [1] Shutdown stsetch: Pumps are shutdown (wafer in proc chamber)
• [1] Problem Clear stsetch: Nancy told user to run it.
• [3] Shutdown Clear stsetch:
• [1] Shutdown stsetch: wafer broken in chamber
• [1] Shutdown Clear stsetch: clearing shutdown on stsetcher
• [1] Shutdown stsetch: System shutdown after 50 minutes of etching, both roughing and turbo pump are off, wafer still in chamber
• [1] Shutdown Clear stsetch: cleared shutdown on STS etcher
• [1] Shutdown stsetch: shutdown on O2clean re-start test, pruitt's wafer in chamber

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