Messages 0xx


01: Problem stsetch: elaheh ((none))
02: Shutdown stsetch: C4F8 flow appears restricted. Keith checked and there is gas. Tried to swich to secondary C4F8 mfc, but did not help. Chamber pressure varies from5mT to 80. C4F8 flow goes from10 to 100sccm and all ((none))
03: Shutdown stsetch: See above. This message is to try to turn the little light red. ((none))
04: Shutdown stsetch: C4F8 gas line drained. Tested programs. Seem to be ok. ((none))
05: Shutdown stsetch: see above comments ((none))
06: Problem stsetch: test of problem reporting ((none))
07: Problem stsetch: cleared - test# 99. ((none))
08: Shutdown stsetch: Waiting for SF6 ((none))
09: Shutdown stsetch: See above ((none))
10: Shutdown stsetch: SF6 replaced ((none))
11: Shutdown stsetch: SF6 here ((none))
12: Shutdown stsetch: Shutdown - cannot vent LoadLock. ((none))
13: Shutdown stsetch: cleared Shutdown - restarted LLC. ((none))
14: Problem stsetch: wafer stuck in chamber, lock chamber pump again??? ((none))
15: Shutdown stsetch: Pumps are shutdown (wafer in proc chamber) ((none))
16: Problem Clear stsetch: Nancy told user to run it. ((none))
17: Shutdown Clear stsetch: ((none))
18: Shutdown stsetch: wafer broken in chamber ((none))
19: Shutdown Clear stsetch: clearing shutdown on stsetcher ((none))
20: Shutdown stsetch: System shutdown after 50 minutes of etching, both roughing and turbo pump are off, wafer still in chamber ((none))
21: Shutdown Clear stsetch: cleared shutdown on STS etcher ((none))
22: Shutdown stsetch: shutdown on O2clean re-start test, pruitt's wafer in chamber ((none))
23: Shutdown Clear stsetch: STS ok. ((none))
24: Problem stsetch: communications error (franklin.snf.stanford.edu)
25: Problem stsetch: clarification on stsetch (franklin.snf.stanford.edu)
26: Problem Clear stsetch: restarted control software (booth.snf.stanford.edu)
27: Problem Clear stsetch: restarted control software. (booth.snf.stanford.edu)
28: Shutdown stsetch: Wafer robot problem...failed to pickup during unload (sjlee.snf.stanford.edu)
29: Shutdown stsetch: (cbaxter.snf.stanford.edu)
30: Shutdown Clear stsetch: removed transfer belt and manually transfer arm out from the chmabr (cbaxter.snf.stanford.edu)
31: Shutdown Clear stsetch: (cbaxter.snf.stanford.edu)
32: Shutdown stsetch: stsfailure (franklin.snf.stanford.edu)
33: Shutdown Clear stsetch: removed wafer from STS (booth.snf.stanford.edu)
34: Shutdown stsetch: stsetch load arm stuck!!! (franklin.snf.stanford.edu)
35: Shutdown Clear stsetch: repaired wafer transport drive. (booth.snf.stanford.edu)
36: Shutdown stsetch: (chcheng.snf.stanford.edu)
37: Shutdown Clear stsetch: removed wafer & restarted machine. (booth.snf.stanford.edu)
38: Shutdown stsetch: gate valve error (emc.snf.stanford.edu)
39: Shutdown Clear stsetch: New LoadLock controller etc. installed!. (booth.snf.stanford.edu)
40: Problem stsetch: sts etch software problem (kotovsky.snf.stanford.edu)
41: Problem Clear stsetch: software was reset earlier today (cbaxter.snf.stanford.edu)
42: Problem stsetch: die in sts chamber (pruitt.snf.stanford.edu)
43: Shutdown stsetch: die in chamber (pruitt.snf.stanford.edu)
44: Shutdown Clear stsetch: removed pieces (booth.snf.stanford.edu)
45: Problem Clear stsetch: (booth.snf.stanford.edu)
46: Problem stsetch: (zhang.snf.stanford.edu)
47: Problem Clear stsetch: had to re-boot the PC. (booth.snf.stanford.edu)
48: Shutdown stsetch: Chiller in basemsnt malfuctioned- platen RF not responding. (latta.snf.stanford.edu)
49: Shutdown Clear stsetch: changed flow meter... (cbaxter.snf.stanford.edu)
50: Shutdown stsetch: Interlock tripped, turbo pump slowed down (chcheng.snf.stanford.edu)
51: Shutdown stsetch: system shutdown, no power to the turbo controller and system won't communicate.. (cbaxter.snf.stanford.edu)
52: Shutdown Clear stsetch: rebooth and remove wafer from chamber (cbaxter.snf.stanford.edu)
53: Shutdown Clear stsetch: rebooth system... (cbaxter.snf.stanford.edu)
54: Shutdown stsetch: Out of C4F8. (latta.snf.stanford.edu)
55: Shutdown Clear stsetch: C4F8 cylinder replaced! (latta.snf.stanford.edu)
56: Problem stsetch: wafer stuck in loadlock (jac.snf.stanford.edu)
57: Problem Clear stsetch: Len added oil, rebooted system. (latta.snf.stanford.edu)
58: Problem stsetch: (mourlas.snf.stanford.edu)
59: Problem Clear stsetch: cleaned out broken wafer. (booth.snf.stanford.edu)
60: Problem stsetch: Main window for multiplex closed.Searching for the right icon to open cause screen lockup. (caudillo.snf.stanford.edu)
61: Problem Clear stsetch: restarted system software. (booth.snf.stanford.edu)
62: Comment stsetch: Gen. Fault occured.Len reset. (caudillo.snf.stanford.edu)
63: Shutdown stsetch: FAILED Gate open Alarm. Wafer in Chmbr. (caudillo.snf.stanford.edu)
64: Shutdown Clear stsetch: rebooted plant & control software. OK (booth.snf.stanford.edu)
65: Problem stsetch: (zhang.snf.stanford.edu)
66: Problem Clear stsetch: (latta.snf.stanford.edu)
67: Shutdown stsetch: (chcheng.snf.stanford.edu)
68: Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed. (latta.snf.stanford.edu)
69: Shutdown stsetch: Pumpdown time exceeded message. Tried re-booting PC several times- no joy. Will not vent loadlock. (latta.snf.stanford.edu)
70: Shutdown Clear stsetch: rebooted plant. (booth.snf.stanford.edu)
71: Shutdown stsetch: Turbo shutdown again,needs rebooting (caudillo.snf.stanford.edu)
72: Shutdown Clear stsetch: rebooted plant - unloaded wafer. (booth.snf.stanford.edu)
73: Problem stsetch: Can't open recipe; Error reads- General protection fault in module RE-EXE at 008.0933 (latta.snf.stanford.edu)
74: Problem Clear stsetch: restarted windows. Editor seems OK. (booth.snf.stanford.edu)
75: Problem stsetch: Recipe locked up again.... machine is functional, though (latta.snf.stanford.edu)
76: Problem Clear stsetch: rebooted windows again. (booth.snf.stanford.edu)
77: Shutdown stsetch: software is not working. (booth.snf.stanford.edu)
78: Shutdown Clear stsetch: Dennis from STS deleted DEEP recipe which removed error. Recipe re-written. (latta.snf.stanford.edu)
79: Shutdown stsetch: Load lock will not vent. (latta.snf.stanford.edu)
80: Shutdown Clear stsetch: rebooth system and vented load lock.. (cbaxter.snf.stanford.edu)
81: Shutdown stsetch: need to add oil to pump. (booth.snf.stanford.edu)
82: Shutdown Clear stsetch: recycled oil into pump. (booth.snf.stanford.edu)
83: Shutdown stsetch: Generator swich on wrong scale (latta.snf.stanford.edu)
84: Shutdown Clear stsetch: rebooth system (cbaxter.snf.stanford.edu)
85: Shutdown stsetch: ICP interlock failure, turbo spun down, wafer stuck in (aaronp.snf.stanford.edu)
86: Shutdown Clear stsetch: removed wafer & restarted machine. (booth.snf.stanford.edu)
87: Shutdown stsetch: short shutdown for maintenance. (booth.snf.stanford.edu)
88: Shutdown Clear stsetch: checked oil in turbo pump. (booth.snf.stanford.edu)
89: Shutdown stsetch: turbo shut down (aaronp.snf.stanford.edu)
90: Shutdown Clear stsetch: rebuilt forline safety valve. (booth.snf.stanford.edu)
91: Shutdown stsetch: (ukris.snf.stanford.edu)
92: Shutdown Clear stsetch: (cbaxter.snf.stanford.edu)
93: Problem stsetch: turbo quit during run (ericp.snf.stanford.edu)
94: Shutdown stsetch: (flannery.snf.stanford.edu)
95: Problem Clear stsetch: restarted software. (latta.snf.stanford.edu)
96: Shutdown Clear stsetch: restarted software. (latta.snf.stanford.edu)
97: Shutdown stsetch: Turbo (flannery.snf.stanford.edu)
98: Shutdown Clear stsetch: rreset loadlock & restarted software, removed wafer. (booth.snf.stanford.edu)
99: Shutdown stsetch: Gate open error- turbo winding down. (latta.snf.stanford.edu)