stsetch-pcs@snf.stanford.edu: 2737: Re: Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload

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Subject: Re: Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload
From: eenriquez@snf.stanford.edu

Recovered the user's wafer, cleaned the chamber and ran O2 plasma.  Cycled wafers with
no problems.

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