Messages 0xx

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01: Problem svgdev: svgdev problem ((none))
02: Problem svgdev: ((none))
03: Problem Clear svgdev: ((none))
04: Problem Clear svgdev: Problem repaired ((none))
05: Problem svgdev: input loader doesn't start (sminne.snf.stanford.edu)
06: Problem Clear svgdev: (martinez.snf.stanford.edu)
07: Problem svgdev: no 26W resist (aaronp.snf.stanford.edu)
08: Problem Clear svgdev: developer (prisbe.snf.stanford.edu)
09: Problem Clear svgdev: no problem found (prisbe.snf.stanford.edu)
10: Problem svgdev: smashed my wafer (crozier.snf.stanford.edu)
11: Problem svgdev: (crozier.snf.stanford.edu)
12: Problem Clear svgdev: (vilanova.snf.stanford.edu)
13: Problem Clear svgdev: (vilanova.snf.stanford.edu)
14: Problem svgdev: (amycc.snf.stanford.edu)
15: Problem Clear svgdev: (martinez.snf.stanford.edu)
16: Shutdown svgdev: svgdev (martinez.snf.stanford.edu)
17: Shutdown Clear svgdev: clear dev (martinez.snf.stanford.edu)
18: Shutdown svgdev: (grupp.snf.stanford.edu)
19: Shutdown svgdev: clear dev (martinez.snf.stanford.edu)
20: Problem svgdev: No developer spray (amol.snf.stanford.edu)
21: Problem svgdev: Developer Added (vilanova.snf.stanford.edu)
22: Problem svgdev: svgdev (mcp.snf.stanford.edu)
23: Problem svgdev: No Problem Found ok to use (vilanova.snf.stanford.edu)
24: Problem svgdev 2000-12-15 09:59:39: CHUCK IS UNEVEN, NON UNIFORM DEVELOPING (manjot.snf.stanford.edu)
25: Shutdown svgdev 2000-12-15 10:00:56: (manjot.snf.stanford.edu)
26: Re: Shutdown svgdev 2000-12-15 10:00:56: clear svgdev (martinez.snf.stanford.edu)
27: Re: Problem svgdev 2000-12-15 09:59:39: clear svgdev (martinez.snf.stanford.edu)
28: Problem svgdev 2001-01-10 10:15:07: dev has problem sensing wafer; wafer fell off of 'rail' during bake (dhelqaq.snf.stanford.edu)
29: Re: Problem svgdev 2001-01-10 10:15:07: dev has problem sensing wafer; wafer fell off of 'rail' during bake (vilanova.snf.stanford.edu)
30: Shutdown svgdev 2001-01-17 16:59:28: Neutralization system down (latta.snf.stanford.edu)
31: Re: Shutdown svgdev 2001-01-17 16:59:28: Neutralization system down (shott.snf.stanford.edu)
32: Problem svgdev 2001-02-17 20:17:46: The sensor on the spinner is out of whack: when a wafer gets onto the spinner chuck, the system does not detect it and thus developer never gets onto the wafer. (mbadi.snf.stanford.edu)
33: Re: Problem svgdev 2001-02-17 20:17:46: The sensor on the spinner is out of whack: when a wafer gets onto the spinner chuck, the system does not detect it and thus developer never gets onto the wafer. (vilanova.snf.stanford.edu)
34: Problem svgdev 2001-03-25 17:33:33: Auto mode fails (lgx.snf.stanford.edu)
35: Re: Problem svgdev 2001-03-25 17:33:33: Auto mode Ok, User Error (vilanova.snf.stanford.edu)
36: Problem svgdev 2001-03-29 17:17:56: vacuum chuck not sensing wafer always (hansen.snf.stanford.edu)
37: Re: Problem svgdev 2001-03-29 17:17:56: tested , No problem found ,ok to use (vilanova.snf.stanford.edu)
38: Problem svgdev 2001-04-11 18:37:20: developer not dispensing properly (kjliu.snf.stanford.edu)
39: Re: Problem svgdev 2001-04-11 18:37:20: developer not dispensing properly (vilanova.snf.stanford.edu)
40: Problem svgdev 2001-05-16 12:59:01: svg2 (suzanne.snf.stanford.edu)
41: Problem svgdev 2001-05-16 17:54:51: chuck not centered while spinning (balaji.snf.stanford.edu)
42: Re: Problem svgdev 2001-05-16 17:54:51: chuck not centered while spinning (mahnaz.snf.stanford.edu)
43: Re: Problem svgdev 2001-05-16 12:59:01: svg2 (martinez.snf.stanford.edu)
44: Problem svgdev 2001-06-22 09:59:31: Does not develope wafer properly (amol.snf.stanford.edu)
45: Re: Problem svgdev 2001-06-22 09:59:31: Does not develope wafer properly (vilanova.snf.stanford.edu)
46: Shutdown svgdev 2001-06-26 16:29:54: spinner grinding (franklin.snf.stanford.edu)
47: Re: Shutdown svgdev 2001-06-26 16:29:54: spinner grinding (martinez.snf.stanford.edu)
48: Problem svgdev 2001-06-28 14:00:29: svgdev (fhj.snf.stanford.edu)
49: Shutdown svgdev 2001-06-29 14:28:10: we will get the motor Monday Morning (vilanova.snf.stanford.edu)
50: Re: Problem svgdev 2001-06-28 14:00:29: svgdev (vilanova.snf.stanford.edu)
51: Re: Shutdown svgdev 2001-06-29 14:28:10: we will get the motor Monday Morning (vilanova.snf.stanford.edu)
52: Shutdown svgdev 2001-07-09 12:07:41: developer (dtchang.snf.stanford.edu)
53: Re: Shutdown svgdev 2001-07-09 12:07:41: developer (martinez.snf.stanford.edu)
54: Problem svgdev 2001-07-14 01:43:50: AUTO doesn't work (mbartsch.snf.stanford.edu)
55: Re: Problem svgdev 2001-07-14 01:43:50: AUTO doesn't work (vilanova.snf.stanford.edu)
56: Problem svgdev 2001-08-03 12:45:43: (crozier.snf.stanford.edu)
57: Re: Problem svgdev 2001-08-03 12:45:43: Developer Added to Canister (vilanova.snf.stanford.edu)
58: Problem svgdev 2001-08-06 11:31:36: svgdev (njensen.snf.stanford.edu)
59: Re: Problem svgdev 2001-08-06 11:31:36: svgdev (martinez.snf.stanford.edu)
60: Problem svgdev 2001-08-06 22:39:56: broken wafer in spinner (hopcroft.snf.stanford.edu)
61: Re: Problem svgdev 2001-08-06 22:39:56: broken wafer in spinner (vilanova.snf.stanford.edu)
62: Problem svgdev 2001-09-04 23:10:13: does not complete frosty wafer routine (sjain.snf.stanford.edu)
63: Re: Problem svgdev 2001-09-04 23:10:13: does not complete frosty wafer routine (mahnaz.snf.stanford.edu)
64: Problem svgdev 2001-09-11 11:55:39: transfer stop (jhsim.snf.stanford.edu)
65: Re: Problem svgdev 2001-09-11 11:55:39: transfer stop (martinez.snf.stanford.edu)
66: Problem svgdev 2001-10-17 17:31:14: stuck (true.snf.stanford.edu)
67: Re: Problem svgdev 2001-10-17 17:31:14: stuck (vilanova.snf.stanford.edu)
68: Problem svgdev 2001-10-25 16:23:01: sensors/hotplate not working properly (true.snf.stanford.edu)
69: Re: Problem svgdev 2001-10-25 16:23:01: sensors/hotplate not working properly (vilanova.snf.stanford.edu)
70: Problem svgdev 2001-10-30 14:46:19: sensors on hotplate don't seem to be working (true.snf.stanford.edu)
71: Re: Problem svgdev 2001-10-30 14:46:19: sensors on hotplate don't seem to be working (martinez.snf.stanford.edu)
72: Problem svgdev 2001-10-31 12:23:02: wafer broke in dev (gyama.snf.stanford.edu)
73: Re: Problem svgdev 2001-10-31 12:23:02: wafer broke in dev (vilanova.snf.stanford.edu)
74: Problem svgdev 2001-11-02 18:23:29: no di water! (rjchen.snf.stanford.edu)
75: Re: Problem svgdev 2001-11-02 18:23:29: no di water! (vilanova.snf.stanford.edu)
76: Problem svgdev 2001-11-26 22:39:48: a piece of wafer broke (dton.snf.stanford.edu)
77: Re: Problem svgdev 2001-11-26 22:39:48: a piece of wafer broke (vilanova.snf.stanford.edu)
78: Problem svgdev 2001-12-18 22:40:58: Broken wafer (song.snf.stanford.edu)
79: Re: Problem svgdev 2001-12-18 22:40:58: Broken wafer (vilanova.snf.stanford.edu)
80: Problem svgdev 2002-01-18 18:02:03: Vacuum loss on the hotplate - Alarms (pzwahlen.snf.stanford.edu)
81: Re: Problem svgdev 2002-01-18 18:02:03: Vacuum loss on the hotplate - Alarms (vilanova.snf.stanford.edu)
82: Problem svgdev 2002-03-05 10:48:49: weekly PM in progress (vilanova.snf.stanford.edu)
83: Re: Problem svgdev 2002-03-05 10:48:49: weekly PM in progress (vilanova.snf.stanford.edu)
84: Problem svgdev 2002-03-12 20:59:38: wafer ejected off of track (wliu.snf.stanford.edu)
85: Re: Problem svgdev 2002-03-12 20:59:38: wafer ejected off of track (martinez.snf.stanford.edu)
86: Comment svgdev 2002-03-14 10:02:31: PM In progress (vilanova.snf.stanford.edu)
87: Comment svgdev 2002-03-14 10:50:24: Preventive maintenance Finished (vilanova.snf.stanford.edu)
88: Shutdown svgdev 2002-03-25 13:29:45: Pm In progress (vilanova.snf.stanford.edu)
89: Re: Shutdown svgdev 2002-03-25 13:29:45: Pm In progress (vilanova.snf.stanford.edu)
90: Problem svgdev 2002-04-10 21:31:05: Wafer feed station does not work. (sguan.snf.stanford.edu)
91: Re: Problem svgdev 2002-04-10 21:31:05: Wafer feed station does not work. (vilanova.snf.stanford.edu)
92: Shutdown svgdev 2002-04-11 07:38:21: Weekly Pm In Progress (vilanova.snf.stanford.edu)
93: Re: Shutdown svgdev 2002-04-11 07:38:21: Weekly Pm In Progress (vilanova.snf.stanford.edu)
94: Shutdown svgdev 2002-04-12 07:36:23: water leak (martinez.snf.stanford.edu)
95: Re: Shutdown svgdev 2002-04-12 07:36:23: water leak (martinez.snf.stanford.edu)
96: Shutdown svgdev 2002-04-16 07:41:55: preventive maintenance in progress (vilanova.snf.stanford.edu)
97: Re: Shutdown svgdev 2002-04-16 07:41:55: preventive maintenance in progress (vilanova.snf.stanford.edu)
98: Re: Shutdown svgdev 2002-04-16 07:41:55: preventive maintenance in progress (vilanova.snf.stanford.edu)
99: Shutdown svgdev 2002-04-23 07:58:07: Preventive maintenance In progress (vilanova.snf.stanford.edu)

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