Messages 0xx

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01: Problem svgdev2: wafer does not get pulled down into developer ((none))
02: Problem Clear svgdev2: ((none))
03: Problem svgdev2: problem in feeding the wafers to the developer ((none))
04: Problem Clear svgdev2: Problem repaired ((none))
05: Problem svgdev2: (amol.snf.stanford.edu)
06: Problem svgdev2: (amol.snf.stanford.edu)
07: Problem Clear svgdev2: (martinez.snf.stanford.edu)
08: Problem Clear svgdev2: (martinez.snf.stanford.edu)
09: Problem svgdev2: wafer sat at spin-did not go down (phimmer.snf.stanford.edu)
10: Problem Clear svgdev2: (martinez.snf.stanford.edu)
11: Problem svgdev2: (mtang.snf.stanford.edu)
12: Problem Clear svgdev2: (martinez.snf.stanford.edu)
13: Problem svgdev2: input loader doesn't start (sminne.snf.stanford.edu)
14: Problem Clear svgdev2: (martinez.snf.stanford.edu)
15: Problem svgdev2: no 26W resist (aaronp.snf.stanford.edu)
16: Problem Clear svgdev2: developer (prisbe.snf.stanford.edu)
17: Problem svgdev2: Loader cassette does not send wafer to developer station. (amol.snf.stanford.edu)
18: Problem Clear svgdev2: Mario tested the system is ok (mahnaz.snf.stanford.edu)
19: Problem svgdev2: wont raise chuck to wafer (lindaw.snf.stanford.edu)
20: Problem Clear svgdev2: (martinez.snf.stanford.edu)
21: Shutdown svgdev2: developer track is stuck (greene.snf.stanford.edu)
22: Shutdown Clear svgdev2: (martinez.snf.stanford.edu)
23: Problem svgdev2: (zhang.snf.stanford.edu)
24: Problem Clear svgdev2: (martinez.snf.stanford.edu)
25: Problem svgdev2: Broke my wafer (sanli.snf.stanford.edu)
26: Problem Clear svgdev2: (martinez.snf.stanford.edu)
27: Problem svgdev2: won't develop, sensor broke (franklin.snf.stanford.edu)
28: Problem Clear svgdev2: (martinez.snf.stanford.edu)
29: Problem svgdev2: vacuum on chuck not working (phimmer.snf.stanford.edu)
30: Problem Clear svgdev2: (vilanova.snf.stanford.edu)
31: Problem svgdev2: svgdev2 problem (sverdrup.snf.stanford.edu)
32: Problem svgdev2: (beckwith.snf.stanford.edu)
33: Problem Clear svgdev2: (vilanova.snf.stanford.edu)
34: Problem Clear svgdev2: (vilanova.snf.stanford.edu)
35: Problem svgdev2: sensors not working properly (true.snf.stanford.edu)
36: Problem Clear svgdev2: (martinez.snf.stanford.edu)
37: Problem svgdev2: chuck does not come all the way up; wafer sits there, needs manual finger assist...solenide problem? (greene.snf.stanford.edu)
38: Problem Clear svgdev2: (vilanova.snf.stanford.edu)
39: Shutdown svgdev2: (vilanova.snf.stanford.edu)
40: Shutdown Clear svgdev2: (martinez.snf.stanford.edu)
41: Problem svgdev2: Sensor (flannery.snf.stanford.edu)
42: Problem Clear svgdev2: (martinez.snf.stanford.edu)
43: Problem svgdev2: (grupp.snf.stanford.edu)
44: Problem Clear svgdev2: svgdev2 clear (martinez.snf.stanford.edu)
45: Shutdown svgdev2: shutdown this track (martinez.snf.stanford.edu)
46: Shutdown Clear svgdev2: replaced belts, tested ok to use (vilanova.snf.stanford.edu)
47: Problem svgdev2: sensor on load station (ericp.snf.stanford.edu)
48: Problem Clear svgdev2: npf (martinez.snf.stanford.edu)
49: Problem svgdev2: loss of wafer vac (franklin.snf.stanford.edu)
50: Problem svgdev2: Weekly PM Performed, Working Ok , ready to use (vilanova.snf.stanford.edu)
51: Shutdown svgdev2 2001-01-17 17:00:07: Neutralization system down (latta.snf.stanford.edu)
52: Re: Shutdown svgdev2 2001-01-17 17:00:07: Neutralization system down (shott.snf.stanford.edu)
53: Problem svgdev2 2001-02-07 10:09:30: 5k rpm spin dry making a high pitch squeal (lindaw.snf.stanford.edu)
54: Re: Problem svgdev2 2001-02-07 10:09:30: 5k rpm spin dry making a high pitch squeal (vilanova.snf.stanford.edu)
55: Problem svgdev2 2001-03-21 10:15:43: stops during develop (franklin.snf.stanford.edu)
56: Re: Problem svgdev2 2001-03-21 10:15:43: Chuck out of position, Cleaned tested ok to use (vilanova.snf.stanford.edu)
57: Problem svgdev2 2001-03-25 17:33:01: Auto mode fails (lgx.snf.stanford.edu)
58: Re: Problem svgdev2 2001-03-25 17:33:01: Auto Mode Working Ok, User Error (vilanova.snf.stanford.edu)
59: Problem svgdev2 2001-05-16 12:59:45: svgdev (suzanne.snf.stanford.edu)
60: Re: Problem svgdev2 2001-05-16 12:59:45: svgdev (mahnaz.snf.stanford.edu)
61: Problem svgdev2 2001-05-18 10:11:38: svg2 (suzanne.snf.stanford.edu)
62: Shutdown svgdev2 2001-05-18 10:51:59: Developper nozzle is splashing developper randomly (pzwahlen.snf.stanford.edu)
63: Re: Shutdown svgdev2 2001-05-18 10:51:59: Developper nozzle is splashing developper randomly (martinez.snf.stanford.edu)
64: Re: Problem svgdev2 2001-05-18 10:11:38: svg2 (martinez.snf.stanford.edu)
65: Problem svgdev2 2001-06-06 12:25:01: rinse doesn't come on sometimes (grupp.snf.stanford.edu)
66: Comment svgdev2 2001-06-06 14:53:35: Gasket (vilanova.snf.stanford.edu)
67: Re: Problem svgdev2 2001-06-06 12:25:01: rinse doesn't come on sometimes (vilanova.snf.stanford.edu)
68: Problem svgdev2 2001-07-13 14:21:02: My thin wafer broke and ... (dton.snf.stanford.edu)
69: Re: Problem svgdev2 2001-07-13 14:21:02: My thin wafer broke and ... (vilanova.snf.stanford.edu)
70: Problem svgdev2 2001-08-03 13:01:40: leaves dev on backside (gyama.snf.stanford.edu)
71: Problem svgdev2 2001-08-06 01:15:35: Dribbling (fama.snf.stanford.edu)
72: Re: Problem svgdev2 2001-08-03 13:01:40: leaves dev on backside (vilanova.snf.stanford.edu)
73: Re: Problem svgdev2 2001-08-06 01:15:35: Dribbling (vilanova.snf.stanford.edu)
74: Problem svgdev2 2001-09-05 12:16:00: Splash (frankliu.snf.stanford.edu)
75: Problem svgdev2 2001-09-05 12:21:35: Splash II (frankliu.snf.stanford.edu)
76: Re: Problem svgdev2 2001-09-05 12:21:35: Splash II (martinez.snf.stanford.edu)
77: Re: Problem svgdev2 2001-09-05 12:16:00: Splash (martinez.snf.stanford.edu)
78: Problem svgdev2 2001-11-02 18:22:55: no di water! (rjchen.snf.stanford.edu)
79: Re: Problem svgdev2 2001-11-02 18:22:55: no di water! (vilanova.snf.stanford.edu)
80: Problem svgdev2 2001-11-15 12:07:33: It didn't spin. (wada.snf.stanford.edu)
81: Problem svgdev2 2001-12-06 11:02:40: Motor is not spinning at low rpm (pzwahlen.snf.stanford.edu)
82: Re: Problem svgdev2 2001-12-06 11:02:40: Motor is not spinning at low rpm (vilanova.snf.stanford.edu)
83: Problem svgdev2 2002-01-03 12:53:57: Receiver Index is not working (dton.snf.stanford.edu)
84: Re: Problem svgdev2 2002-01-03 12:53:57: Receiver Index is not working (martinez.snf.stanford.edu)
85: Problem svgdev2 2002-02-01 06:55:27: send elevator acts flaky (ibrahim.snf.stanford.edu)
86: Re: Problem svgdev2 2002-02-01 06:55:27: send elevator acts flaky (vilanova.snf.stanford.edu)
87: Problem svgdev2 2002-02-25 11:46:07: back of wafer coming out wet (ejwong.snf.stanford.edu)
88: Re: Problem svgdev2 2002-02-25 11:46:07: back of wafer coming out wet (vilanova.snf.stanford.edu)
89: Shutdown svgdev2 2002-02-26 16:33:04: wafer broken at development station (kyang.snf.stanford.edu)
90: Re: Shutdown svgdev2 2002-02-26 16:33:04: wafer broken at development station (vilanova.snf.stanford.edu)
91: Problem svgdev2 2002-03-12 16:48:48: Stop in the mid process (yongli.snf.stanford.edu)
92: Re: Problem svgdev2 2002-03-12 16:48:48: Stop in the mid process (martinez.snf.stanford.edu)
93: Shutdown svgdev2 2002-03-26 10:40:40: PM In Progress (vilanova.snf.stanford.edu)
94: Re: Shutdown svgdev2 2002-03-26 10:40:40: PM In Progress (vilanova.snf.stanford.edu)
95: Shutdown svgdev2 2002-04-12 07:36:11: water leak (martinez.snf.stanford.edu)
96: Re: Shutdown svgdev2 2002-04-12 07:36:11: water leak (martinez.snf.stanford.edu)
97: Problem svgdev2 2002-04-14 11:12:03: dev spinner won't spin (bhalotra.snf.stanford.edu)
98: Re: Problem svgdev2 2002-04-14 11:12:03: dev spinner won't spin (vilanova.snf.stanford.edu)
99: Shutdown svgdev2 2002-04-22 12:35:33: traction belts are broken (sanli.snf.stanford.edu)

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