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Subject: Re: Problem svgdev2 SNF 2012-09-27 19:07:42: Frequently freezes when wafer gets accepted by develop chuck
From: vilanova@snf.stanford.edu 
Cleaned and Lubricated Air Cylinder, Tested  a few times
during the morning and afternoon, Cycled all the dummy wafers, 
System Back to normal , Ok to use.
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