Messages 0xx

---

01: Problem tylan3: Back up t/c needs replacing ((none))
02: Problem tylan3: Tylan3 small b ((none))
03: Problem Clear tylan3: ok now. (latta.snf.stanford.edu)
04: Problem tylan3: N2 MFS alarm continuously (lindaw.snf.stanford.edu)
05: Problem Clear tylan3: reset mfs 460 (gaul.snf.stanford.edu)
06: Shutdown tylan3: (mcp.snf.stanford.edu)
07: Shutdown Clear tylan3: Adjusted cantilever bearings (gaul.snf.stanford.edu)
08: Shutdown tylan3: quart plug off center. Tube stuck in out position. (bowers.snf.stanford.edu)
09: Shutdown Clear tylan3: (seymour.snf.stanford.edu)
10: Problem tylan3: MFS Alarm (flannery.snf.stanford.edu)
11: Problem Clear tylan3: (seymour.snf.stanford.edu)
12: Problem tylan3: push/pull sticks (caudillo.snf.stanford.edu)
13: Problem tylan3: (grupp.snf.stanford.edu)
14: Problem tylan3: (davehong.snf.stanford.edu)
15: Problem Clear tylan3: Replaced with new boat. (jgarate.snf.stanford.edu)
16: Problem tylan3: steam may not have come on WET900A (price.snf.stanford.edu)
17: Problem tylan3: mfc prob. no steam 10/26 pm (price.snf.stanford.edu)
18: Problem Clear tylan3: H2 leak alarm reset zeroed H2 mfc (seymour.snf.stanford.edu)
19: Problem Clear tylan3: adjusted H2 alarm for MFC zero (seymour.snf.stanford.edu)
20: Problem Clear tylan3: (seymour.snf.stanford.edu)
21: Comment tylan3: need to replace loader bearings (seymour.snf.stanford.edu)
22: Shutdown tylan3: RAN WET1000 RECIPE BUT NO OXIDE GROWTH ON WAFERS (manjot.snf.stanford.edu)
23: Shutdown Clear tylan3: furnace is up (seymour.snf.stanford.edu)
24: Shutdown tylan3: backside baffle fell off. Tube remains out. (amol.snf.stanford.edu)
25: Shutdown Clear tylan3: baffel ok, doing tca clean now (seymour.snf.stanford.edu)
26: Shutdown tylan3: (seymour.snf.stanford.edu)
27: Shutdown tylan3: TCA Clean has been done. Back up for production!!!Date: Nov 16, 2000 7:05:33 AM (jgarate.snf.stanford.edu)
28: Problem tylan3: would not open automatically;had 2 open manually (dhelqaq.snf.stanford.edu)
29: Problem tylan3: MFS alarm went off (bottom O2 light blinking) (dhelqaq.snf.stanford.edu)
30: Problem tylan3: reset the alarm for mfc zero) (seymour.snf.stanford.edu)
31: Problem tylan3: MFS alarm continuously sounds (dhelqaq.snf.stanford.edu)
32: Problem tylan3 2001-01-21 01:55:01: Typical ox growth yielded 15A where it has always given 205A (Temp was correct) (dhelqaq.snf.stanford.edu)
33: Re: Problem tylan3 2000-10-12 13:00:31: push/pull sticks (seymour.snf.stanford.edu)
34: Re: Problem tylan3 2000-11-30 21:29:27: MFS alarm continuously sounds (seymour.snf.stanford.edu)
35: Re: Problem tylan3 2000-11-29 17:16:20: would not open automatically;had 2 open manually (seymour.snf.stanford.edu)
36: Re: Problem tylan3 2001-01-21 01:55:01: checked furnace operation. � (seymour.snf.stanford.edu)
37: Problem tylan3 2001-01-29 18:08:38: I did back-to-back runs; after the first run, the boat got stuck and only came out ~6 inches. Since I was running the same wafers through a different furnace program I put the boat back in and loaded (beckwith.snf.stanford.edu)
38: Problem tylan3 2001-02-01 12:35:37: MFS alarm is sounding. "Function 7" no one is using the tube. Pushing Alarm ACK does no good. (beckwith.snf.stanford.edu)
39: Re: Problem tylan3 2001-02-01 12:35:37: MFS alarm is sounding. "Function 7" no one is using the tube. Pushing Alarm ACK does no good. (seymour.snf.stanford.edu)
40: Re: Problem tylan3 2001-01-29 18:08:38: the boat got stuck and only came out ~6 inches. (seymour.snf.stanford.edu)
41: Problem tylan3 2001-03-12 14:01:20: Metal flakes from guide track (king.snf.stanford.edu)
42: Problem tylan3 2001-03-28 10:37:21: Sagging baffle- cracked source baffle too (latta.snf.stanford.edu)
43: Re: Problem tylan3 2001-03-28 10:37:21: Sagging baffle- have been replaced (seymour.snf.stanford.edu)
44: Re: Problem tylan3 2001-03-12 14:01:20: Metal flakes from guide track (seymour.snf.stanford.edu)
45: Comment tylan3 2001-04-24 13:26:53: tylan3 (plong.snf.stanford.edu)
46: Problem tylan3 2001-05-25 20:15:43: MFC alarm (gilbert.snf.stanford.edu)
47: Re: Problem tylan3 2001-05-25 20:15:43: MFC alarm (seymour.snf.stanford.edu)
48: Comment tylan3 2001-07-04 22:01:34: Do not need to use Tylan3 Thursday from 10-6 (jdas.snf.stanford.edu)
49: Problem tylan3 2001-07-09 21:22:04: loading/unloading does not work smoothly (davehong.snf.stanford.edu)
50: Problem tylan3 2001-07-18 16:01:47: tylan2 TEMPS has a backup tc problem (gladys.snf.stanford.edu)
51: Shutdown tylan3 2001-07-18 16:03:55: tylan3 tube is stuck (gladys.snf.stanford.edu)
52: Re: Problem tylan3 2001-07-18 16:01:47: tylan2 TEMPS has a backup tc problem (seymour.snf.stanford.edu)
53: Re: Shutdown tylan3 2001-07-18 16:03:55: tylan3 tube is stuck (seymour.snf.stanford.edu)
54: Re: Problem tylan3 2001-07-09 21:22:04: loading/unloading does not work smoothly (seymour.snf.stanford.edu)
55: Problem tylan3 2001-08-01 20:12:28: O2Lo alarm and center zone b (caudillo.snf.stanford.edu)
56: Problem tylan3 2001-08-02 16:42:36: tylan3:Tube stuck, manually pushed in. Gladys (gladys.snf.stanford.edu)
57: Problem tylan3 2001-08-07 10:10:54: tylan3:MFS O2 leak keeps going ON at standby/idle (gladys.snf.stanford.edu)
58: Shutdown tylan3 2001-08-13 11:57:04: working on the lo O2 alarm (seymour.snf.stanford.edu)
59: Re: Shutdown tylan3 2001-08-13 11:57:04: working on the lo O2 alarm (seymour.snf.stanford.edu)
60: Re: Problem tylan3 2001-08-07 10:10:54: tylan3:MFS O2 leak keeps going ON at standby/idle (seymour.snf.stanford.edu)
61: Re: Problem tylan3 2001-08-02 16:42:36: tylan3:Tube stuck, manually pushed in. Gladys (seymour.snf.stanford.edu)
62: Re: Problem tylan3 2001-08-01 20:12:28: O2Lo alarm and center zone b (seymour.snf.stanford.edu)
63: Problem tylan3 2001-08-15 16:11:10: had a tough time in moving the tube in (burra.snf.stanford.edu)
64: Re: Problem tylan3 2001-08-15 16:11:10: had a tough time in moving the tube in (seymour.snf.stanford.edu)
65: Problem tylan3 2001-08-22 12:36:17: uniformity (hsiung.snf.stanford.edu)
66: Re: Problem tylan3 2001-08-22 12:36:17: uniformity testrun was ok ..Gladys (gladys.snf.stanford.edu)
67: Problem tylan3 2001-09-11 16:01:22: keeps alarming: MFS alarm (beckwith.snf.stanford.edu)
68: Shutdown tylan3 2001-09-13 13:41:23: tylan3: prob with mfs every 5 min, wet900 run for 42 minuteshad no oxide growth (gladys.snf.stanford.edu)
69: Re: Shutdown tylan3 2001-09-13 13:41:23: tylan3: prob with mfs every 5 min, wet900 run for 42 minuteshad no oxide growth (seymour.snf.stanford.edu)
70: Re: Problem tylan3 2001-09-11 16:01:22: keeps alarming: MFS alarm (seymour.snf.stanford.edu)
71: Re: Problem tylan3 2001-09-05 15:09:34: Tylan#3 Lo O2 alarming (seymour.snf.stanford.edu)
72: Shutdown tylan3 2001-09-18 09:36:15: Growth test needs to be run. (gladys.snf.stanford.edu)
73: Re: Shutdown tylan3 2001-09-18 09:36:15: Growth test needs to be run. (gladys.snf.stanford.edu)
74: Shutdown tylan3 2001-09-19 10:29:33: Lo O2 alarms (seymour.snf.stanford.edu)
75: Re: Shutdown tylan3 2001-09-19 10:29:33: Lo O2 alarms (gladys.snf.stanford.edu)
76: Problem tylan3 2001-09-23 13:44:46: MFS Alarms common (greene.snf.stanford.edu)
77: Problem tylan3 2001-09-24 10:27:19: tylan3: continuous MFS alarm on LoO2 (gladys.snf.stanford.edu)
78: Shutdown tylan3 2001-09-26 11:59:08: H2 leak alarm (seymour.snf.stanford.edu)
79: Re: Shutdown tylan3 2001-09-26 11:59:08: H2 leak alarm: testrun was ok..Gladys (gladys.snf.stanford.edu)
80: Re: Problem tylan3 2001-09-24 10:27:19: tylan3: continuous MFS alarm : Cleared.. (gladys.snf.stanford.edu)
81: Re: Problem tylan3 2001-09-23 13:44:46: MFS Alarms common: cleared (gladys.snf.stanford.edu)
82: Shutdown tylan3 2001-11-07 09:44:19: tube can not come in (qwang.snf.stanford.edu)
83: Re: Shutdown tylan3 2001-11-07 09:44:19: tube can not come in (seymour.snf.stanford.edu)
84: Problem tylan3 2001-12-07 13:19:24: Tube 3 MFS Alarm [H2 led flashing] (jdas.snf.stanford.edu)
85: Re: Problem tylan3 2001-12-07 13:19:24: Tube 3 MFS Alarm [H2 led flashing] (seymour.snf.stanford.edu)
86: Problem tylan3 2001-12-12 10:51:00: MFS ERROR: 01 (gladys.snf.stanford.edu)
87: Re: Problem tylan3 2001-12-12 10:51:00: MFS ERROR: 01 (seymour.snf.stanford.edu)
88: Problem tylan3 2002-01-04 13:02:36: MFS alarm sounds continuously (greene.snf.stanford.edu)
89: Re: Problem tylan3 2002-01-04 13:02:36: MFS alarm sounds continuously (seymour.snf.stanford.edu)
90: Shutdown tylan3 2002-02-05 17:10:15: Tylan Bank 1 move (gladys.snf.stanford.edu)
91: Shutdown tylan3 2002-02-28 11:44:06: No loO2 flow faulty MFC (seymour.snf.stanford.edu)
92: Re: Shutdown tylan3 2002-02-05 17:10:15: Tylan Bank 1 move (latta.snf.stanford.edu)
93: Re: Shutdown tylan3 2002-02-28 11:44:06: No loO2 flow faulty MFC (latta.snf.stanford.edu)
94: Problem tylan3 2002-07-05 11:34:55: TCACLEAN due to possible glass contamination (ychliu.snf.stanford.edu)
95: Problem tylan3 2002-07-12 18:49:08: furnace didn't automatically unload when program was started (rcandler.snf.stanford.edu)
96: Re: Problem tylan3 2002-07-05 11:34:55: TCACLEAN due to possible glass contamination (seymour.snf.stanford.edu)
97: Problem tylan3 2002-07-23 12:23:26: The tube didn't come out automatically (hsiung.snf.stanford.edu)
98: Re: Problem tylan3 2002-07-23 12:23:26: The tube didn't come out automatically: tube came out ok (gladys.snf.stanford.edu)
99: Re: Problem tylan3 2002-07-12 18:49:08: furnace didn't automatically unload when program was started : testrun came out ok (gladys.snf.stanford.edu)

---