Thu, 18 Oct 2012 08:58:20 -0700
Yesterday afternoon our Toxic Gas monitoring system gave a fault for a silane monitoring
point. This fault means the system cannot collect information from the silane sensor
at that location. We have shutdown the tools using that silane line and shutoff the
gas at the cabinet. The tools that use this silane line will need to stay shutdown
until we can safely monitor it.
We will contact the field service for the TGO system this morning and hope to resolve
the issue today.
Look for an update on this issue later today.