Messages 0xx

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01: Shutdown tylanbpsg: Completed ((none))
02: Problem tylanbpsg: Uniformity check has not been completed ((none))
03: Problem tylanbpsg: Uniformity check completed. ((none))
04: Problem tylanbpsg: The process terminated due to high PRCPR ((none))
05: Problem tylanbpsg: lab down -- coral will not enable anything ((none))
06: Problem Clear tylanbpsg: back up again ((none))
07: Problem tylanbpsg: Proc Pressure during deposition (LTO350) continuously rises till > 1000. Then the deposition jumps to step 65 (as expected) ((none))
08: Problem Clear tylanbpsg: Removed inlet screen to pump ((none))
09: Problem tylanbpsg: Very few non-metal dummies. Had to clean dummies before I could use tube. ((none))
10: Problem Clear tylanbpsg: Dummy non metals (prisbe.snf.stanford.edu)
11: Problem tylanbpsg: Very high leak pressure. Probably due to the PSG deposition prior to my LTO350 (narya.snf.stanford.edu)
12: Problem tylanbpsg: leak? (emc.snf.stanford.edu)
13: Problem Clear tylanbpsg: cleaned door seal (gaul.snf.stanford.edu)
14: Problem Clear tylanbpsg: cleaned door seal (gaul.snf.stanford.edu)
15: Shutdown tylanbpsg: burnbox alarming (phimmer.snf.stanford.edu)
16: Shutdown Clear tylanbpsg: burnbox alarming (prisbe.snf.stanford.edu)
17: Shutdown tylanbpsg: (mokhberi.snf.stanford.edu)
18: Shutdown Clear tylanbpsg: Vacuum pump was low on oil. (gaul.snf.stanford.edu)
19: Shutdown tylanbpsg: SiH4 gas cylinder change (wheeler.snf.stanford.edu)
20: Shutdown tylanbpsg: shutdown for cleaning (gaul.snf.stanford.edu)
21: Shutdown Clear tylanbpsg: Cylinder changed (wheeler.snf.stanford.edu)
22: Shutdown Clear tylanbpsg: completed (gaul.snf.stanford.edu)
23: Problem tylanbpsg: "Metal" wand was on the floor, chipped/bent (mbartsch.snf.stanford.edu)
24: Problem Clear tylanbpsg: Wand replaced. (latta.snf.stanford.edu)
25: Comment tylanbpsg: Test. (latta.snf.stanford.edu)
26: Problem tylanbpsg: no deposition psg400 (phimmer.snf.stanford.edu)
27: Problem Clear tylanbpsg: completed (gaul.snf.stanford.edu)
28: Problem tylanbpsg: (sigari.snf.stanford.edu)
29: Problem tylanbpsg: Partices on lid (amol.snf.stanford.edu)
30: Problem Clear tylanbpsg: Normal for the deposition on the tube (gaul.snf.stanford.edu)
31: Problem Clear tylanbpsg: replaced injectors (gaul.snf.stanford.edu)
32: Problem tylanbpsg: (chcheng.snf.stanford.edu)
33: Problem tylanbpsg: Failed leak check (yiching.snf.stanford.edu)
34: Problem tylanbpsg: LTO450P failed stp45 lk chk twice and it disabled me from CORAL (caudillo.snf.stanford.edu)
35: Problem Clear tylanbpsg: Cleaned door seal (gaul.snf.stanford.edu)
36: Problem Clear tylanbpsg: Cleaned door seal (gaul.snf.stanford.edu)
37: Problem Clear tylanbpsg: Cleaned door seal (gaul.snf.stanford.edu)
38: Shutdown tylanbpsg: Shutdown for cleaning (gaul.snf.stanford.edu)
39: Shutdown tylanbpsg: Cleaning completed (gaul.snf.stanford.edu)
40: Shutdown Clear tylanbpsg: Cleaning completed (gaul.snf.stanford.edu)
41: Problem tylanbpsg: Boat In/Out steps need to be done manually (ejwong.snf.stanford.edu)
42: Shutdown Clear tylanbpsg: Cleaning completed (gaul.snf.stanford.edu)
43: Problem Clear tylanbpsg: fixed (gaul.snf.stanford.edu)
44: Shutdown Clear tylanbpsg: completed (gaul.snf.stanford.edu)
45: Shutdown Clear tylanbpsg: completed (gaul.snf.stanford.edu)
46: Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well (sanli.snf.stanford.edu)
47: Re: Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well (Keith Gaul)
48: Problem tylanbpsg: Leak check failed & MFS alarm (yiching.snf.stanford.edu)
49: Shutdown tylanbpsg: MFS alarm . Unable to pump down. (yiching.snf.stanford.edu)
50: Shutdown Clear tylanbpsg: replaced t/c sheath (gaul.snf.stanford.edu)
51: Problem Clear tylanbpsg: replaced t/c sheath (gaul.snf.stanford.edu)
52: Problem Clear tylanbpsg: replaced t/c/ sheath (gaul.snf.stanford.edu)
53: Shutdown tylanbpsg: prcpr to high on recipe psg400 8% (jgarate.snf.stanford.edu)
54: Shutdown Clear tylanbpsg: Removed inlet screen to pump (gaul.snf.stanford.edu)
55: Problem tylanbpsg: tube very dirty (yiching.snf.stanford.edu)
56: Problem Clear tylanbpsg: tube not at thickness for standard clean (seymour.snf.stanford.edu)
57: Shutdown tylanbpsg: Date: Nov 17, 2000 5:08:31 PM (utkan.snf.stanford.edu)
58: Comment tylanbpsg: starting tube clean (seymour.snf.stanford.edu)
59: Problem tylanbpsg: BPSG clean (seymour.snf.stanford.edu)
60: Comment tylanbpsg: bpsg status (seymour.snf.stanford.edu)
61: Re: Shutdown tylanbpsg 2000-11-17 17:08:29: (shott.snf.stanford.edu)
62: Re: Problem tylanbpsg 2000-12-08 14:48:26: BPSG clean (shott.snf.stanford.edu)
63: Problem tylanbpsg 2001-01-22 18:17:16: No deposition (anolley.snf.stanford.edu)
64: Re: Problem tylanbpsg 2001-01-22 18:17:16: Back up for production (jgarate.snf.stanford.edu)
65: Comment tylanbpsg 2001-02-02 09:31:40: Silane cylinder change on monday Feb 5 (seymour.snf.stanford.edu)
66: Shutdown tylanbpsg 2001-02-05 06:26:23: (seymour.snf.stanford.edu)
67: Re: Shutdown tylanbpsg 2001-02-05 06:26:23: Silane cylinder changed (seymour.snf.stanford.edu)
68: Problem tylanbpsg 2001-02-07 15:36:48: thia pertains to the entire bank: there are no overhead lights. It is REALLY difficult to load wafers in tylanbpsg! (beckwith.snf.stanford.edu)
69: Re: Problem tylanbpsg 2001-02-07 15:36:48: thia pertains to the entire bank: there are no overhead lights. It is REALLY difficult to load wafers in tylanbpsg! (jgarate.snf.stanford.edu)
70: Shutdown tylanbpsg 2001-03-05 06:03:48: burnbox clean (seymour.snf.stanford.edu)
71: Re: Shutdown tylanbpsg 2001-03-05 06:03:48: burnbox clean completed (seymour.snf.stanford.edu)
72: Problem tylanbpsg 2001-03-08 17:24:01: mos-clean wand (lindert.snf.stanford.edu)
73: Re: Problem tylanbpsg 2001-03-08 17:24:01: mos-clean wand is ok (seymour.snf.stanford.edu)
74: Problem tylanbpsg 2001-03-13 11:34:25: Front boat broken (latta.snf.stanford.edu)
75: Re: Problem tylanbpsg 2001-03-13 11:34:25: Front boat broken (Nancy Latta)
76: Shutdown tylanbpsg 2001-03-15 07:20:36: burnbox temp low (seymour.snf.stanford.edu)
77: Re: Shutdown tylanbpsg 2001-03-15 07:20:36: burnbox temp is up tube is up (seymour.snf.stanford.edu)
78: Re: Problem tylanbpsg 2001-03-13 11:34:25: Front boat replaced (seymour.snf.stanford.edu)
79: Shutdown tylanbpsg 2001-03-16 08:04:24: quatrtz clean in process (seymour.snf.stanford.edu)
80: Shutdown tylanbpsg 2001-03-16 08:04:55: (seymour.snf.stanford.edu)
81: Re: Shutdown tylanbpsg 2001-03-16 08:04:55: (seymour.snf.stanford.edu)
82: Re: Shutdown tylanbpsg 2001-03-16 08:04:24: quatrtz clean is completed (seymour.snf.stanford.edu)
83: Shutdown tylanbpsg 2001-03-20 07:48:49: needs to be coated and tested (seymour.snf.stanford.edu)
84: Re: Shutdown tylanbpsg 2001-03-20 07:48:49: needs to be coated and tested (seymour.snf.stanford.edu)
85: Shutdown tylanbpsg 2001-03-21 14:26:44: needs characterization (seymour.snf.stanford.edu)
86: Re: Shutdown tylanbpsg 2001-03-21 14:26:44: needs characterization (latta.snf.stanford.edu)
87: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken (yangxu.snf.stanford.edu)
88: Re: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken (shott.snf.stanford.edu)
89: Problem tylanbpsg 2001-03-31 08:37:54: Caution ... (shott.snf.stanford.edu)
90: Shutdown tylanbpsg 2001-04-02 07:10:49: burnbox clean (seymour.snf.stanford.edu)
91: Comment tylanbpsg 2001-04-02 08:02:14: Burnbox (mdickey.snf.stanford.edu)
92: Re: Problem tylanbpsg 2001-03-31 08:37:54: Caution ...Burnbox clean completed (mdickey.snf.stanford.edu)
93: Re: Shutdown tylanbpsg 2001-04-02 07:10:49: burnbox clean completed (mdickey.snf.stanford.edu)
94: Shutdown tylanbpsg 2001-04-16 07:06:01: burnbox clean (seymour.snf.stanford.edu)
95: Re: Shutdown tylanbpsg 2001-04-16 07:06:01: burnbox clean (seymour.snf.stanford.edu)
96: Shutdown tylanbpsg 2001-04-24 09:11:10: shutdown for cleaning (gsarmien.snf.stanford.edu)
97: Re: Shutdown tylanbpsg 2001-04-24 09:11:10: shutdown for cleaning (seymour.snf.stanford.edu)
98: Shutdown tylanbpsg 2001-04-26 09:41:12: needs characterization (seymour.snf.stanford.edu)
99: Problem tylanbpsg 2001-04-26 18:05:36: Boat did not pull out at the end of LTO400 (latta.snf.stanford.edu)

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