tylanbpsg-pcs@snf.stanford.edu: 3127: Re: Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube.

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Subject: Re: Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube.
From: seymour@snf.stanford.edu

ran lto400 with no problems or alarms. Tube opened after the 8 mins of n2purge step
in the recipe.

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