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Messages 0xx
01:
Resevation Removal
(
Ching-Hsiang Cheng
)
02:
Reservation Removal
(
Ching-Hsiang Cheng
)
03:
Silane gas cylinder change
(
Bob Wheeler
)
04:
LPCVD's will be down tomorrow
(
Keith Gaul
)
05:
Poly tube cleaning schedule
(
Keith Gaul
)
06:
Reservation Cancelled
(
Ching-Hsiang Cheng
)
07:
Reservation cancelled
(
Benjamin Chui
)
08:
Silane Cylinder change for furnaces
(
Keith Gaul
)
09:
burnbox clean
(
Ray Seymour
)
10:
burnbox clean
(
Ray Seymour
)
11:
polypump
(
Sharleen Beckwith
)
12:
Terminal Down!!
(
Jaime Garate
)
13:
Re: Terminal Down!!
(
Jaime Garate
)
14:
Re: Terminal Down!!
(
Jaime Garate
)
15:
Poly Down!
(
Jaime Garate
)
16:
Poly tube
(
Jaime Garate
)
17:
POLY
(
Jaime Garate
)
18:
Status
(
Jaime Garate
)
19:
system status
(
Ray Seymour
)
20:
Poly Status
(
Jaime Garate
)
21:
removed reservation
(
Sean T. Hansen
)
22:
burnbox
(
Ray Seymour
)
23:
burnbox shutdown
(
Ray Seymour
)
24:
burnbox
(
Ray Seymour
)
25:
tylanbpsg time
(
Balaji Venkateshwaran
)
26:
tylanpoly time
(
Balaji Venkateshwaran
)
27:
Re: tylanpoly time
(
Song Pang
)
28:
reservation cancelled
(
Sanli Ergun
)
29:
reservation cancelled
(
Sanli Ergun
)
30:
cancelled time
(
Balaji Venkateshwaran
)
31:
polishing poly silicon
(
Hiroyuki Wada
)
32:
PolySilicon Depostion Information
(
Mohammed H. Badi
)
33:
Shutdown for clean
(
Ray Seymour
)
34:
removed reservation
(
Balaji Venkateshwaran
)
35:
removed reservation
(
Balaji Venkateshwaran
)
36:
Silane bottle change
(
Ray Seymour
)
37:
silane cylinder change
(
Ray Seymour
)
38:
Burnbox problem
(
Ray Seymour
)
39:
burnbox shutdown cleared
(
Ray Seymour
)
40:
Cancelled resv.
(
Sean T. Hansen
)
41:
reservation cancelled
(
Sanli Ergun
)
42:
reservation cancelled
(
Sanli Ergun
)
43:
Nitride reservation cancelled
(
BC Montgomery
)
44:
Toxic gas shutdown Aug. 6
(
Dick Crane
)
45:
Tube clean
(
Ray Seymour
)
46:
Sorry for late notice
(
David Caudillo-Malik
)
47:
Toxic gas tests complete
(
Dick Crane
)
48:
tube is up
(
Ray Seymour
)
49:
reservation removed 2-5pm
(
Balaji Venkateshwaran
)
50:
tube free after 7pm
(
Michael S. Bartsch
)
51:
wafers not ready, cancel 10:30-2:30, sorry for the late notice
(
Gary Yama
)
52:
Cancelled Reservation Tylan Poly
(
David Caudillo-Malik
)
53:
silane cylinder
(
ray seymour
)
54:
silane cylinder change
(
ray seymour
)
55:
silane status
(
ray seymour
)
56:
poly-oxide
(
Sanli Ergun
)
57:
metal and non-metal wands
(
Sanli Ergun
)
58:
Re: metal and non-metal wands
(
Nancy Latta
)
59:
Re: metal and non-metal wands
(
Sharleen Beckwith
)
60:
Silane cylinder change
(
Ray Seymour
)
61:
silane cylinder change
(
Ray Seymour
)
62:
User this morning
(
Nancy Latta
)
63:
Silane cylinder change.
(
Ray Seymour
)
64:
Post clean
(
Ray Seymour
)
65:
burnbox cleans
(
Ray Seymour
)
66:
reservation cancellation
(
Sanli Ergun
)
67:
Removed Reservation
(
David Caudillo
)
68:
pull and clean in process
(
Ray Seymour
)
69:
Clean of Poly tube
(
Ted Berg
)
70:
Tube thickness
(
Mike Dickey
)
71:
Silane shutdown
(
Ray Seymour
)
72:
House gas shutdown
(
Ted Berg
)
73:
Re: House gas shutdown
(
Ted Berg
)
74:
Problems with tylan ploy
(
Ted Berg
)
75:
Tube clean
(
Ray Seymour
)
76:
Bad poly run
(
Balaji Venkateshwaran
)
77:
tube Clean
(
Ted Berg
)
78:
cylinder change
(
Ray Seymour
)
79:
Pull and clean
(
Mike Dickey
)
80:
Loss of house vacuum on Monday6-17-02
(
Ted Berg
)
81:
Re: Loss of house vacuum on Monday6-17-02]
(
Ted Berg
)
82:
Canceled reservation on tylanpoly
(
Colby Bellew
)
83:
cancel reservation Tuesday morning
(
Yahong Yao
)
84:
tylanpoly might have been contaminated with glass.
(
Eaden Saw
)
85:
Re: tylanpoly might have been contaminated with glass.
(
Yaocheng Liu
)
86:
pull and clean
(
Mike Dickey
)
87:
Test
(
Mike Dickey
)
88:
Silane for the LP tubes
(
Dick Crane
)
89:
res removed 1430-1830
(
Dan Laser
)
90:
Pull and clean
(
Mike Dickey
)
91:
Re: tylanpoly should not be pulled]
(
Ted Berg
)
92:
Pull and clean
(
Mike Dickey
)
93:
Door flag
(
Mike Dickey
)
94:
Tube free until 7:00pm
(
Maurice Stevens
)
95:
shutdown
(
Ray Seymour
)
96:
tube up to run
(
Ray Seymour
)
97:
Silane use over the weekend
(
Dick Crane
)
98:
Low SiH4 level alert
(
Dick Crane
)
99:
Re: Low SiH4 level alert
(
aliagah.stanford.edu
)
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