Messages 0xx


01: Resevation Removal (Ching-Hsiang Cheng)
02: Reservation Removal (Ching-Hsiang Cheng)
03: Silane gas cylinder change (Bob Wheeler)
04: LPCVD's will be down tomorrow (Keith Gaul)
05: Poly tube cleaning schedule (Keith Gaul)
06: Reservation Cancelled (Ching-Hsiang Cheng)
07: Reservation cancelled (Benjamin Chui)
08: Silane Cylinder change for furnaces (Keith Gaul)
09: burnbox clean (Ray Seymour)
10: burnbox clean (Ray Seymour)
11: polypump (Sharleen Beckwith)
12: Terminal Down!! (Jaime Garate)
13: Re: Terminal Down!! (Jaime Garate)
14: Re: Terminal Down!! (Jaime Garate)
15: Poly Down! (Jaime Garate)
16: Poly tube (Jaime Garate)
17: POLY (Jaime Garate)
18: Status (Jaime Garate)
19: system status (Ray Seymour)
20: Poly Status (Jaime Garate)
21: removed reservation (Sean T. Hansen)
22: burnbox (Ray Seymour)
23: burnbox shutdown (Ray Seymour)
24: burnbox (Ray Seymour)
25: tylanbpsg time (Balaji Venkateshwaran)
26: tylanpoly time (Balaji Venkateshwaran)
27: Re: tylanpoly time (Song Pang)
28: reservation cancelled (Sanli Ergun)
29: reservation cancelled (Sanli Ergun)
30: cancelled time (Balaji Venkateshwaran)
31: polishing poly silicon (Hiroyuki Wada)
32: PolySilicon Depostion Information (Mohammed H. Badi)
33: Shutdown for clean (Ray Seymour)
34: removed reservation (Balaji Venkateshwaran)
35: removed reservation (Balaji Venkateshwaran)
36: Silane bottle change (Ray Seymour)
37: silane cylinder change (Ray Seymour)
38: Burnbox problem (Ray Seymour)
39: burnbox shutdown cleared (Ray Seymour)
40: Cancelled resv. (Sean T. Hansen)
41: reservation cancelled (Sanli Ergun)
42: reservation cancelled (Sanli Ergun)
43: Nitride reservation cancelled (BC Montgomery)
44: Toxic gas shutdown Aug. 6 (Dick Crane)
45: Tube clean (Ray Seymour)
46: Sorry for late notice (David Caudillo-Malik)
47: Toxic gas tests complete (Dick Crane)
48: tube is up (Ray Seymour)
49: reservation removed 2-5pm (Balaji Venkateshwaran)
50: tube free after 7pm (Michael S. Bartsch)
51: wafers not ready, cancel 10:30-2:30, sorry for the late notice (Gary Yama)
52: Cancelled Reservation Tylan Poly (David Caudillo-Malik)
53: silane cylinder (ray seymour)
54: silane cylinder change (ray seymour)
55: silane status (ray seymour)
56: poly-oxide (Sanli Ergun)
57: metal and non-metal wands (Sanli Ergun)
58: Re: metal and non-metal wands (Nancy Latta)
59: Re: metal and non-metal wands (Sharleen Beckwith)
60: Silane cylinder change (Ray Seymour)
61: silane cylinder change (Ray Seymour)
62: User this morning (Nancy Latta)
63: Silane cylinder change. (Ray Seymour)
64: Post clean (Ray Seymour)
65: burnbox cleans (Ray Seymour)
66: reservation cancellation (Sanli Ergun)
67: Removed Reservation (David Caudillo)
68: pull and clean in process (Ray Seymour)
69: Clean of Poly tube (Ted Berg)
70: Tube thickness (Mike Dickey)
71: Silane shutdown (Ray Seymour)
72: House gas shutdown (Ted Berg)
73: Re: House gas shutdown (Ted Berg)
74: Problems with tylan ploy (Ted Berg)
75: Tube clean (Ray Seymour)
76: Bad poly run (Balaji Venkateshwaran)
77: tube Clean (Ted Berg)
78: cylinder change (Ray Seymour)
79: Pull and clean (Mike Dickey)
80: Loss of house vacuum on Monday6-17-02 (Ted Berg)
81: Re: Loss of house vacuum on Monday6-17-02] (Ted Berg)
82: Canceled reservation on tylanpoly (Colby Bellew)
83: cancel reservation Tuesday morning (Yahong Yao)
84: tylanpoly might have been contaminated with glass. (Eaden Saw)
85: Re: tylanpoly might have been contaminated with glass. (Yaocheng Liu)
86: pull and clean (Mike Dickey)
87: Test (Mike Dickey)
88: Silane for the LP tubes (Dick Crane)
89: res removed 1430-1830 (Dan Laser)
90: Pull and clean (Mike Dickey)
91: Re: tylanpoly should not be pulled] (Ted Berg)
92: Pull and clean (Mike Dickey)
93: Door flag (Mike Dickey)
94: Tube free until 7:00pm (Maurice Stevens)
95: shutdown (Ray Seymour)
96: tube up to run (Ray Seymour)
97: Silane use over the weekend (Dick Crane)
98: Low SiH4 level alert (Dick Crane)
99: Re: Low SiH4 level alert (aliagah.stanford.edu)