Messages 0xx

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01: Shutdown tylanpoly: SiH4 gas cylinder change (wheeler.snf.stanford.edu)
02: Shutdown Clear tylanpoly: Cylinder changed (wheeler.snf.stanford.edu)
03: Shutdown tylanpoly: pressure in burn box (gaul.snf.stanford.edu)
04: Shutdown Clear tylanpoly: completed (gaul.snf.stanford.edu)
05: Problem tylanpoly: MFC Alarm went off (mbadi.snf.stanford.edu)
06: Problem Clear tylanpoly: shutdown to fix problem (gaul.snf.stanford.edu)
07: Shutdown tylanpoly: Shutdown to clean tube (gaul.snf.stanford.edu)
08: Shutdown Clear tylanpoly: Tube has been cleaned and poly coated (gaul.snf.stanford.edu)
09: Problem tylanpoly: No quartz dummies (anolley.snf.stanford.edu)
10: Problem Clear tylanpoly: Quatrz dummies have been added to Poly tube (jgarate.snf.stanford.edu)
11: Problem tylanpoly: (mtrivedi.snf.stanford.edu)
12: Problem Clear tylanpoly: Reset tylan 460 (gaul.snf.stanford.edu)
13: Problem tylanpoly: polytube (anolley.snf.stanford.edu)
14: Problem Clear tylanpoly: Fixed pully on motor (gaul.snf.stanford.edu)
15: Shutdown tylanpoly: not punping down (seymour.snf.stanford.edu)
16: Shutdown tylanpoly: system pumping ok now (seymour.snf.stanford.edu)
17: Problem tylanpoly: SiH4 cylinder needs changing (seymour.snf.stanford.edu)
18: Shutdown tylanpoly: Sih4 cylinder change (seymour.snf.stanford.edu)
19: Problem tylanpoly: SiH4 cylinder has been changed (seymour.snf.stanford.edu)
20: Shutdown tylanpoly: Sih4 cylinder change completed system up (seymour.snf.stanford.edu)
21: Shutdown tylanpoly 2000-12-18 07:39:44: (seymour.snf.stanford.edu)
22: Re: Shutdown tylanpoly 2000-12-18 07:39:44: burnbox clean completed ok to run (seymour.snf.stanford.edu)
23: Shutdown tylanpoly 2001-01-22 07:54:12: system not pumping down (seymour.snf.stanford.edu)
24: Re: Shutdown tylanpoly 2001-01-22 07:54:12: Tube has been characterize (jgarate.snf.stanford.edu)
25: Comment tylanpoly 2001-02-02 09:30:26: Silane cylinder change on Monday Feb 5 (seymour.snf.stanford.edu)
26: Shutdown tylanpoly 2001-02-05 06:26:12: (seymour.snf.stanford.edu)
27: Re: Shutdown tylanpoly 2001-02-05 06:26:12: Silane cylinder changed (seymour.snf.stanford.edu)
28: Problem tylanpoly 2001-02-08 02:24:37: process pressure not normal (venkat.snf.stanford.edu)
29: Shutdown tylanpoly 2001-02-08 14:22:15: under maintenance (hansen.snf.stanford.edu)
30: Re: Problem tylanpoly 2001-02-08 02:24:37: process pressure not normal (seymour.snf.stanford.edu)
31: Re: Shutdown tylanpoly 2001-02-08 14:22:15: System back for production (jgarate.snf.stanford.edu)
32: Problem tylanpoly 2001-02-15 14:13:51: tylanpoly (april.snf.stanford.edu)
33: Re: Problem tylanpoly 2001-02-15 14:13:51: tylanpoly (seymour.snf.stanford.edu)
34: Shutdown tylanpoly 2001-03-05 06:04:33: burnbox clean (seymour.snf.stanford.edu)
35: Re: Shutdown tylanpoly 2001-03-05 06:04:33: burnbox clean completed (seymour.snf.stanford.edu)
36: Shutdown tylanpoly 2001-03-15 07:21:10: burnbox temp low (seymour.snf.stanford.edu)
37: Re: Shutdown tylanpoly 2001-03-15 07:21:10: burnbox temp is ok tube is up (seymour.snf.stanford.edu)
38: Shutdown tylanpoly 2001-04-02 07:11:38: burnbox clean (seymour.snf.stanford.edu)
39: Comment tylanpoly 2001-04-02 08:02:55: Burnbox (mdickey.snf.stanford.edu)
40: Re: Shutdown tylanpoly 2001-04-02 07:11:38: burnbox clean completed (mdickey.snf.stanford.edu)
41: Problem tylanpoly 2001-04-03 00:29:17: MFS alarms (hopcroft.snf.stanford.edu)
42: Re: Problem tylanpoly 2001-04-03 00:29:17: MFS alarms have been reset (seymour.snf.stanford.edu)
43: Problem tylanpoly 2001-04-06 12:46:12: baffle wfr cracked, replace w/ Si as per Gladys (gyama.snf.stanford.edu)
44: Shutdown tylanpoly 2001-04-16 07:06:44: burnbox clean (seymour.snf.stanford.edu)
45: Re: Shutdown tylanpoly 2001-04-16 07:06:44: burnbox clean (seymour.snf.stanford.edu)
46: Shutdown tylanpoly 2001-04-20 07:04:13: tube needs to be cleaned, at 42 microns. (seymour.snf.stanford.edu)
47: Re: Shutdown tylanpoly 2001-04-20 07:04:13: tube needs to be cleaned, at 42 microns. (seymour.snf.stanford.edu)
48: Re: Problem tylanpoly 2001-04-06 12:46:12: baffle wfr cracked, replace w/ Si as per Gladys (seymour.snf.stanford.edu)
49: Problem tylanpoly 2001-04-23 14:12:28: needs to be coated (seymour.snf.stanford.edu)
50: Re: Problem tylanpoly 2001-04-23 14:12:28: needs to be coated (gsarmien.snf.stanford.edu)
51: Problem tylanpoly 2001-04-26 09:38:53: Quartz dummies and 1 boat missing (greene.snf.stanford.edu)
52: Shutdown tylanpoly 2001-04-26 11:19:25: consistantly failing leak check (greene.snf.stanford.edu)
53: Re: Shutdown tylanpoly 2001-04-26 11:19:25: consistantly failing leak check (seymour.snf.stanford.edu)
54: Problem tylanpoly 2001-04-27 15:40:45: need a test after changing quartz tube. (seymour.snf.stanford.edu)
55: Re: Problem tylanpoly 2001-04-27 15:40:45: need a test after changing quartz tube. (gsarmien.snf.stanford.edu)
56: Re: Problem tylanpoly 2001-04-26 09:38:53: Quartz dummies and 1 boat missing (gsarmien.snf.stanford.edu)
57: Shutdown tylanpoly 2001-05-23 07:19:56: silane cylinder change (seymour.snf.stanford.edu)
58: Problem tylanpoly 2001-05-23 08:59:56: the silane cylinder is on leak test (seymour.snf.stanford.edu)
59: Re: Shutdown tylanpoly 2001-05-23 07:19:56: silane cylinder change (seymour.snf.stanford.edu)
60: Re: Problem tylanpoly 2001-05-23 08:59:56: the silane cylinder is on leak test (seymour.snf.stanford.edu)
61: Shutdown tylanpoly 2001-06-01 15:18:16: burnbox down (seymour.snf.stanford.edu)
62: Re: Shutdown tylanpoly 2001-06-01 15:18:16: burnbox down (seymour.snf.stanford.edu)
63: Problem tylanpoly 2001-06-10 11:54:52: Had to Manually Close Door (hansen.snf.stanford.edu)
64: Re: Problem tylanpoly 2001-06-10 11:54:52: Had to Manually Close Door (seymour.snf.stanford.edu)
65: Shutdown tylanpoly 2001-07-16 06:24:19: burnbox clean (seymour.snf.stanford.edu)
66: Re: Shutdown tylanpoly 2001-07-16 06:24:19: burnbox clean (seymour.snf.stanford.edu)
67: Shutdown tylanpoly 2001-07-30 07:14:42: down for burnbox clean (seymour.snf.stanford.edu)
68: Re: Shutdown tylanpoly 2001-07-30 07:14:42: down for burnbox clean (seymour.snf.stanford.edu)
69: Shutdown tylanpoly 2001-08-05 20:59:08: Calibration of SiH4 MFC (mcvittie.snf.stanford.edu)
70: Re: Shutdown tylanpoly 2001-08-05 20:59:08: Calibration of SiH4 MFC (seymour.snf.stanford.edu)
71: Shutdown tylanpoly 2001-08-08 14:22:36: test after pull and clean (seymour.snf.stanford.edu)
72: Re: Shutdown tylanpoly 2001-08-08 14:22:36: tylanpoly: Coated and tested.. Gladys (gladys.snf.stanford.edu)
73: Problem tylanpoly 2001-08-20 11:27:15: 20:1 BOE bath won't drain...Gladys (gladys.snf.stanford.edu)
74: Re: Problem tylanpoly 2001-08-20 11:27:15: tylanpoly: made a mistake on reporting prob on this equi (gladys.snf.stanford.edu)
75: Shutdown tylanpoly 2001-08-25 07:35:58: (seymour.snf.stanford.edu)
76: Re: Shutdown tylanpoly 2001-08-25 07:35:58: (seymour.snf.stanford.edu)
77: Shutdown tylanpoly 2001-10-10 08:02:13: silane cylinder change (seymour.snf.stanford.edu)
78: Re: Shutdown tylanpoly 2001-10-10 08:02:13: silane cylinder change (seymour.snf.stanford.edu)
79: Shutdown tylanpoly 2001-11-07 07:08:14: Abort for SiH4-cylinder Change (tberg.snf.stanford.edu)
80: Re: Shutdown tylanpoly 2001-11-07 07:08:14: Abort for SiH4-cylinder Change (seymour.snf.stanford.edu)
81: Shutdown tylanpoly 2001-11-08 07:19:42: needs test after pull and clean (seymour.snf.stanford.edu)
82: Re: Shutdown tylanpoly 2001-11-08 07:19:42: needs test after pull and clean (seymour.snf.stanford.edu)
83: Shutdown tylanpoly 2001-11-20 16:55:17: Silane Line Shut (mcvittie.snf.stanford.edu)
84: Re: Shutdown tylanpoly 2001-11-20 16:55:17: Silane Line up (mcvittie.snf.stanford.edu)
85: Shutdown tylanpoly 2002-01-17 19:13:26: poly tube problems (kailash.snf.stanford.edu)
86: Shutdown tylanpoly 2002-01-18 08:01:34: doing pull and clean (seymour.snf.stanford.edu)
87: Re: Shutdown tylanpoly 2002-01-17 19:13:26: poly tube problems (seymour.snf.stanford.edu)
88: Re: Shutdown tylanpoly 2002-01-18 08:01:34: doing pull and clean (seymour.snf.stanford.edu)
89: Shutdown tylanpoly 2002-01-18 15:18:01: needs testing after pull and clean (seymour.snf.stanford.edu)
90: Re: Shutdown tylanpoly 2002-01-18 15:18:01: needs testing after pull and clean..testrun completed (gladys.snf.stanford.edu)
91: Shutdown tylanpoly 2002-01-22 15:47:18: tube has high leak rate (seymour.snf.stanford.edu)
92: Re: Shutdown tylanpoly 2002-01-22 15:47:18: tube has high leak rate (mdickey.snf.stanford.edu)
93: Shutdown tylanpoly 2002-03-04 07:54:59: down for pull and clean (seymour.snf.stanford.edu)
94: Re: Shutdown tylanpoly 2002-03-04 07:54:59: down for pull and clean: : testrun completed (gladys.snf.stanford.edu)
95: Shutdown tylanpoly 2002-03-11 08:47:56: silane cylinder changed under leakcheck (seymour.snf.stanford.edu)
96: Re: Shutdown tylanpoly 2002-03-11 08:47:56: silane cylinder changed under leakcheck (tberg.snf.stanford.edu)
97: Shutdown tylanpoly 2002-03-19 06:31:25: Shut down today for gas line redo (tberg.snf.stanford.edu)
98: Re: Shutdown tylanpoly 2002-03-19 06:31:25: Shut down today for gas line redo (tberg.snf.stanford.edu)
99: Problem tylanpoly 2002-03-21 09:07:30: 3/21: metal and nonmetal vacuum wands switched when I came to use tylannitride this morning. I have no idea when they were switched and/or if the tubes are contaminated. (ejwong.snf.stanford.edu)

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