Messages 0xx


01: tystar cleanliness status (Randy True)
02: Silane Cylinder change for furnaces (Keith Gaul)
03: burnbox clean (Ray Seymour)
04: Tystar Status (fwd) (Jim McVittie)
05: Dep Rates for TYSTAR DAMOR550? (Jim McVittie)
06: Tystar Update -- Wed Afternoon (Jim McVittie)
07: Tystar Status Update (Jim McVittie)
08: Tystar reservation cancellation (Amy Bowers)
09: tystar still a CLEAN system, users meeting (Randy True)
10: Re: tystar still a CLEAN system, users meeting (Jim McVittie)
11: Re: tystar still a CLEAN system, users meeting (Randy True)
12: Re: tystar still a CLEAN system, users meeting (Jim Hunter)
13: Tystar, Status change protocols, etc. (Chris Kenney)
14: Re: Tystar, Status change protocols, etc. (Jim McVittie)
15: tube clean (Ray Seymour)
16: update on reassembly (Ray Seymour)
17: Poly Dep on Ni in January (Jim McVittie)
18: test run (carl mccarty faulkner)
19: Re: Diclorosilane bottle recirculator.] (Ray Seymour)
20: N2 backfill MFC (Ray Seymour)
21: Status of In-situ Boron Doped Poly in Tystar (Jim McVittie)
22: system shutdown removed (Ray Seymour)
23: burnbox (Ray Seymour)
24: burnbox shutdown (Ray Seymour)
25: burnbox (Ray Seymour)
26: Calibration of doping concentration vs flow rates (Helen L. Kung)
27: Silane bottle change (Ray Seymour)
28: silane cylinder change (Ray Seymour)
29: Burnbox problem (Ray Seymour)
30: burnbox shutdown cleared (Ray Seymour)
31: Toxic gas shutdown Aug. 6 (Dick Crane)
32: Toxic gas tests complete (Dick Crane)
33: SIH4 calibration (Ray Seymour)
34: silane cylinder (ray seymour)
35: silane cylinder change (ray seymour)
36: silane status (ray seymour)
37: tube is up (Ray Seymour)
38: Silane cylinder change (Ray Seymour)
39: silane cylinder change (Ray Seymour)
40: Silane cylinder change. (Ray Seymour)
41: Silane cylinder change (Ray Seymour)
42: burnbox cleans (Ray Seymour)
43: Canecllaion of the system from 6AM -5:30 PM (Carolyn.Robinson.ReadRite.com)
44: Silane MFC (Ray Seymour)
45: tube is up (Ray Seymour)
46: Poly Dep on TiSi2 in Tystar (Jim McVittie)
47: silane shutdown (Ray Seymour)
48: House gas shutdown (Ted Berg)
49: Re: House gas shutdown (Ted Berg)
50: Tube status (Gladys Sarmiento)
51: cylinder change (Ray Seymour)
52: Loss of house vacuum on Monday6-17-02 (Ted Berg)
53: Re: Loss of house vacuum on Monday6-17-02] (Ted Berg)
54: Pull and Clean (Mike Dickey)
55: Pull and clean (Mike Dickey)
56: silane change (Ray Seymour)
57: Re: Silane for the LP tubes] (Dick Crane)
58: tystar training (Fu-Min Wang)
59: Tystar User Meeting (Jim McVittie)
60: Re: Tystar User Meeting (Jim McVittie)
61: reservations for tomorrow. (Ray Seymour)
62: Test plan for Tystar furnace (Colby Bellew)
63: T/C calibration (Ray Seymour)
64: Re: T/C calibration (Jim McVittie)
65: Re: Test plan for Tystar furnace (Jim McVittie)
66: Reply from Ray Concerning Temperature Profile/Calibration (Jim McVittie)
67: Tystar- temps spot on! (Eric Perozziello)
68: shutdown (Ray Seymour)
69: tube up to run (Ray Seymour)
70: Silane use over the weekend (Dick Crane)
71: Low SiH4 level alert (Dick Crane)
72: Re: Low SiH4 level alert (aliagah.stanford.edu)
73: Re: Low SiH4 level alert (Chi On Chui)
74: Re: Low SiH4 level alert (luscious.stanford.edu)
75: Re: Low SiH4 level alert (luscious.stanford.edu)
76: Pull and clean (Mike Dickey)
77: SILANE (Mike Dickey)
78: Re: Burnbox cleaning] (Dick Crane)
79: Initial results from Tystar characterization (Colby Bellew)
80: More results from Tystar characterization (Colby Bellew)
81: Re: More results from Tystar characterization (Jim McVittie)
82: Overhang Results for Doped Poly Experiments (Jim McVittie)
83: Correct to Overhang Results for Doped Poly Experiments (fwd) (Jim McVittie)
84: Dummies replaced (Colby Bellew)
85: Bank circuit breaker failure (Ray Seymour)
86: tube is up to run (Ray Seymour)
87: Shutdown (Ray Seymour)
88: shutdown removed (Ray Seymour)
89: Test after shutdown. (Ray Seymour)
90: Request to use TiN in Tystar (Jim McVittie)
91: Use of TiN in Tystar (Jim McVittie)
92: Silane bottle (Dick Crane)
93: Re: Problem tylansige 2003-01-17 07:50:07: not yet testted] (Ted Berg)
94: Furnace shut down for Thermco tie-in (Dick Crane)
95: silane cylinder change 3/19 (Dick Crane)
96: Highest doping in P+ Si? (Chi On Chui)
97: Re: Highest doping in P+ Si? (Colby Bellew)
98: 4/21 Furnace shutdown for Thermco tie-in (Dick Crane)
99: metal-clean dep (Chi On Chui)