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Messages 0xx
01:
tystar cleanliness status
(
Randy True
)
02:
Silane Cylinder change for furnaces
(
Keith Gaul
)
03:
burnbox clean
(
Ray Seymour
)
04:
Tystar Status (fwd)
(
Jim McVittie
)
05:
Dep Rates for TYSTAR DAMOR550?
(
Jim McVittie
)
06:
Tystar Update -- Wed Afternoon
(
Jim McVittie
)
07:
Tystar Status Update
(
Jim McVittie
)
08:
Tystar reservation cancellation
(
Amy Bowers
)
09:
tystar still a CLEAN system, users meeting
(
Randy True
)
10:
Re: tystar still a CLEAN system, users meeting
(
Jim McVittie
)
11:
Re: tystar still a CLEAN system, users meeting
(
Randy True
)
12:
Re: tystar still a CLEAN system, users meeting
(
Jim Hunter
)
13:
Tystar, Status change protocols, etc.
(
Chris Kenney
)
14:
Re: Tystar, Status change protocols, etc.
(
Jim McVittie
)
15:
tube clean
(
Ray Seymour
)
16:
update on reassembly
(
Ray Seymour
)
17:
Poly Dep on Ni in January
(
Jim McVittie
)
18:
test run
(
carl mccarty faulkner
)
19:
Re: Diclorosilane bottle recirculator.]
(
Ray Seymour
)
20:
N2 backfill MFC
(
Ray Seymour
)
21:
Status of In-situ Boron Doped Poly in Tystar
(
Jim McVittie
)
22:
system shutdown removed
(
Ray Seymour
)
23:
burnbox
(
Ray Seymour
)
24:
burnbox shutdown
(
Ray Seymour
)
25:
burnbox
(
Ray Seymour
)
26:
Calibration of doping concentration vs flow rates
(
Helen L. Kung
)
27:
Silane bottle change
(
Ray Seymour
)
28:
silane cylinder change
(
Ray Seymour
)
29:
Burnbox problem
(
Ray Seymour
)
30:
burnbox shutdown cleared
(
Ray Seymour
)
31:
Toxic gas shutdown Aug. 6
(
Dick Crane
)
32:
Toxic gas tests complete
(
Dick Crane
)
33:
SIH4 calibration
(
Ray Seymour
)
34:
silane cylinder
(
ray seymour
)
35:
silane cylinder change
(
ray seymour
)
36:
silane status
(
ray seymour
)
37:
tube is up
(
Ray Seymour
)
38:
Silane cylinder change
(
Ray Seymour
)
39:
silane cylinder change
(
Ray Seymour
)
40:
Silane cylinder change.
(
Ray Seymour
)
41:
Silane cylinder change
(
Ray Seymour
)
42:
burnbox cleans
(
Ray Seymour
)
43:
Canecllaion of the system from 6AM -5:30 PM
(
Carolyn.Robinson.ReadRite.com
)
44:
Silane MFC
(
Ray Seymour
)
45:
tube is up
(
Ray Seymour
)
46:
Poly Dep on TiSi2 in Tystar
(
Jim McVittie
)
47:
silane shutdown
(
Ray Seymour
)
48:
House gas shutdown
(
Ted Berg
)
49:
Re: House gas shutdown
(
Ted Berg
)
50:
Tube status
(
Gladys Sarmiento
)
51:
cylinder change
(
Ray Seymour
)
52:
Loss of house vacuum on Monday6-17-02
(
Ted Berg
)
53:
Re: Loss of house vacuum on Monday6-17-02]
(
Ted Berg
)
54:
Pull and Clean
(
Mike Dickey
)
55:
Pull and clean
(
Mike Dickey
)
56:
silane change
(
Ray Seymour
)
57:
Re: Silane for the LP tubes]
(
Dick Crane
)
58:
tystar training
(
Fu-Min Wang
)
59:
Tystar User Meeting
(
Jim McVittie
)
60:
Re: Tystar User Meeting
(
Jim McVittie
)
61:
reservations for tomorrow.
(
Ray Seymour
)
62:
Test plan for Tystar furnace
(
Colby Bellew
)
63:
T/C calibration
(
Ray Seymour
)
64:
Re: T/C calibration
(
Jim McVittie
)
65:
Re: Test plan for Tystar furnace
(
Jim McVittie
)
66:
Reply from Ray Concerning Temperature Profile/Calibration
(
Jim McVittie
)
67:
Tystar- temps spot on!
(
Eric Perozziello
)
68:
shutdown
(
Ray Seymour
)
69:
tube up to run
(
Ray Seymour
)
70:
Silane use over the weekend
(
Dick Crane
)
71:
Low SiH4 level alert
(
Dick Crane
)
72:
Re: Low SiH4 level alert
(
aliagah.stanford.edu
)
73:
Re: Low SiH4 level alert
(
Chi On Chui
)
74:
Re: Low SiH4 level alert
(
luscious.stanford.edu
)
75:
Re: Low SiH4 level alert
(
luscious.stanford.edu
)
76:
Pull and clean
(
Mike Dickey
)
77:
SILANE
(
Mike Dickey
)
78:
Re: Burnbox cleaning]
(
Dick Crane
)
79:
Initial results from Tystar characterization
(
Colby Bellew
)
80:
More results from Tystar characterization
(
Colby Bellew
)
81:
Re: More results from Tystar characterization
(
Jim McVittie
)
82:
Overhang Results for Doped Poly Experiments
(
Jim McVittie
)
83:
Correct to Overhang Results for Doped Poly Experiments (fwd)
(
Jim McVittie
)
84:
Dummies replaced
(
Colby Bellew
)
85:
Bank circuit breaker failure
(
Ray Seymour
)
86:
tube is up to run
(
Ray Seymour
)
87:
Shutdown
(
Ray Seymour
)
88:
shutdown removed
(
Ray Seymour
)
89:
Test after shutdown.
(
Ray Seymour
)
90:
Request to use TiN in Tystar
(
Jim McVittie
)
91:
Use of TiN in Tystar
(
Jim McVittie
)
92:
Silane bottle
(
Dick Crane
)
93:
Re: Problem tylansige 2003-01-17 07:50:07: not yet testted]
(
Ted Berg
)
94:
Furnace shut down for Thermco tie-in
(
Dick Crane
)
95:
silane cylinder change 3/19
(
Dick Crane
)
96:
Highest doping in P+ Si?
(
Chi On Chui
)
97:
Re: Highest doping in P+ Si?
(
Colby Bellew
)
98:
4/21 Furnace shutdown for Thermco tie-in
(
Dick Crane
)
99:
metal-clean dep
(
Chi On Chui
)
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