Messages 0xx

---

01: Problem tystar1: tystar ((none))
02: Problem Clear tystar1: was not a problem ((none))
03: Shutdown tystar1: presssure in burn box (gaul.snf.stanford.edu)
04: Shutdown Clear tystar1: (gaul.snf.stanford.edu)
05: Shutdown tystar1: pump out of oil,system shoudown (seymour.snf.stanford.edu)
06: Shutdown Clear tystar1: pump replaced, leak check was good (seymour.snf.stanford.edu)
07: Problem tystar1: tystar locked (dhelqaq.snf.stanford.edu)
08: Comment tystar1: system cpu reset (seymour.snf.stanford.edu)
09: Problem Clear tystar1: system cpu reset (seymour.snf.stanford.edu)
10: Problem tystar1: tystar problem (dhelqaq.snf.stanford.edu)
11: Problem Clear tystar1: system pumping ok now (seymour.snf.stanford.edu)
12: Shutdown tystar1: tystar1 (gsarmien.snf.stanford.edu)
13: Comment tystar1: starting dissambly for clean (seymour.snf.stanford.edu)
14: Shutdown tystar1: System up for coat (seymour.snf.stanford.edu)
15: Shutdown tystar1: door not opening (seymour.snf.stanford.edu)
16: Shutdown tystar1: door opens ok (seymour.snf.stanford.edu)
17: Problem tystar1: door stuck but was able to take wafers out (dhelqaq.snf.stanford.edu)
18: Shutdown tystar1: chamber door would not open-4wafers still in there (dhelqaq.snf.stanford.edu)
19: Re: Shutdown tystar1 2000-12-03 16:21:29: System is together and leak tight (seymour.snf.stanford.edu)
20: Re: Problem tystar1 2000-12-01 17:01:19: the system is up for test (seymour.snf.stanford.edu)
21: Comment tystar1 2001-01-19 16:02:19: uniformity needs to be checked afted tube coat is completed (seymour.snf.stanford.edu)
22: Problem tystar1 2001-01-19 16:03:09: tube needs to be qualified (seymour.snf.stanford.edu)
23: Problem tystar1 2001-01-21 01:16:46: "MFS/TCU I/O error or manual mode prevents RUN" error when loading a program (dhelqaq.snf.stanford.edu)
24: Shutdown tystar1 2001-01-22 07:40:55: power outage (cmfaulkn.snf.stanford.edu)
25: Re: Shutdown tystar1 2001-01-22 07:40:55: power outage (seymour.snf.stanford.edu)
26: Re: Problem tystar1 2001-01-21 01:16:46: Checked system and its operating (seymour.snf.stanford.edu)
27: Problem tystar1 2001-01-24 00:48:42: failed gross leak check in pump.001 (ibrahim.snf.stanford.edu)
28: Re: Problem tystar1 2001-01-24 00:48:42: failed gross leak check in pump.001 (seymour.snf.stanford.edu)
29: Re: Problem tystar1 2001-01-19 16:03:09: tube needs to be qualified (seymour.snf.stanford.edu)
30: Problem tystar1 2001-01-29 12:45:21: Low PH3 cylinder is empty replacement due 2/9/01 (seymour.snf.stanford.edu)
31: Comment tystar1 2001-02-02 09:27:47: Silane cylinder change on Monday Feb 5 (seymour.snf.stanford.edu)
32: Shutdown tystar1 2001-02-05 06:14:12: (seymour.snf.stanford.edu)
33: Shutdown tystar1 2001-02-05 06:14:49: (seymour.snf.stanford.edu)
34: Re: Shutdown tystar1 2001-02-05 06:14:49: Silane cylinder changed (seymour.snf.stanford.edu)
35: Re: Shutdown tystar1 2001-02-05 06:14:12: (seymour.snf.stanford.edu)
36: Comment tystar1 2001-02-12 08:16:20: Low PH3 due on 2,15,01 (seymour.snf.stanford.edu)
37: Shutdown tystar1 2001-02-14 15:43:39: N2 MFC out for Recalibration (seymour.snf.stanford.edu)
38: Re: Shutdown tystar1 2001-02-14 15:43:39: N2 MFC has been installed system is up (seymour.snf.stanford.edu)
39: Re: Problem tystar1 2001-01-29 12:45:21: System is up (seymour.snf.stanford.edu)
40: Shutdown tystar1 2001-03-05 06:05:02: burnbox clean (seymour.snf.stanford.edu)
41: Re: Shutdown tystar1 2001-03-05 06:05:02: burnbox clean completed (seymour.snf.stanford.edu)
42: Shutdown tystar1 2001-03-15 07:21:44: burnbox temp low (seymour.snf.stanford.edu)
43: Re: Shutdown tystar1 2001-03-15 07:21:44: burnbox temp is ok tube is up (seymour.snf.stanford.edu)
44: Shutdown tystar1 2001-04-02 07:12:19: burnbox clean (seymour.snf.stanford.edu)
45: Comment tystar1 2001-04-02 08:03:31: Burnbox (mdickey.snf.stanford.edu)
46: Re: Shutdown tystar1 2001-04-02 07:12:19: burnbox clean completed (mdickey.snf.stanford.edu)
47: Shutdown tystar1 2001-04-16 07:07:26: burnbox clean (seymour.snf.stanford.edu)
48: Re: Shutdown tystar1 2001-04-16 07:07:26: burnbox clean (seymour.snf.stanford.edu)
49: Shutdown tystar1 2001-05-23 07:20:34: silane cylinder change (seymour.snf.stanford.edu)
50: Problem tystar1 2001-05-23 09:05:19: silane cylinder is on leak test (seymour.snf.stanford.edu)
51: Re: Shutdown tystar1 2001-05-23 07:20:34: silane cylinder change (seymour.snf.stanford.edu)
52: Re: Problem tystar1 2001-05-23 09:05:19: silane cylinder is on leak test (seymour.snf.stanford.edu)
53: Shutdown tystar1 2001-06-01 15:18:58: burnbox down (seymour.snf.stanford.edu)
54: Re: Shutdown tystar1 2001-06-01 15:18:58: burnbox down (seymour.snf.stanford.edu)
55: Shutdown tystar1 2001-07-16 06:23:32: burnbox clean (seymour.snf.stanford.edu)
56: Re: Shutdown tystar1 2001-07-16 06:23:32: burnbox clean (seymour.snf.stanford.edu)
57: Shutdown tystar1 2001-07-30 07:15:18: down for burnbox clean (seymour.snf.stanford.edu)
58: Re: Shutdown tystar1 2001-07-30 07:15:18: down for burnbox clean (seymour.snf.stanford.edu)
59: Shutdown tystar1 2001-08-05 21:00:08: Calibration of SiH4 MFC (mcvittie.snf.stanford.edu)
60: Re: Shutdown tystar1 2001-08-05 21:00:08: Calibration of SiH4 MFC (seymour.snf.stanford.edu)
61: Problem tystar1 2001-08-20 00:53:04: n2bkfl alarm (rohits.snf.stanford.edu)
62: Re: Problem tystar1 2001-08-20 00:53:04: n2bkfl alarm (seymour.snf.stanford.edu)
63: Shutdown tystar1 2001-08-21 07:02:50: I need to turn off power to furnace bank (seymour.snf.stanford.edu)
64: Re: Shutdown tystar1 2001-08-21 07:02:50: I need to turn off power to furnace bank (seymour.snf.stanford.edu)
65: Shutdown tystar1 2001-08-25 07:36:08: (seymour.snf.stanford.edu)
66: Re: Shutdown tystar1 2001-08-25 07:36:08: (seymour.snf.stanford.edu)
67: Problem tystar1 2001-09-23 12:28:04: tube will not pull (cmfaulkn.snf.stanford.edu)
68: Re: Problem tystar1 2001-09-23 12:28:04: tube will not pull (seymour.snf.stanford.edu)
69: Problem tystar1 2001-09-25 06:34:11: alarming powerfail @19:29 9/24 (cmfaulkn.snf.stanford.edu)
70: Re: Problem tystar1 2001-09-25 06:34:11: alarming powerfail @19:29 9/24 (seymour.snf.stanford.edu)
71: Shutdown tystar1 2001-10-10 08:02:42: silane cylinder change (seymour.snf.stanford.edu)
72: Re: Shutdown tystar1 2001-10-10 08:02:42: silane cylinder change (seymour.snf.stanford.edu)
73: Shutdown tystar1 2001-10-29 14:31:58: system not pumping down correctly (seymour.snf.stanford.edu)
74: Re: Shutdown tystar1 2001-10-29 14:31:58: system not pumping down correctly (seymour.snf.stanford.edu)
75: Shutdown tystar1 2001-11-07 07:09:12: System down for SiH4 cylinder change (tberg.snf.stanford.edu)
76: Re: Shutdown tystar1 2001-11-07 07:09:12: System down for SiH4 cylinder change (seymour.snf.stanford.edu)
77: Shutdown tystar1 2001-11-20 16:56:43: Silane Line Shurdown (mcvittie.snf.stanford.edu)
78: Re: Shutdown tystar1 2001-11-20 16:56:43: Silane Line up (mcvittie.snf.stanford.edu)
79: Problem tystar1 2001-11-26 07:39:19: n2 backfill alarm (josef.snf.stanford.edu)
80: Re: Problem tystar1 2001-11-26 07:39:19: n2 backfill alarm: ....... (gladys.snf.stanford.edu)
81: Shutdown tystar1 2001-12-06 18:46:59: SiH4-BNTLK fault (cmfaulkn.snf.stanford.edu)
82: Re: Shutdown tystar1 2001-12-06 18:46:59: SiH4-BNTLK fault (seymour.snf.stanford.edu)
83: Shutdown tystar1 2001-12-10 15:06:48: needs a test after replacing silane MFC, (seymour.snf.stanford.edu)
84: Re: Shutdown tystar1 2001-12-10 15:06:48: needs a test after replacing silane MFC, (seymour.snf.stanford.edu)
85: Shutdown tystar1 2002-02-05 14:14:00: shutdown due to pump failure (seymour.snf.stanford.edu)
86: Re: Shutdown tystar1 2002-02-05 14:14:00: shutdown due to pump failure (seymour.snf.stanford.edu)
87: Shutdown tystar1 2002-02-08 11:08:51: needs test after pull and clean (seymour.snf.stanford.edu)
88: Re: Shutdown tystar1 2002-02-08 11:08:51: needs test after pull and clean (seymour.snf.stanford.edu)
89: Shutdown tystar1 2002-02-15 10:36:47: tube needs to be coated after clean (seymour.snf.stanford.edu)
90: Re: Shutdown tystar1 2002-02-15 10:36:47: tube needs to be coated after clean (seymour.snf.stanford.edu)
91: Shutdown tystar1 2002-02-20 22:49:41: No Si2H6 due to leak test (rcrane.snf.stanford.edu)
92: Re: Shutdown tystar1 2002-02-20 22:49:41: No Si2H6 due to leak test: test completed by DickCrane, ok to use. (gladys.snf.stanford.edu)
93: Shutdown tystar1 2002-03-11 08:47:34: silane cylinder changed on leakcheck (seymour.snf.stanford.edu)
94: Re: Shutdown tystar1 2002-03-11 08:47:34: silane cylinder changed on leakcheck (tberg.snf.stanford.edu)
95: Shutdown tystar1 2002-03-19 06:31:58: Gas line redo (tberg.snf.stanford.edu)
96: Re: Shutdown tystar1 2002-03-19 06:31:58: Gas line redo (tberg.snf.stanford.edu)
97: Shutdown tystar1 2002-03-22 14:55:33: not pumping down (seymour.snf.stanford.edu)
98: Re: Shutdown tystar1 2002-03-22 14:55:33: not pumping down (latta.snf.stanford.edu)
99: Re: Shutdown tystar1 2002-04-22 14:46:53: Failed leak check (seymour.snf.stanford.edu)

---