Messages 0xx
01:
Problem ultratech: error during align and stage went crazy
(
(none))
02:
Problem ultratech: freezes in middle of wafer exposure sequence (per S.Minne)
(
(none))
03:
Problem Clear ultratech:
(
(none))
04:
Problem ultratech: Problem in reticle alignment (Frosty wafer)
(
frankliu.snf.stanford.edu)
05:
Shutdown ultratech: ret not following stage in load, vacuum his audible
(
aaronp.snf.stanford.edu)
06:
Problem Clear ultratech:
(
martinez.snf.stanford.edu)
07:
Shutdown Clear ultratech:
(
martinez.snf.stanford.edu)
08:
Problem ultratech: output loader errors after 7 or so wafers. This is a consistent problem.
(
sminne.snf.stanford.edu)
09:
Problem Clear ultratech:
(
martinez.snf.stanford.edu)
10:
Problem ultratech: SERVO DISABLED
(
amol.snf.stanford.edu)
11:
Shutdown ultratech: servo disabled-wafer and mask stuck in machine
(
phimmer.snf.stanford.edu)
12:
Shutdown Clear ultratech: servo disable
(
prisbe.snf.stanford.edu)
13:
Problem Clear ultratech: servo disable
(
prisbe.snf.stanford.edu)
14:
Problem ultratech: stage initialization error-stage error
(
phimmer.snf.stanford.edu)
15:
Shutdown ultratech:
(
martinez.snf.stanford.edu)
16:
Problem Clear ultratech:
(
vilanova.snf.stanford.edu)
17:
Shutdown Clear ultratech:
(
vilanova.snf.stanford.edu)
18:
Shutdown ultratech: Servo Disabled
(
sshuto.snf.stanford.edu)
19:
Shutdown Clear ultratech:
(
vilanova.snf.stanford.edu)
20:
Problem ultratech: reticle vac. error
(
rtchang.snf.stanford.edu)
21:
Problem Clear ultratech: clean reticle stage..
(
cbaxter.snf.stanford.edu)
22:
Problem ultratech: Won't load wafers (auto nor manual)
(
gyee.snf.stanford.edu)
23:
Problem Clear ultratech:
(
martinez.snf.stanford.edu)
24:
Problem ultratech:
(
beckwith.snf.stanford.edu)
25:
Problem Clear ultratech:
(
martinez.snf.stanford.edu)
26:
Shutdown ultratech: not laoding wafer properly, scratches resist, also, getting "Check wafer tilt" message.
(
greene.snf.stanford.edu)
27:
Shutdown Clear ultratech:
(
martinez.snf.stanford.edu)
28:
Shutdown ultratech:
(
martinez.snf.stanford.edu)
29:
Shutdown Clear ultratech:
(
martinez.snf.stanford.edu)
30:
Problem ultratech: "Servo disabled" error
(
ericp.snf.stanford.edu)
31:
Problem Clear ultratech:
(
vilanova.snf.stanford.edu)
32:
Problem ultratech: servo disabled
(
yiching.snf.stanford.edu)
33:
Problem Clear ultratech:
(
vilanova.snf.stanford.edu)
34:
Shutdown ultratech: Frosty wafer stuck at flat finder.
(
bowers.snf.stanford.edu)
35:
Shutdown Clear ultratech: clear ultratech
(
martinez.snf.stanford.edu)
36:
Problem ultratech: MaskNotAcceptedAgain(used_it_earlier!)
(
kalavade.snf.stanford.edu)
37:
Problem Clear ultratech:
(
martinez.snf.stanford.edu)
38:
Problem ultratech: will not load mask if inserted in normal way
(
sminne.snf.stanford.edu)
39:
Problem Clear ultratech: uts#1 clear
(
martinez.snf.stanford.edu)
40:
Problem ultratech: no power to computerDate: Nov 16, 2000 10:32:40 PM
(
grupp.snf.stanford.edu)
41:
Problem ultratech: no power to computer
(
martinez.snf.stanford.edu)
42:
Problem ultratech: problem uts1
(
martinez.snf.stanford.edu)
43:
Problem ultratech: problem uts1
(
vilanova.snf.stanford.edu)
44:
Problem ultratech: on my test wafer with the exposure matrix the 1st two columns of die are not developed out; this is the same pattern reported by Gladys earlier this week, or last week (I don't remember exactly when).
(
beckwith.snf.stanford.edu)
45:
Problem ultratech: Lamp Change, Ok to use
(
vilanova.snf.stanford.edu)
46:
Problem ultratech 2000-12-21 15:51:12: will not flash lamp
(
sminne.snf.stanford.edu)
47:
Re: Problem ultratech 2000-12-21 15:51:12: will not flash lamp
(
vilanova.snf.stanford.edu)
48:
Shutdown ultratech 2001-01-18 11:12:08: fast shutter
(
martinez.snf.stanford.edu)
49:
Re: Shutdown ultratech 2001-01-18 11:12:08: fast shutter
(
martinez.snf.stanford.edu)
50:
Problem ultratech 2001-02-14 00:55:02: ULTRATECH
(
sminne.snf.stanford.edu)
51:
Problem ultratech 2001-02-14 00:58:23: Servos disable before Frosty Wafer Routine
(
sminne.snf.stanford.edu)
52:
Shutdown ultratech 2001-02-14 00:59:30: Servos disable before Frosty Wafer Routine
(
sminne.snf.stanford.edu)
53:
Re: Problem ultratech 2001-02-14 00:55:02: ULTRATECH
(
vilanova.snf.stanford.edu)
54:
Re: Problem ultratech 2001-02-14 00:58:23: Servos disable before Frosty Wafer Routine
(
vilanova.snf.stanford.edu)
55:
Re: Shutdown ultratech 2001-02-14 00:59:30: Servos disable before Frosty Wafer Routine
(
vilanova.snf.stanford.edu)
56:
Problem ultratech 2001-03-04 22:34:18: Align light fluctuates
(
grupp.snf.stanford.edu)
57:
Re: Problem ultratech 2001-03-04 22:34:18: Align light fluctuates
(
vilanova.snf.stanford.edu)
58:
Comment ultratech 2001-03-08 22:01:12: uniblitz
(
martinez.snf.stanford.edu)
59:
Shutdown ultratech 2001-03-20 23:19:51: servos disable-can't load reticle
(
hector.snf.stanford.edu)
60:
Re: Shutdown ultratech 2001-03-20 23:19:51: servos disable-can't load reticle
(
martinez.snf.stanford.edu)
61:
Problem ultratech 2001-04-07 11:59:39: wafer align error
(
lgx.snf.stanford.edu)
62:
Problem ultratech 2001-04-07 16:02:21: Focus monitor D/A out of range
(
greene.snf.stanford.edu)
63:
Shutdown ultratech 2001-04-09 14:52:19: Focus Problems need to do some adjustments
(
vilanova.snf.stanford.edu)
64:
Re: Shutdown ultratech 2001-04-09 14:52:19: Focus Problems need to do some adjustments
(
martinez.snf.stanford.edu)
65:
Re: Problem ultratech 2001-04-07 16:02:21: Focus monitor D/A out of range
(
martinez.snf.stanford.edu)
66:
Re: Problem ultratech 2001-04-07 11:59:39: wafer align error
(
martinez.snf.stanford.edu)
67:
Shutdown ultratech 2001-04-11 10:17:15:
(
beckwith.snf.stanford.edu)
68:
Re: Shutdown ultratech 2001-04-11 10:17:15: Shutter Changed , tested, Working ok, ready to use
(
vilanova.snf.stanford.edu)
69:
Shutdown ultratech 2001-04-19 01:58:43: bad commumication failure
(
aaronp.snf.stanford.edu)
70:
Re: Shutdown ultratech 2001-04-19 01:58:43: bad commumication failure
(
vilanova.snf.stanford.edu)
71:
Problem ultratech 2001-04-25 21:13:25: Servo initialziation problem
(
lgx.snf.stanford.edu)
72:
Re: Problem ultratech 2001-04-25 21:13:25: Servo initialziation problem
(
martinez.snf.stanford.edu)
73:
Problem ultratech 2001-05-01 23:04:20: Frosty wafer run fails
(
lgx.snf.stanford.edu)
74:
Re: Problem ultratech 2001-05-01 23:04:20: Frosty wafer run fails
(
vilanova.snf.stanford.edu)
75:
Problem ultratech 2001-05-27 17:27:18: Reticle Vac. Error
(
lgx.snf.stanford.edu)
76:
Re: Problem ultratech 2001-05-27 17:27:18: Reticle Vac. Error
(
vilanova.snf.stanford.edu)
77:
Problem ultratech 2001-06-19 15:59:24: Reticle Vacuum Error
(
lgx.snf.stanford.edu)
78:
Re: Problem ultratech 2001-06-19 15:59:24: Reticle Vacuum Error
(
martinez.snf.stanford.edu)
79:
Problem ultratech 2001-06-20 07:01:08:
(
phimmer.snf.stanford.edu)
80:
Shutdown ultratech 2001-06-20 07:02:52:
(
phimmer.snf.stanford.edu)
81:
Re: Problem ultratech 2001-06-20 07:01:08: sys Re-booted, ok to use
(
vilanova.snf.stanford.edu)
82:
Re: Shutdown ultratech 2001-06-20 07:02:52: ok to use
(
vilanova.snf.stanford.edu)
83:
Problem ultratech 2001-06-22 19:21:22: computer is OFF
(
amol.snf.stanford.edu)
84:
Re: Problem ultratech 2001-06-22 19:21:22: computer is OFF
(
vilanova.snf.stanford.edu)
85:
Shutdown ultratech 2001-07-08 13:27:57: computer is OFF
(
amol.snf.stanford.edu)
86:
Re: Shutdown ultratech 2001-07-08 13:27:57: computer is OFF
(
vilanova.snf.stanford.edu)
87:
Problem ultratech 2001-07-14 16:30:46: laser error
(
lgx.snf.stanford.edu)
88:
Re: Problem ultratech 2001-07-14 16:30:46: laser error
(
vilanova.snf.stanford.edu)
89:
Problem ultratech 2001-07-16 22:16:29: chuck vacuum error & computer problem
(
lgx.snf.stanford.edu)
90:
Re: Problem ultratech 2001-07-16 22:16:29: chuck vacuum error & computer problem
(
martinez.snf.stanford.edu)
91:
Shutdown ultratech 2001-07-20 01:21:40: laser error, servos disabled
(
hector.snf.stanford.edu)
92:
Re: Shutdown ultratech 2001-07-20 01:21:40: Lase off
(
vilanova.snf.stanford.edu)
93:
Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled
(
hector.snf.stanford.edu)
94:
Re: Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled
(
vilanova.snf.stanford.edu)
95:
Re: Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled
(
vilanova.snf.stanford.edu)
96:
Comment ultratech 2001-08-02 16:54:11: shutter not opening
(
gyama.snf.stanford.edu)
97:
Problem ultratech 2001-08-02 16:54:45: shutter not opening
(
gyama.snf.stanford.edu)
98:
Re: Problem ultratech 2001-08-02 16:54:45: shutter not opening
(
martinez.snf.stanford.edu)
99:
Problem ultratech 2001-08-03 10:07:38: shutter not opening
(
gyama.snf.stanford.edu)