Messages 0xx


01: Problem ultratech: error during align and stage went crazy ((none))
02: Problem ultratech: freezes in middle of wafer exposure sequence (per S.Minne) ((none))
03: Problem Clear ultratech: ((none))
04: Problem ultratech: Problem in reticle alignment (Frosty wafer) (frankliu.snf.stanford.edu)
05: Shutdown ultratech: ret not following stage in load, vacuum his audible (aaronp.snf.stanford.edu)
06: Problem Clear ultratech: (martinez.snf.stanford.edu)
07: Shutdown Clear ultratech: (martinez.snf.stanford.edu)
08: Problem ultratech: output loader errors after 7 or so wafers. This is a consistent problem. (sminne.snf.stanford.edu)
09: Problem Clear ultratech: (martinez.snf.stanford.edu)
10: Problem ultratech: SERVO DISABLED (amol.snf.stanford.edu)
11: Shutdown ultratech: servo disabled-wafer and mask stuck in machine (phimmer.snf.stanford.edu)
12: Shutdown Clear ultratech: servo disable (prisbe.snf.stanford.edu)
13: Problem Clear ultratech: servo disable (prisbe.snf.stanford.edu)
14: Problem ultratech: stage initialization error-stage error (phimmer.snf.stanford.edu)
15: Shutdown ultratech: (martinez.snf.stanford.edu)
16: Problem Clear ultratech: (vilanova.snf.stanford.edu)
17: Shutdown Clear ultratech: (vilanova.snf.stanford.edu)
18: Shutdown ultratech: Servo Disabled (sshuto.snf.stanford.edu)
19: Shutdown Clear ultratech: (vilanova.snf.stanford.edu)
20: Problem ultratech: reticle vac. error (rtchang.snf.stanford.edu)
21: Problem Clear ultratech: clean reticle stage.. (cbaxter.snf.stanford.edu)
22: Problem ultratech: Won't load wafers (auto nor manual) (gyee.snf.stanford.edu)
23: Problem Clear ultratech: (martinez.snf.stanford.edu)
24: Problem ultratech: (beckwith.snf.stanford.edu)
25: Problem Clear ultratech: (martinez.snf.stanford.edu)
26: Shutdown ultratech: not laoding wafer properly, scratches resist, also, getting "Check wafer tilt" message. (greene.snf.stanford.edu)
27: Shutdown Clear ultratech: (martinez.snf.stanford.edu)
28: Shutdown ultratech: (martinez.snf.stanford.edu)
29: Shutdown Clear ultratech: (martinez.snf.stanford.edu)
30: Problem ultratech: "Servo disabled" error (ericp.snf.stanford.edu)
31: Problem Clear ultratech: (vilanova.snf.stanford.edu)
32: Problem ultratech: servo disabled (yiching.snf.stanford.edu)
33: Problem Clear ultratech: (vilanova.snf.stanford.edu)
34: Shutdown ultratech: Frosty wafer stuck at flat finder. (bowers.snf.stanford.edu)
35: Shutdown Clear ultratech: clear ultratech (martinez.snf.stanford.edu)
36: Problem ultratech: MaskNotAcceptedAgain(used_it_earlier!) (kalavade.snf.stanford.edu)
37: Problem Clear ultratech: (martinez.snf.stanford.edu)
38: Problem ultratech: will not load mask if inserted in normal way (sminne.snf.stanford.edu)
39: Problem Clear ultratech: uts#1 clear (martinez.snf.stanford.edu)
40: Problem ultratech: no power to computerDate: Nov 16, 2000 10:32:40 PM (grupp.snf.stanford.edu)
41: Problem ultratech: no power to computer (martinez.snf.stanford.edu)
42: Problem ultratech: problem uts1 (martinez.snf.stanford.edu)
43: Problem ultratech: problem uts1 (vilanova.snf.stanford.edu)
44: Problem ultratech: on my test wafer with the exposure matrix the 1st two columns of die are not developed out; this is the same pattern reported by Gladys earlier this week, or last week (I don't remember exactly when). (beckwith.snf.stanford.edu)
45: Problem ultratech: Lamp Change, Ok to use (vilanova.snf.stanford.edu)
46: Problem ultratech 2000-12-21 15:51:12: will not flash lamp (sminne.snf.stanford.edu)
47: Re: Problem ultratech 2000-12-21 15:51:12: will not flash lamp (vilanova.snf.stanford.edu)
48: Shutdown ultratech 2001-01-18 11:12:08: fast shutter (martinez.snf.stanford.edu)
49: Re: Shutdown ultratech 2001-01-18 11:12:08: fast shutter (martinez.snf.stanford.edu)
50: Problem ultratech 2001-02-14 00:55:02: ULTRATECH (sminne.snf.stanford.edu)
51: Problem ultratech 2001-02-14 00:58:23: Servos disable before Frosty Wafer Routine (sminne.snf.stanford.edu)
52: Shutdown ultratech 2001-02-14 00:59:30: Servos disable before Frosty Wafer Routine (sminne.snf.stanford.edu)
53: Re: Problem ultratech 2001-02-14 00:55:02: ULTRATECH (vilanova.snf.stanford.edu)
54: Re: Problem ultratech 2001-02-14 00:58:23: Servos disable before Frosty Wafer Routine (vilanova.snf.stanford.edu)
55: Re: Shutdown ultratech 2001-02-14 00:59:30: Servos disable before Frosty Wafer Routine (vilanova.snf.stanford.edu)
56: Problem ultratech 2001-03-04 22:34:18: Align light fluctuates (grupp.snf.stanford.edu)
57: Re: Problem ultratech 2001-03-04 22:34:18: Align light fluctuates (vilanova.snf.stanford.edu)
58: Comment ultratech 2001-03-08 22:01:12: uniblitz (martinez.snf.stanford.edu)
59: Shutdown ultratech 2001-03-20 23:19:51: servos disable-can't load reticle (hector.snf.stanford.edu)
60: Re: Shutdown ultratech 2001-03-20 23:19:51: servos disable-can't load reticle (martinez.snf.stanford.edu)
61: Problem ultratech 2001-04-07 11:59:39: wafer align error (lgx.snf.stanford.edu)
62: Problem ultratech 2001-04-07 16:02:21: Focus monitor D/A out of range (greene.snf.stanford.edu)
63: Shutdown ultratech 2001-04-09 14:52:19: Focus Problems need to do some adjustments (vilanova.snf.stanford.edu)
64: Re: Shutdown ultratech 2001-04-09 14:52:19: Focus Problems need to do some adjustments (martinez.snf.stanford.edu)
65: Re: Problem ultratech 2001-04-07 16:02:21: Focus monitor D/A out of range (martinez.snf.stanford.edu)
66: Re: Problem ultratech 2001-04-07 11:59:39: wafer align error (martinez.snf.stanford.edu)
67: Shutdown ultratech 2001-04-11 10:17:15: (beckwith.snf.stanford.edu)
68: Re: Shutdown ultratech 2001-04-11 10:17:15: Shutter Changed , tested, Working ok, ready to use (vilanova.snf.stanford.edu)
69: Shutdown ultratech 2001-04-19 01:58:43: bad commumication failure (aaronp.snf.stanford.edu)
70: Re: Shutdown ultratech 2001-04-19 01:58:43: bad commumication failure (vilanova.snf.stanford.edu)
71: Problem ultratech 2001-04-25 21:13:25: Servo initialziation problem (lgx.snf.stanford.edu)
72: Re: Problem ultratech 2001-04-25 21:13:25: Servo initialziation problem (martinez.snf.stanford.edu)
73: Problem ultratech 2001-05-01 23:04:20: Frosty wafer run fails (lgx.snf.stanford.edu)
74: Re: Problem ultratech 2001-05-01 23:04:20: Frosty wafer run fails (vilanova.snf.stanford.edu)
75: Problem ultratech 2001-05-27 17:27:18: Reticle Vac. Error (lgx.snf.stanford.edu)
76: Re: Problem ultratech 2001-05-27 17:27:18: Reticle Vac. Error (vilanova.snf.stanford.edu)
77: Problem ultratech 2001-06-19 15:59:24: Reticle Vacuum Error (lgx.snf.stanford.edu)
78: Re: Problem ultratech 2001-06-19 15:59:24: Reticle Vacuum Error (martinez.snf.stanford.edu)
79: Problem ultratech 2001-06-20 07:01:08: (phimmer.snf.stanford.edu)
80: Shutdown ultratech 2001-06-20 07:02:52: (phimmer.snf.stanford.edu)
81: Re: Problem ultratech 2001-06-20 07:01:08: sys Re-booted, ok to use (vilanova.snf.stanford.edu)
82: Re: Shutdown ultratech 2001-06-20 07:02:52: ok to use (vilanova.snf.stanford.edu)
83: Problem ultratech 2001-06-22 19:21:22: computer is OFF (amol.snf.stanford.edu)
84: Re: Problem ultratech 2001-06-22 19:21:22: computer is OFF (vilanova.snf.stanford.edu)
85: Shutdown ultratech 2001-07-08 13:27:57: computer is OFF (amol.snf.stanford.edu)
86: Re: Shutdown ultratech 2001-07-08 13:27:57: computer is OFF (vilanova.snf.stanford.edu)
87: Problem ultratech 2001-07-14 16:30:46: laser error (lgx.snf.stanford.edu)
88: Re: Problem ultratech 2001-07-14 16:30:46: laser error (vilanova.snf.stanford.edu)
89: Problem ultratech 2001-07-16 22:16:29: chuck vacuum error & computer problem (lgx.snf.stanford.edu)
90: Re: Problem ultratech 2001-07-16 22:16:29: chuck vacuum error & computer problem (martinez.snf.stanford.edu)
91: Shutdown ultratech 2001-07-20 01:21:40: laser error, servos disabled (hector.snf.stanford.edu)
92: Re: Shutdown ultratech 2001-07-20 01:21:40: Lase off (vilanova.snf.stanford.edu)
93: Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled (hector.snf.stanford.edu)
94: Re: Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled (vilanova.snf.stanford.edu)
95: Re: Shutdown ultratech 2001-07-20 15:38:29: laser error, servos disabled (vilanova.snf.stanford.edu)
96: Comment ultratech 2001-08-02 16:54:11: shutter not opening (gyama.snf.stanford.edu)
97: Problem ultratech 2001-08-02 16:54:45: shutter not opening (gyama.snf.stanford.edu)
98: Re: Problem ultratech 2001-08-02 16:54:45: shutter not opening (martinez.snf.stanford.edu)
99: Problem ultratech 2001-08-03 10:07:38: shutter not opening (gyama.snf.stanford.edu)