Messages 0xx


01: Shutdown ultratech2: (martinez.snf.stanford.edu)
02: Shutdown ultratech2: (emes.snf.stanford.edu)
03: Shutdown Clear ultratech2: (martinez.snf.stanford.edu)
04: Shutdown Clear ultratech2: (martinez.snf.stanford.edu)
05: Shutdown ultratech2: (martinez.snf.stanford.edu)
06: Shutdown Clear ultratech2: (martinez.snf.stanford.edu)
07: Problem ultratech2: Reticle align failed (amol.snf.stanford.edu)
08: Problem Clear ultratech2: (vilanova.snf.stanford.edu)
09: Problem ultratech2: frosty wafer failure on ultratech 2 (emes.snf.stanford.edu)
10: Problem Clear ultratech2: (vilanova.snf.stanford.edu)
11: Problem ultratech2: ultratech 2 motor#4 problem (pbrink.snf.stanford.edu)
12: Shutdown ultratech2: (vilanova.snf.stanford.edu)
13: Shutdown Clear ultratech2: (martinez.snf.stanford.edu)
14: Problem Clear ultratech2: (martinez.snf.stanford.edu)
15: Problem ultratech2: "rskew" error when loading mask¨ (ericp.snf.stanford.edu)
16: Problem Clear ultratech2: uts2 (martinez.snf.stanford.edu)
17: Shutdown ultratech2: poor focus (martinez.snf.stanford.edu)
18: Shutdown Clear ultratech2: (martinez.snf.stanford.edu)
19: Problem ultratech2: servo disabled (rtchang.snf.stanford.edu)
20: Problem Clear ultratech2: clear uts2 (martinez.snf.stanford.edu)
21: Shutdown ultratech2: shutdown ultratech2 (martinez.snf.stanford.edu)
22: Shutdown Clear ultratech2: (vilanova.snf.stanford.edu)
23: Shutdown ultratech2: bad lamp power supply (vilanova.snf.stanford.edu)
24: Shutdown ultratech2: bad lamp power supply (martinez.snf.stanford.edu)
25: Shutdown ultratech2: laser error (aaronp.snf.stanford.edu)
26: Shutdown ultratech2: laser error (martinez.snf.stanford.edu)
27: Problem ultratech2 2001-03-02 19:25:26: ultratech2: PMT X-right skew? (pbrink.snf.stanford.edu)
28: Shutdown ultratech2 2001-03-05 21:33:25: uts2 shutdown (martinez.snf.stanford.edu)
29: Re: Shutdown ultratech2 2001-03-05 21:33:25: uts2 up (martinez.snf.stanford.edu)
30: Re: Problem ultratech2 2001-03-02 19:25:26: (martinez.snf.stanford.edu)
31: Shutdown ultratech2 2001-09-27 18:25:46: Focus D/A Out of Range (greene.snf.stanford.edu)
32: Re: Shutdown ultratech2 2001-09-27 18:25:46: Focus D/A Out of Range (vilanova.snf.stanford.edu)
33: Shutdown ultratech2 2001-10-25 13:39:31: Power Supply Out (vilanova.snf.stanford.edu)
34: Re: Shutdown ultratech2 2001-10-25 13:39:31: Power Supply Out (martinez.snf.stanford.edu)
35: Shutdown ultratech2 2001-11-05 16:10:40: this thing wont stop sucking (pcastle.snf.stanford.edu)
36: Re: Shutdown ultratech2 2001-11-05 16:10:40: this thing wont stop sucking (martinez.snf.stanford.edu)
37: Shutdown ultratech2 2002-03-27 04:15:46: exposure error - lamp variation (hector.snf.stanford.edu)
38: Re: Shutdown ultratech2 2002-03-27 04:15:46: exposure error - lamp variation (martinez.snf.stanford.edu)
39: Problem ultratech2 2002-04-11 02:03:08: crosshairs off (grupp.snf.stanford.edu)
40: Re: Problem ultratech2 2002-04-11 02:03:08: crosshairs off (vilanova.snf.stanford.edu)
41: Shutdown ultratech2 2002-05-20 21:23:04: LASER ERROR: servo disabled (amol.snf.stanford.edu)
42: Re: Shutdown ultratech2 2002-05-20 21:23:04: LASER ERROR: servo disabled (vilanova.snf.stanford.edu)
43: Shutdown ultratech2 2002-06-04 07:59:09: shutdown (martinez.snf.stanford.edu)
44: Re: Shutdown ultratech2 2002-06-04 07:59:09: shutdown (martinez.snf.stanford.edu)
45: Shutdown ultratech2 2002-06-17 09:01:10: novac (martinez.snf.stanford.edu)
46: Re: Shutdown ultratech2 2002-06-17 09:01:10: novac (mahnaz.snf.stanford.edu)
47: Shutdown ultratech2 2002-07-08 10:36:01: lamp change (vilanova.snf.stanford.edu)
48: Re: Shutdown ultratech2 2002-07-08 10:36:01: lamp change (vilanova.snf.stanford.edu)
49: Shutdown ultratech2 2002-07-23 01:57:30: laser error: stage hit; servo problem (hector.snf.stanford.edu)
50: Re: Shutdown ultratech2 2002-07-23 01:57:30: laser error: stage hit; servo problem (martinez.snf.stanford.edu)
51: Problem ultratech2 2002-07-26 16:10:07: Vmotor stage loose (grupp.snf.stanford.edu)
52: Re: Problem ultratech2 2002-07-26 16:10:07: Vmotor stage loose (martinez.snf.stanford.edu)
53: Problem ultratech2 2002-08-02 16:31:55: water leakage in litho spin/rinse dryer (emes.snf.stanford.edu)
54: Re: Problem ultratech2 2002-08-02 16:31:55: water leakage in litho spin/rinse dryer (vilanova.snf.stanford.edu)
55: Problem ultratech2 2002-09-20 19:05:10: focus monitor A/D problem (hector.snf.stanford.edu)
56: Re: Problem ultratech2 2002-09-20 19:05:10: focus monitor A/D problem (martinez.snf.stanford.edu)
57: Problem ultratech2 2003-05-23 09:31:49: Report Problem for ultratech2 (gyama.snf.stanford.edu)
58: Problem ultratech2 2003-05-24 15:46:59: Report Problem for ultratech2 (chion.snf.stanford.edu)
59: Re: Problem ultratech2 2003-05-24 15:46:59: Report Clear for ultratech2 (martinez.snf.stanford.edu)
60: Re: Problem ultratech2 2003-05-23 09:31:49: Report Clear for ultratech2 (martinez.snf.stanford.edu)
61: Problem ultratech2 2003-05-31 12:05:08: Report Problem for ultratech2 (chion.snf.stanford.edu)
62: Re: Problem ultratech2 2003-05-31 12:05:08: Report Clear for ultratech2 (martinez.snf.stanford.edu)
63: Shutdown ultratech2 2003-10-21 10:05:31: Report Shutdown for ultratech2 (sigari.snf.stanford.edu)
64: Re: Shutdown ultratech2 2003-10-21 10:05:31: Report Clear for ultratech2 (vilanova.snf.stanford.edu)
65: Problem ultratech2 2004-02-10 15:34:35: focus issue (pbrink.snf.stanford.edu)
66: Re: Problem ultratech2 2004-02-10 15:34:35: focus issue (martinez.snf.stanford.edu)
67: Problem ultratech2 2004-03-05 13:05:44: Reticles won't load (cmfaulkn.snf.stanford.edu)
68: Re: Problem ultratech2 2004-03-05 13:05:44: Reticles won't load (vilanova.snf.stanford.edu)
69: Shutdown ultratech2 2004-03-22 16:03:13: shutdown (martinez.snf.stanford.edu)
70: Re: Shutdown ultratech2 2004-03-22 16:03:13: shutdown (martinez.snf.stanford.edu)
71: Problem ultratech2 SNF 2004-07-15 16:44:41: crushed wafers (grupp.snf.stanford.edu)
72: Shutdown ultratech2 SNF 2004-07-15 16:46:00: crushed wafer (grupp.snf.stanford.edu)
73: Re: Problem ultratech2 SNF 2004-07-15 16:44:41: crushed wafers (vilanova.snf.stanford.edu)
74: Re: Shutdown ultratech2 SNF 2004-07-15 16:46:00: crushed wafer (vilanova.snf.stanford.edu)
75: Problem ultratech2 SNF 2004-10-04 11:50:15: Right PMT (mpyle1.snf.stanford.edu)
76: Problem ultratech2 SNF 2004-10-11 17:59:24: Right PMT (pethe.snf.stanford.edu)
77: Re: Problem ultratech2 SNF 2004-10-11 17:59:24: Right PMT (martinez.snf.stanford.edu)
78: Re: Problem ultratech2 SNF 2004-10-04 11:50:15: Right PMT (martinez.snf.stanford.edu)
79: Problem ultratech2 SNF 2004-10-27 17:34:07: wouldn't take frosty (mpyle1.snf.stanford.edu)
80: Re: Problem ultratech2 SNF 2004-10-27 17:34:07: wouldn't take frosty (vilanova.snf.stanford.edu)
81: Problem ultratech2 SNF 2004-11-07 17:02:07: Ret Align (pethe.snf.stanford.edu)
82: Re: Problem ultratech2 SNF 2004-11-07 17:02:07: Ret Align (martinez.snf.stanford.edu)
83: Shutdown ultratech2 SNF 2004-11-09 17:55:40: ut2 error: "Servo Disabled" (hopcroft.snf.stanford.edu)
84: Re: Shutdown ultratech2 SNF 2004-11-09 17:55:40: ut2 error: "Servo Disabled" (vilanova.snf.stanford.edu)
85: Problem ultratech2 SNF 2004-12-14 12:44:18: uniformity problem (clow.snf.stanford.edu)
86: Re: Problem ultratech2 SNF 2004-12-14 12:44:18: uniformity problem (martinez.snf.stanford.edu)
87: Problem ultratech2 SNF 2005-01-31 12:20:05: no light on the scope (ratiug.snf.stanford.edu)
88: Re: Problem ultratech2 SNF 2005-01-31 12:20:05: no light on the scope (vilanova.snf.stanford.edu)
89: Shutdown ultratech2 SNF 2005-02-03 14:53:25: shutdown (martinez.snf.stanford.edu)
90: Re: Shutdown ultratech2 SNF 2005-02-03 14:53:25: shutdown (martinez.snf.stanford.edu)
91: Shutdown ultratech2 SNF 2005-02-11 09:30:47: shutdown (martinez.snf.stanford.edu)
92: Re: Shutdown ultratech2 SNF 2005-02-11 09:30:47: shutdown (martinez.snf.stanford.edu)
93: Shutdown ultratech2 SNF 2005-03-04 07:12:44: removed power supply (vilanova.snf.stanford.edu)
94: Re: Shutdown ultratech2 SNF 2005-03-04 07:12:44: removed power supply (vilanova.snf.stanford.edu)
95: Shutdown ultratech2 SNF 2005-03-11 14:54:27: shutdown (martinez.snf.stanford.edu)
96: Re: Shutdown ultratech2 SNF 2005-03-11 14:54:27: shutdown (martinez.snf.stanford.edu)
97: Shutdown ultratech2 SNF 2005-03-18 15:51:07: shutdown power supp (martinez.snf.stanford.edu)
98: Re: Shutdown ultratech2 SNF 2005-03-18 15:51:07: shutdown power supp (martinez.snf.stanford.edu)
99: Problem ultratech2 SNF 2005-05-11 11:14:02: chuck vaccum error (ratiug.snf.stanford.edu)