Messages 0xx


01: Problem wbnonmetal: right QDR ((none))
02: Problem wbnonmetal: Au cont. Right side photoresist strip and dump rinse ((none))
03: Problem wbnonmetal: Possible Au. Cont from pecvd nitride in dump rinser-photo resist side of bench ((none))
04: Problem wbnonmetal: ((none))
05: Problem wbnonmetal: ((none))
06: Problem wbnonmetal: ((none))
07: Problem wbnonmetal: wafer floated out of cassette...please do not use until drained & recovered ((none))
08: Problem wbnonmetal: left dump rinser runs constantly, will not shut off. Linda W. ((none))
09: Problem Clear wbnonmetal: ((none))
10: Problem Clear wbnonmetal: making maintenance problem report. Len ((none))
11: Problem wbnonmetal: Wetbench NonMetal.-.Problem ((none))
12: Problem Clear wbnonmetal: ((none))
13: Problem wbnonmetal: 20:1 BOE drain is slow (amol.snf.stanford.edu)
14: Shutdown wbnonmetal: need to reconnect air line for dump rinser (cbaxter.snf.stanford.edu)
15: Shutdown Clear wbnonmetal: valve installed for h2o and test for leak's. (cbaxter.snf.stanford.edu)
16: Problem Clear wbnonmetal: bath drained fine... (cbaxter.snf.stanford.edu)
17: Problem Clear wbnonmetal: (cbaxter.snf.stanford.edu)
18: Shutdown wbnonmetal: leaking water on fitting (cbaxter.snf.stanford.edu)
19: Shutdown Clear wbnonmetal: changed cracked elbow fitting. (cbaxter.snf.stanford.edu)
20: Problem wbnonmetal: spin dryer does not work (tuenishi.snf.stanford.edu)
21: Problem Clear wbnonmetal: controller 15amp fuse blown. blown fuse stuck inside the fuse holder. had to chnaged controller and tested (cbaxter.snf.stanford.edu)
22: Problem wbnonmetal: L dump rinse bad (hopcroft.snf.stanford.edu)
23: Problem Clear wbnonmetal: fairchild sensor was bad causing it dump before bath is at level. (cbaxter.snf.stanford.edu)
24: Problem wbnonmetal: Left dump rinser keeps flowing when in STOP mode. Apparently doesn't sense level. Press STOP and DUMP DOOR to prevent continuous flow. (bowers.snf.stanford.edu)
25: Problem wbnonmetal: left dump rinser not working (phimmer.snf.stanford.edu)
26: Problem wbnonmetal: spin dryer not spinning (phimmer.snf.stanford.edu)
27: Problem Clear wbnonmetal: changed fairchild sensor and test.... (cbaxter.snf.stanford.edu)
28: Problem Clear wbnonmetal: changed fairchild sesnor.. (cbaxter.snf.stanford.edu)
29: Problem Clear wbnonmetal: spin dryer is working fine. i cycle the system 3x without a problem.. (cbaxter.snf.stanford.edu)
30: Problem wbnonmetal: Spin dryer not working (true.snf.stanford.edu)
31: Problem Clear wbnonmetal: changed bad controller.. (cbaxter.snf.stanford.edu)
32: Problem wbnonmetal: left hand dump rinser flowing water when it should be stopped (phimmer.snf.stanford.edu)
33: Problem Clear wbnonmetal: adjusted air supply for hi h20 flow. (cbaxter.snf.stanford.edu)
34: Problem wbnonmetal: Left DR keeps cycling (king.snf.stanford.edu)
35: Problem Clear wbnonmetal: adjusted air pressure for high level sensor (cbaxter.snf.stanford.edu)
36: Problem wbnonmetal: right dump rinser won't start (tkramer.snf.stanford.edu)
37: Problem Clear wbnonmetal: intermitten controller it working for now, will need a new controller if it act up again.. (cbaxter.snf.stanford.edu)
38: Problem wbnonmetal: rt dmp rinser won't start (lindaw.snf.stanford.edu)
39: Problem wbnonmetal: left dump rinser won't stop unless dumpdoor (lindaw.snf.stanford.edu)
40: Problem Clear wbnonmetal: set high flow sensor air pressure down to 2psi.. (cbaxter.snf.stanford.edu)
41: Problem Clear wbnonmetal: repair bad controller (cbaxter.snf.stanford.edu)
42: Problem wbnonmetal: (snodgras.snf.stanford.edu)
43: Problem wbnonmetal: Hose on water spray gun is frayed (greene.snf.stanford.edu)
44: Problem Clear wbnonmetal: no leak found. (booth.snf.stanford.edu)
45: Problem wbnonmetal: (vik.snf.stanford.edu)
46: Problem Clear wbnonmetal: replaced thermocouple (gaul.snf.stanford.edu)
47: Problem wbnonmetal: Broken wafer in Left H2SO4 (amol.snf.stanford.edu)
48: Problem wbnonmetal: Something floating in Right H2SO4 (amol.snf.stanford.edu)
49: Problem Clear wbnonmetal: Removed the broken pieces. Decontaminated the sink, and pour fresh acid. (jgarate.snf.stanford.edu)
50: Problem Clear wbnonmetal: Decontaminated sink, and pour fresh chemical. (jgarate.snf.stanford.edu)
51: Problem wbnonmetal: right bath is contaminated by paper (linan.snf.stanford.edu)
52: Problem Clear wbnonmetal: Right side has been decontaminated, okay to use. (jgarate.snf.stanford.edu)
53: Problem wbnonmetal: Left H2SO4: some white coloured stuff floating (amol.snf.stanford.edu)
54: Problem Clear wbnonmetal: bath has been decontaminated, and pour fresh chemical (jgarate.snf.stanford.edu)
55: Problem wbnonmetal: left dump/rinse does not spray or buble (aaronp.snf.stanford.edu)
56: Problem Clear wbnonmetal: cycle qd seem to be working fine (cbaxter.snf.stanford.edu)
57: Problem wbnonmetal: right hot pot has bad heat sensor (seymour.snf.stanford.edu)
58: Problem wbnonmetal: quartz sheath on left sulfuric pot is also broken (greene.snf.stanford.edu)
59: Comment wbnonmetal: left hot bath is up (seymour.snf.stanford.edu)
60: Shutdown wbnonmetal: possible contamination (amol.snf.stanford.edu)
61: Shutdown Clear wbnonmetal: (jgarate.snf.stanford.edu)
62: Problem wbnonmetal: no spray in the left dump rinser (beckwith.snf.stanford.edu)
63: Problem wbnonmetal: right hot pot is starting to overflow. If this is sulfuric acid i would suggest figuring out how to aspirate it. (beckwith.snf.stanford.edu)
64: Problem wbnonmetal: Rt hand hot pot won't drain. Won't heat up. (latta.snf.stanford.edu)
65: Problem wbnonmetal: Rt hand hot pot won't drain. Won't heat up. (cbaxter.snf.stanford.edu)
66: Problem wbnonmetal: no spray in the left dump rinser (cbaxter.snf.stanford.edu)
67: Problem wbnonmetal: ok now (seymour.snf.stanford.edu)
68: Problem wbnonmetal: replaced both sensors (seymour.snf.stanford.edu)
69: Problem wbnonmetal: Replaced both left and right sensors (seymour.snf.stanford.edu)
70: Problem wbnonmetal 2001-01-18 15:47:19: left dump riser not working (franklin.snf.stanford.edu)
71: Re: Problem wbnonmetal 2001-01-18 15:47:19: left dump riser not working (cbaxter.snf.stanford.edu)
72: Problem wbnonmetal 2001-01-24 12:39:04: control panel lights on the left dump rinser have slide down so you cannot see them. People are leaving the dump rinser with the dump door open because the light appears to be off. Well, all of the li (beckwith.snf.stanford.edu)
73: Problem wbnonmetal 2001-01-24 16:22:26: BOE 6:1 contaminated (hopcroft.snf.stanford.edu)
74: Re: Problem wbnonmetal 2001-01-24 12:39:04: control panel lights on the left dump rinser have slide down so you cannot see them. People are leaving the dump rinser with the dump door open because the light appears to be off. Well, all of the li (cbaxter.snf.stanford.edu)
75: Re: Problem wbnonmetal 2001-01-24 16:22:26: BOE 6:1 has been decontaminated, and have pour fresh chemical. Okay to use! (jgarate.snf.stanford.edu)
76: Problem wbnonmetal 2001-01-30 13:03:57: Left DR running continuously (lindaw.snf.stanford.edu)
77: Problem wbnonmetal 2001-01-30 14:19:54: wafer pieces in L sulfuric bath (hopcroft.snf.stanford.edu)
78: Re: Problem wbnonmetal 2001-01-30 13:03:57: Left DR running continuously (cbaxter.snf.stanford.edu)
79: Problem wbnonmetal 2001-01-31 10:06:33: Lf side dumpriner in constant 'flush' mode. (latta.snf.stanford.edu)
80: Re: Problem wbnonmetal 2001-01-31 10:06:33: Lf side dumpriner in constant 'flush' mode. (latta.snf.stanford.edu)
81: Re: Problem wbnonmetal 2001-01-30 14:19:54: wafer pieces in L sulfuric bath (cbaxter.snf.stanford.edu)
82: Problem wbnonmetal 2001-02-07 06:55:32: no power to spin rinse dryers (lindaw.snf.stanford.edu)
83: Re: Problem wbnonmetal 2001-02-07 06:55:32: Fixed by Ray and Mike (jgarate.snf.stanford.edu)
84: Problem wbnonmetal 2001-02-15 17:18:40: left dump rinser is not working (pzwahlen.snf.stanford.edu)
85: Re: Problem wbnonmetal 2001-02-15 17:18:40: left dump rinser is not working (jhaydon.snf.stanford.edu)
86: Problem wbnonmetal 2001-03-01 20:50:59: Si pieces in l sulfuric bath (hopcroft.snf.stanford.edu)
87: Re: Problem wbnonmetal 2001-03-01 20:50:59: Si pieces in l sulfuric bath (latta.snf.stanford.edu)
88: Problem wbnonmetal 2001-03-15 07:28:36: rust visible on spin dryer rotor (greene.snf.stanford.edu)
89: Re: Problem wbnonmetal 2001-03-15 07:28:36: rust visible on spin dryer rotor (seymour.snf.stanford.edu)
90: Problem wbnonmetal 2001-04-03 15:28:48: 4/03/2001 3:30 pm 90%sulfuric/10% hydrogen per. bath- broken wafer piece in bath waiting for temp. to drop in order to drain (wittbrod.snf.stanford.edu)
91: Re: Problem wbnonmetal 2001-04-03 15:28:48: 4/03/2001 3:30 pm 90%sulfuric/10% hydrogen per. bath- broken wafer piece in bath waiting for temp. to drop in order to drain (booth.snf.stanford.edu)
92: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust (seymour.snf.stanford.edu)
93: Re: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust (jhaydon.snf.stanford.edu)
94: Problem wbnonmetal 2001-04-30 17:30:03: controler and possible contamination (jhaydon.snf.stanford.edu)
95: Re: Problem wbnonmetal 2001-04-30 17:30:03: controler and possible contamination (jhaydon.snf.stanford.edu)
96: Problem wbnonmetal 2001-07-11 12:38:07: (beckwith.snf.stanford.edu)
97: Problem wbnonmetal 2001-07-11 15:31:42: spin dryer broken (kjliu.snf.stanford.edu)
98: Comment wbnonmetal 2001-07-17 16:46:22: The Srd on the nonmetals wet bench will be off line until Thrusday or Friday the controller is not working and is being repaired (jhaydon.snf.stanford.edu)
99: Problem wbnonmetal 2001-07-18 19:09:04: Spin Dryer Leaks (mbartsch.snf.stanford.edu)