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Messages 0xx
01:
Problem wbsilicide: HCl pot has over heated, left dump rinse does not work
(
(none)
)
02:
Problem wbsilicide: Thermocouple in 1:1:1 HCl bath at wbsilicide bench is malfunctioning
(
(none)
)
03:
Problem wbsilicide: left dump rinser and TC in 5:1:1
(
ibrahim.snf.stanford.edu
)
04:
Problem wbsilicide: HCl TC is VERY WHACKY!!! L RInser too
(
lindaw.snf.stanford.edu
)
05:
Problem Clear wbsilicide: Cleaned connection
(
gaul.snf.stanford.edu
)
06:
Problem Clear wbsilicide: Cleaned T/C connection
(
gaul.snf.stanford.edu
)
07:
Problem Clear wbsilicide: Bad T/C connection
(
gaul.snf.stanford.edu
)
08:
Problem Clear wbsilicide: Problem already written up
(
gaul.snf.stanford.edu
)
09:
Problem Clear wbsilicide: Problem already written up
(
gaul.snf.stanford.edu
)
10:
Problem Clear wbsilicide: Problem already written up
(
gaul.snf.stanford.edu
)
11:
Problem Clear wbsilicide: Bad T/C connection
(
gaul.snf.stanford.edu
)
12:
Problem Clear wbsilicide: Bad T/C connection
(
gaul.snf.stanford.edu
)
13:
Problem Clear wbsilicide: Cleaned T/C connection
(
gaul.snf.stanford.edu
)
14:
Problem wbsilicide: H2O2/Hcl thermocouple broken
(
hopcroft.snf.stanford.edu
)
15:
Problem wbsilicide: reset thermocouple setting, okay to use.
(
jgarate.snf.stanford.edu
)
16:
Re: Problem wbsilicide 2000-03-01 10:48:10: left QD door opens ok
(
seymour.snf.stanford.edu
)
17:
Problem wbsilicide 2001-01-31 11:17:43: Right dump rinse doesn't work
(
ibrahim.snf.stanford.edu
)
18:
Problem wbsilicide 2001-02-06 02:22:17: H2O2/HCl falsely indicating low liquid level
(
ibrahim.snf.stanford.edu
)
19:
Re: Problem wbsilicide 2001-01-31 11:17:43: Right dump rinse doesn't work
(
jhaydon.snf.stanford.edu
)
20:
Problem wbsilicide 2001-02-17 10:20:53: h2o2/hcl still falsely indicating low liquid level
(
ee410a.snf.stanford.edu
)
21:
Re: Problem wbsilicide 2001-02-17 10:20:53: h2o2/hcl still falsely indicating low liquid level
(
booth.snf.stanford.edu
)
22:
Re: Problem wbsilicide 2001-02-06 02:22:17: H2O2/HCl falsely indicating low liquid level
(
booth.snf.stanford.edu
)
23:
Shutdown wbsilicide 2001-03-01 17:44:14: Possible contamination of H2SO4 9:1
(
chion.snf.stanford.edu
)
24:
Re: Shutdown wbsilicide 2001-03-01 17:44:14: Possible contamination of H2SO4 9:1
(
rcrane.snf.stanford.edu
)
25:
Problem wbsilicide 2001-03-02 20:08:24: spin rinse dryer stuck in rinse
(
cmfaulkn.snf.stanford.edu
)
26:
Problem wbsilicide 2001-03-03 20:18:19: door on dryer doesn't seal
(
cmfaulkn.snf.stanford.edu
)
27:
Comment wbsilicide 2001-03-05 12:58:53:
(
dpant.snf.stanford.edu
)
28:
Problem wbsilicide 2001-03-05 13:24:19:
(
dpant.snf.stanford.edu
)
29:
Re: Problem wbsilicide 2001-03-05 13:24:19:
(
seymour.snf.stanford.edu
)
30:
Re: Problem wbsilicide 2001-03-03 20:18:19: door on dryer doesn't seal
(
seymour.snf.stanford.edu
)
31:
Re: Problem wbsilicide 2001-03-02 20:08:24: spin rinse dryer stuck in rinse
(
seymour.snf.stanford.edu
)
32:
Problem wbsilicide 2001-03-23 14:16:21: 6:1 won't drain
(
pruitt.snf.stanford.edu
)
33:
Shutdown wbsilicide 2001-03-26 08:57:30: boe drain
(
jhaydon.snf.stanford.edu
)
34:
Re: Shutdown wbsilicide 2001-03-26 08:57:30: boe drain
(
jhaydon.snf.stanford.edu
)
35:
Re: Problem wbsilicide 2001-03-23 14:16:21: 6:1 won't drain
(
jhaydon.snf.stanford.edu
)
36:
Problem wbsilicide 2001-06-23 19:28:57: HCl level sensor defect
(
zappe.snf.stanford.edu
)
37:
Re: Problem wbsilicide 2001-06-23 19:28:57: HCl level sensor defect
(
seymour.snf.stanford.edu
)
38:
Comment wbsilicide 2001-07-03 12:57:10: timer
(
anojeh.snf.stanford.edu
)
39:
Comment wbsilicide 2001-07-03 16:23:55: spindryer resistivity=14.5, did not go up to 16
(
ngau.snf.stanford.edu
)
40:
Problem wbsilicide 2001-08-01 17:49:04: 6:1 BOE leak
(
yehfrank.snf.stanford.edu
)
41:
Shutdown wbsilicide 2001-08-25 07:53:32: facility
(
rcrane.snf.stanford.edu
)
42:
Re: Shutdown wbsilicide 2001-08-25 07:53:32: facility
(
rcrane.snf.stanford.edu
)
43:
Re: Problem wbsilicide 2001-08-01 17:49:04: 6:1 BOE leak
(
jhaydon.snf.stanford.edu
)
44:
Problem wbsilicide 2001-09-20 10:49:12: dryer does reach 16MOhm
(
takamura.snf.stanford.edu
)
45:
Re: Problem wbsilicide 2001-09-20 10:49:12: dryer does reach 16MOhm
(
jhaydon.snf.stanford.edu
)
46:
Problem wbsilicide 2001-10-04 09:30:50: 4:1 sulfuric bath is not draining
(
ychliu.snf.stanford.edu
)
47:
Shutdown wbsilicide 2001-10-05 11:55:01:
(
balaji.snf.stanford.edu
)
48:
Re: Problem wbsilicide 2001-10-04 09:30:50: 4:1 sulfuric bath is not draining
(
jhaydon.snf.stanford.edu
)
49:
Re: Shutdown wbsilicide 2001-10-05 11:55:01:
(
jhaydon.snf.stanford.edu
)
50:
Problem wbsilicide 2002-01-10 11:45:30: spin dryer keeps on turning on
(
gladys.snf.stanford.edu
)
51:
Problem wbsilicide 2002-01-17 12:31:12: Silicide spin-rinse dryer does not autoswitch
(
dpant.snf.stanford.edu
)
52:
Problem wbsilicide 2002-02-14 15:54:13: 6:1 BOE will not drain
(
disney.snf.stanford.edu
)
53:
Re: Problem wbsilicide 2002-01-10 11:45:30: spin dryer keeps on turning on
(
jhaydon.snf.stanford.edu
)
54:
Re: Problem wbsilicide 2002-02-14 15:54:13: 6:1 BOE will not drain
(
jhaydon.snf.stanford.edu
)
55:
Re: Problem wbsilicide 2002-01-17 12:31:12: Silicide spin-rinse dryer does not autoswitch
(
jhaydon.snf.stanford.edu
)
56:
Problem wbsilicide 2002-04-10 16:44:03: spin dryer
(
dpant.snf.stanford.edu
)
57:
Re: Problem wbsilicide 2002-04-10 16:44:03: spin dryer
(
jhaydon.snf.stanford.edu
)
58:
Problem wbsilicide 2002-05-03 09:23:54: 6:1 BOE tank leaks
(
yyao.snf.stanford.edu
)
59:
Problem wbsilicide 2002-05-06 17:20:01: spin drier won't switch to dry cycle
(
mcconnel.snf.stanford.edu
)
60:
Re: Problem wbsilicide 2002-05-06 17:20:01: spin drier won't switch to dry cycle
(
jhaydon.snf.stanford.edu
)
61:
Re: Problem wbsilicide 2002-05-03 09:23:54: 6:1 BOE tank leaks
(
jhaydon.snf.stanford.edu
)
62:
Problem wbsilicide 2002-05-27 17:57:43: 6:1 BOE tank slow leak
(
liji.snf.stanford.edu
)
63:
Re: Problem wbsilicide 2002-05-27 17:57:43: 6:1 BOE tank slow leak
(
jhaydon.snf.stanford.edu
)
64:
Shutdown wbsilicide 2002-06-06 09:57:08: contaminated
(
cmfaulkn.snf.stanford.edu
)
65:
Re: Shutdown wbsilicide 2002-06-06 09:57:08: contaminated
(
latta.snf.stanford.edu
)
66:
Shutdown wbsilicide 2002-07-02 06:30:43: scrubber work
(
tberg.snf.stanford.edu
)
67:
Re: Shutdown wbsilicide 2002-07-02 06:30:43: scrubber work
(
seymour.snf.stanford.edu
)
68:
Shutdown wbsilicide 2002-07-03 06:30:47: scrubber work
(
tberg.snf.stanford.edu
)
69:
Re: Shutdown wbsilicide 2002-07-03 06:30:47: scrubber work
(
jhaydon.snf.stanford.edu
)
70:
Problem wbsilicide 2002-07-08 16:42:41: SRD
(
beckwith.snf.stanford.edu
)
71:
Problem wbsilicide 2002-07-08 18:36:29: No HF pots available for usage
(
gladys.snf.stanford.edu
)
72:
Re: Problem wbsilicide 2002-07-08 16:42:41: SRD
(
jhaydon.snf.stanford.edu
)
73:
Comment wbsilicide 2002-07-19 13:46:50: the HF pots will be changed out
(
jhaydon.snf.stanford.edu
)
74:
Re: Problem wbsilicide 2002-07-08 18:36:29: No HF pots available for usage on monday
(
jhaydon.snf.stanford.edu
)
75:
Comment wbsilicide 2002-07-19 13:48:15: the HF pots will be changed out on monday
(
jhaydon.snf.stanford.edu
)
76:
Problem wbsilicide 2002-07-19 13:50:33: the HF pots are not currently available
(
jhaydon.snf.stanford.edu
)
77:
Re: Problem wbsilicide 2002-07-19 13:50:33: the HF pots are not currently available
(
jhaydon.snf.stanford.edu
)
78:
Shutdown wbsilicide 2002-08-06 07:47:49: fan bearing needs replacement
(
gladys.snf.stanford.edu
)
79:
Re: Shutdown wbsilicide 2002-08-06 07:47:49: fan bearing needs replacement
(
latta.snf.stanford.edu
)
80:
Problem wbsilicide 2002-10-21 14:37:07: wbsilicide baths overfilled with no log
(
xianliu.snf.stanford.edu
)
81:
Re: Problem wbsilicide 2002-10-21 14:37:07: wbsilicide baths overfilled with no log
(
jhaydon.snf.stanford.edu
)
82:
Shutdown wbsilicide 2002-12-16 08:20:02: water leaking from ceiling
(
jhaydon.snf.stanford.edu
)
83:
Re: Shutdown wbsilicide 2002-12-16 08:20:02: water leaking from ceiling
(
jhaydon.snf.stanford.edu
)
84:
Problem wbsilicide 2003-01-02 15:47:14: needs decontamination
(
rcrane.snf.stanford.edu
)
85:
Re: Problem wbsilicide 2003-01-02 15:47:14: needs decontamination:: Done...
(
gladys.snf.stanford.edu
)
86:
Problem wbsilicide 2003-01-30 11:02:51: Left Dump Rinse Not Working
(
jhemanth.snf.stanford.edu
)
87:
Re: Problem wbsilicide 2003-01-30 11:02:51: Left Dump Rinse Not Working
(
jhaydon.snf.stanford.edu
)
88:
Problem wbsilicide 2003-02-26 16:10:47: Report Problem for wbsilicide
(
anayfeh.snf.stanford.edu
)
89:
Problem wbsilicide 2003-02-26 17:56:28: Report Problem for wbsilicide: The HCl/H2O2/H2O pot doesn't show a low liquid level after the wetbench had been disabled; it's ok on both the sulfuric pots...
(
gladys.snf.stanford.edu
)
90:
Re: Problem wbsilicide 2003-02-26 17:56:28: Report Clear for wbsilicide
(
jhaydon.snf.stanford.edu
)
91:
Re: Problem wbsilicide 2003-02-26 16:10:47: Report Clear for wbsilicide
(
jhaydon.snf.stanford.edu
)
92:
Shutdown wbsilicide 2003-09-26 13:43:35: Needs de-con
(
latta.snf.stanford.edu
)
93:
Re: Shutdown wbsilicide 2003-09-26 13:43:35: Report Clear for wbsilicide
(
uli.snf.stanford.edu
)
94:
Problem wbsilicide 2003-10-16 18:52:36: Broken wafer piece found in HF tank...
(
chion.snf.stanford.edu
)
95:
Re: Problem wbsilicide 2003-10-16 18:52:36: Report Clear for wbsilicide
(
uli.snf.stanford.edu
)
96:
Problem wbsilicide 2004-01-01 17:34:51: Dump rinser cycling?
(
shott.snf.stanford.edu
)
97:
Problem wbsilicide 2004-01-08 19:25:14: HCl tank seems to leak
(
chion.snf.stanford.edu
)
98:
Problem wbsilicide 2004-01-08 19:26:03: 4:1 H2SO4 tank Low Liquid Indicator defective
(
chion.snf.stanford.edu
)
99:
Re: Problem wbsilicide 2004-01-01 17:34:51: Dump rinser cycling?
(
jhaydon.snf.stanford.edu
)
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