Subject: Problem wbsilicide 2002-01-17 12:31:12: Silicide spin-rinse dryer does not autoswitch
From: dpant@snf.stanford.edu
Date: Jan 17, 2002 12:31:14 PM

After proper resistivity value is reached the dryer does not automatically switch to
dry-mode (rinsing continues indefinitely)
Had same problem both with 3" and 4" Si wafers